P. Et-par, N. , and R. Après-implantation, de 10 15 cm -2 . expérimentales, pas possible de savoir si la présence de l'hélium et plus particulièrement le rapport accélère ou freine les mécanismes d'agglomération. Pour cela, il serait nécessaire de faire des analyses complémentaires Dans un premier temps, il faudrait terminer les mesures RBS et NRA-C en sondant l'axe à 54° pour l'échantillon implanté He 50keV et recuit à 400 °C, et faire les mêmes mesures pour un échantillon recuit à 950 °C. L'exploitation de ces résultats devrait être approfondie en réalisant des simulations McChasy afin de pouvoir quantifier la fraction d'hélium dans chaque site où il a été détecté. Ensuite, il faudrait réaliser des mesures avec des échantillons implantés hélium à très faible énergie pour limiter la création de défauts et pouvoir décorréler les mécanismes propres à la présence de l'hélium des mécanismes propres aux défauts lacunaires, et des implantations à 50 keV à plus faible fluence (10 12 , 10 13 cm -2 ) pour voir si le pic de désorption se décale vers des températures plus basses. Enfin, il parait maintenant indispensable pour avancer dans l'interprétation des mécanismes mis en oeuvre, d'associer un travail important de modélisation à l'échelle atomique à tous ces résultats expérimentaux. échantillons implantés hélium à très faible énergie pour limiter la création de défauts et pouvoir décorréler les mécanismes propres à la présence d'hélium des mécanismes propres aux défauts lacunaires, et des échantillons implantés He à 50 keV à plus faible fluence ) pour voir si le pic de désorption se décale vers des températures plus basses (TDS). Enfin, il parait maintenant indispensable pour avancer dans l'interprétation des mécanismes mis en oeuvre, d'associer un travail important de simulation numérique à tous ces résultats expérimentaux, pp.12-13

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A. Figure, Exemple de fonction de résolution du système PLEPS à Munich avec sa décomposition algébrique en plusieurs gaussiennes (Fichier SiCE8012.dat)