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Développement d'un banc de test par gonflement de membranes destiné à la caractérisation mécanique de matériaux déposés en films minces

Hicham Youssef 1
1 LAAS-MINC - Équipe MIcro et Nanosystèmes pour les Communications sans fil
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : The aim of this thesis is to develop and optimize a bench test for mechanical characterization of thin film. MEMS (Micro Electro Mechanical Systems) contain mechanical moving parts that must achieve performance control. These moving parts are subjected to forces, to differences in temperatures, stresses, deformations ... the properties of their materials must be well known as in any mechanical system. The main properties are: Young's modulus, residual stresses, yield, and many others related to reliability. In the Microsystems scale, properties are different from macroscopic scale and depend greatly on the manufacturing process, so it is almost mandatory to perform measurements at each new manufacture. Among the possible tests, bulge test has decisive advantages: it gives sufficiently accurate results for the design of MEMS, it is nondestructive, it simultaneously gives the Young's modulus and residual stress. Associated to Finite Element Analysis, it can reach almost all the characteristics of elasticity, plasticity and fracture. Bulge test consists to apply a hydrostatic pressure on one side of the membrane and to measure its deflection. The measurements of pressure as a function of the deflection are used to extract the mechanical properties of the material using an appropriate numerical mathematical model. If the principle of this technique is relatively simple, its implementation is a source of great difficulty. These relate both to the establishment of a powerful and accurate apparatus, and also the interpretation of the theory itself describing the evolution of the pressure function of the deflection in the center of the membrane. We have developed a test protocol that allows to give accurate measurement with an automated process. Our research work is organized around three themes: The first is devoted to the establishment of an optimized procedure for characterizing mechanically materials deposited in thin layers. In the second we have developed techniques b ased on finite element analysis to characterize the membranes with any rectangular aspect ratio. The third is an application of Bulge test in certain materials used in MEMS fabrication.
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Submitted on : Tuesday, July 24, 2012 - 2:07:59 PM
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Hicham Youssef. Développement d'un banc de test par gonflement de membranes destiné à la caractérisation mécanique de matériaux déposés en films minces. Micro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 2011. Français. ⟨tel-00720388⟩

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