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Micro- et nano-usinage par laser à impulsions ultracourtes : amélioration de procédés par des méthodes tout optique

Abstract : Femtosecond laser machining processes present many interesting properties owing to the specificities of the light/matter interaction in ultrafast regime. Thus the process may be of prime interest in industrial applications. However some aspects are not compatible with industrialization: namely a lack of flexibility and productivity. To overcome this limitations we propose to add beam shaping techniques in the process that allow control of the beam both in size and shape. These techniques are based on Spatial Light Modulators (SLM). Two different solutions are proposed: amplitude modulation in a geometrical conjugation scheme, and pure phase modulation in a Fourier scheme. Both are integrated in a prototype workstation. We justify the different choices made during the development by the analysis of the formalisms and specific problematics. Finally, enhancements of the femtosecond laser machining process are practically demonstrated in three different fields: reducing the resolution to nanometric scale, reducing the processing time of different texturations and enhancing the quality of simple grooves by modifying only the beam shape
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Sébastien Landon. Micro- et nano-usinage par laser à impulsions ultracourtes : amélioration de procédés par des méthodes tout optique. Autre. Université Jean Monnet - Saint-Etienne, 2011. Français. ⟨NNT : 2011STET4031⟩. ⟨tel-00719223⟩

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