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Conception et évaluation des performances d'un microgyromètre vibrant triaxial en GaAS à structure plane

Abstract : This PhD present the conception of a triaxial MEMS microgyro. Microgyros offer a wide range of applications varying from drones attitude control to human interface devices. The triaxial microgyros offer great benefits because they allow determination of the three rotation rate components with only one monolithic planar structure. The operating principle of Coriolis Vibrating Gyro (CVG) has been studied analytically and an original structure has been designed. This structure consists of four beam clamped into a deformable frame. Some silicon prototypes have been machined and characterised. The gallium arsenide (GaAs) has been chosen for the realisation because of its piezoelectric properties and its great miniaturization potential. A transduction system based on GaAs piezoelectricity was developed. Two GaAs machining processes have been developed: a chemical etching process and a plasma etching process which both enable 450 micrometers deep vertical etching. The plasma etching technique allows high fidelity enough machining to be compatible with the triaxial CVG realisation. Some C-doped GaAs test resonators have been realised to measure the resistivity temperature dependency and electromechanical properties of this material. Those characterisations lead to estimate the angular random walk for the three axis ranges below 0,025 degree per square root hour on the temperature range [-40°C +80°C]. This sets the triaxial CVG together with the best monoaxial MEMS CVG.
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Submitted on : Friday, August 31, 2012 - 3:15:26 PM
Last modification on : Friday, October 23, 2020 - 5:04:44 PM
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  • HAL Id : tel-00726916, version 1



Iännis Roland. Conception et évaluation des performances d'un microgyromètre vibrant triaxial en GaAS à structure plane. Autre [cond-mat.other]. Université Paris Sud - Paris XI, 2012. Français. ⟨NNT : 2012PA112119⟩. ⟨tel-00726916⟩



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