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Étude des applications des micro-afficheurs pour le phototraçage massivement parallèle de structures submicroniques

Abstract : This thesis addresses research and development on massively parallel direct writing. The use of a reconfigurable mask combines the speed of photolithographic projection and the inherent flexibility of spatial light modulators. The project was structured on a threefold basis. Firstly, the aim was to improve the resolution, the write speed and the precision of an existing liquid crystal spatial light modulator based photoplotter at Telecom Bretagne, with a view to reaching the system¿s ultimate resolution limit. Photoresist on glass Diffractive Optical Elements (DOE) with a critical dimension of 1 µm and 32 phase levels and exhibiting zero-order and first-order diffraction efficiencies of respectively less than 1% and around 80 % were fabricated. Secondly, a new photoplotter, based this time on a micromirror spatial light modulator was set up. New writing wavelengths in the region of 365 nm helped to extend the range of photosensitive materials that can be used and to reach submicronic feature sizes. This photoplotter enabled the fabrication of binary DOEs by direct writing into the hybrid sol-gel material Ormocer with a resolution of 700 nm. The final section deals mainly with the study and the first experimental demonstration of the feasibility of combining the massively parallel photoplotting technique with that of the two-photon photopolymerization (2PP). Such a combination enables us to overcome the diffraction limit imposed by conventional plotting systems.
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https://tel.archives-ouvertes.fr/tel-00719635
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Submitted on : Friday, July 20, 2012 - 1:16:37 PM
Last modification on : Wednesday, January 13, 2021 - 3:39:02 AM

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  • HAL Id : tel-00719635, version 1

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Charbel Nassour. Étude des applications des micro-afficheurs pour le phototraçage massivement parallèle de structures submicroniques. Optique / photonique. Télécom Bretagne, Université de Bretagne-Sud, 2012. Français. ⟨NNT : ⟩. ⟨tel-00719635⟩

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