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A. Martin, P. O-'sullivan, and A. Mathewson, Dielectric reliability measurement methods: A review, Microelectronics Reliability 1, 37-72 -Page 204 caractérisation ferroélectrique P-E a montré que les polarisations rémanente et à saturation des films d'orientation (111) étaient plus importante que celles des films d'orientation (100), ce qui est en accord avec l'état de l'art. Les films ont ensuite été caractérisés piézoélectriquement, par deux moyens de mesure, le premier sur le site du Léti et le second dans l'entreprise AixACCT. La méthode de caractérisation est similaire dans les deux cas. Le film est d'abord polarisé. Une déformation sur une poutre macroscopique est ensuite appliquée et les charges sont récupérées. De cette façon, on caractérise le coefficient e 31,f . L'analyse des résultats montre que la mesure est très sensible aux conditions de polarisation, ce qui est un problème connu, mais également au niveau de déformation appliqué, 1998.

C. Dans-les and I. Ii, nous avons montré que l'utilisation d'une couche de platine dont les propriétés structurales sont contrôlées comme électrode inférieure et comme couche de germination est très intéressante car cela nous permet d'obtenir des films piézoélectriques dont les propriétés sont au niveau de l'état de l'art. La possibilité d'obtenir des films dont le coefficient d 31 atteint -150 pm/V a été mise à profit pour réaliser des objets fonctionnels. Le procédé de dépôt proposé dans ce travail de thèse pourra être mis à profit pour réaliser des démonstrateurs actionnés piézoélectriquement dont les performances sont à l

. Dans-le-quatrième-chapitre, la réalisation d'un interrupteur piézoélectrique encapsulé et compensé en température fonctionnant à basse tension a été présentée Il s'agit de la première réalisation d'un tel objet rapportée dans la littérature. La conception de l'empilement a nécessité le développement d'un modèle analytique multicouche. L'interrupteur intègre une couche de compensation en température