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Conception et intégration de microsystèmes sur un cylindre pour la mesure de ses déformations : application à un outil du domaine de la santé

Abstract : The objective of this assertation is to develop an instrumented cylinder in order to measure its deflection status in medical applications. The cylinders are made of two types of materials: stainless steel and NiTi. The microgauges are distributed along the cylinder to measure its real-time surface strain, thus allowing the cylinder to be guided to its planned destination during a surgical operation.Several approaches for strain measurement are presented and compared, and strain measurement with semiconductor piezoresistive microgauges integrated on the cylinder appears to be the optimal method considering the sensitivity, biomedical compatibility and feasibility in microfabrication.Theoretical analysis and finite element method analysis are carried out in order to analyze the mechanical behavior of the deflected cylinder and to determine the optimal position and size of the piezoresistive microgauges on the cylinder. A first prototype was developed and characterized to verify the functionality of our system.The microgauges are implemented on thin cylinders by microfabrication in cleanroom. Germanium is used as the piezoresistive material. Due to the curved geometry of metal cylinders as the substrate for microfabrication, several ajustments are made to the standard process of material deposition and surface machining. The analysis of experimental results, as well as the possible upgrades of the current process, are discussed.
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Submitted on : Wednesday, September 5, 2012 - 9:20:53 AM
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  • HAL Id : tel-00728177, version 1

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Wenbin Yang. Conception et intégration de microsystèmes sur un cylindre pour la mesure de ses déformations : application à un outil du domaine de la santé. Autre. Université de Grenoble, 2011. Français. ⟨NNT : 2011GRENT068⟩. ⟨tel-00728177⟩

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