M. S. Kushwaha, P. Halevi, L. Dobrzynski, and B. Djafari-rouhani, Acoustic Band- Structure of Periodic Elastic Composites, Physical Review Letters, issue.13, pp.71-2022, 1993.

M. Sigalas and E. N. Economou, Band structure of elastic waves in two dimensional systems, Solid State Communications, vol.86, issue.3, pp.141-143, 1993.
DOI : 10.1016/0038-1098(93)90888-T

W. L. Bragg, The diffraction of chort electromagnetic waves by a crystal, proceedings of the Cambridge Philosophical Siciety, vol.17, pp.43-57, 1913.

H. Lamb, On Waves in an Elastic Plate, Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences, vol.93, issue.648, pp.114-128, 1917.
DOI : 10.1098/rspa.1917.0008

B. A. Auld, Acoustic fields and waves in solids, 1973.

A. Reinhardt, V. Laude, M. Solal, S. Ballandras, and W. Steichen, Investigation of spurious resonances in thin film bulk acoustic wave resonators, IEEE Ultrasonics Symposium, 2004, pp.1698-1701, 2004.
DOI : 10.1109/ULTSYM.2004.1418151

H. Qu, J. Kanski, P. O. Nilsson, and U. O. Karlsson, Surface band structure of ZnTe(110) studied by photoemission, Surface Science, pp.251-252, 1991.

W. E. Newell, Face-mounted piezoelectric resonators, Proceedings of the Institute of Electrical and Electronics Engineers, p.575, 1965.
DOI : 10.1109/PROC.1965.3925

M. S. Kushwaha and P. Halevi, Band???gap engineering in periodic elastic composites, Applied Physics Letters, vol.64, issue.9, pp.1085-1087, 1994.
DOI : 10.1063/1.110940

R. Sprik and G. H. Wegdam, Acoustic band gaps in composites of solids and viscous liquids, Solid State Communications, vol.106, issue.2, pp.77-81, 1998.
DOI : 10.1016/S0038-1098(98)00029-5

J. O. Vasseur, P. A. Deymier, A. Khelif, P. Lambin, B. Djafari-rouhani et al., Phononic crystal with low filling fraction and absolute acoustic band gap in the audible frequency range: A theoretical and experimental study, Physical Review E, vol.65, issue.5, pp.65-056608, 2002.
DOI : 10.1103/PhysRevE.65.056608

Y. J. Cao, Z. L. Hou, and Y. Y. Liu, Finite difference time domain method for band-structure calculations of two-dimensional phononic crystals, Solid State Communications, vol.132, issue.8, pp.539-543, 2004.
DOI : 10.1016/j.ssc.2004.09.003

P. Langlet, A. Hennion, and J. Decarpigny, Analysis of the propagation of plane acoustic waves in passive periodic materials using the finite element method, The Journal of the Acoustical Society of America, vol.98, issue.5, pp.2792-2800, 1995.
DOI : 10.1121/1.413244

R. Martinez-sala, J. Sancho, J. V. Sanchez, V. Gomez, J. Llinares et al., Sound attenuation by sculpture, Nature, vol.10, issue.6554, p.6554, 1995.
DOI : 10.1038/378241a0

. Dobrzynski, Experimental evidence for the existence of absolute acoustic band gaps in two-dimensional periodic composite media, Journal of Physics: Condensed Matter, vol.10, issue.27, p.6051, 1998.

J. V. Sanchez-perez, D. Caballero, R. Martinez-sala, C. Rubio, J. Sanchez-dehesa et al., Sound Attenuation by a Two-Dimensional Array of Rigid Cylinders, Physical Review Letters, vol.80, issue.24, pp.80-5325, 1998.
DOI : 10.1103/PhysRevLett.80.5325

C. Goffaux and J. P. Vigneron, Spatial trapping of acoustic waves in bubbly liquids, Physica B: Condensed Matter, vol.296, issue.1-3, pp.195-200, 2001.
DOI : 10.1016/S0921-4526(00)00800-0

F. Meseguer, M. Holgado, D. Caballero, N. Benaches, J. Nchez-dehesa et al., Rayleigh-wave attenuation by a semi-infinite twodimensional elastic-band-gap crystal, Physical Review B, issue.19, pp.59-12169, 1999.

M. Torres, F. R. De-espinosa, and J. L. Aragon, Ultrasonic Wedges for Elastic Wave Bending and Splitting without Requiring a Full Band Gap, Physical Review Letters, vol.86, issue.19, pp.4282-4285, 2001.
DOI : 10.1103/PhysRevLett.86.4282

A. Khelif, A. Choujaa, B. Djafari-rouhani, M. Wilm, S. Ballandras et al., Trapping and guiding of acoustic waves by defect modes in a full-band-gap ultrasonic crystal, Physical Review B, vol.68, issue.21, pp.68-214301, 2003.
DOI : 10.1103/PhysRevB.68.214301
URL : https://hal.archives-ouvertes.fr/hal-00087953

T. Wu, W. Wang, and J. Sun, A layered SAW device using phononic-crystal reflective gratings, 2008 IEEE Ultrasonics Symposium, pp.709-712, 2008.
DOI : 10.1109/ULTSYM.2008.0169

B. Bonello, C. Charles, and F. Ganot, Velocity of a SAW propagating in a 2D phononic crystal, Ultrasonics, vol.44, pp.1259-1263, 2006.
DOI : 10.1016/j.ultras.2006.05.079
URL : https://hal.archives-ouvertes.fr/hal-01288517

X. Y. Zhang, T. Jackson, E. Lafond, P. Deymier, and J. Vasseur, Evidence of surface acoustic wave band gaps in the phononic crystals created on thin plates, Applied Physics Letters, vol.88, issue.4, p.41911, 2006.
DOI : 10.1063/1.2167794
URL : https://hal.archives-ouvertes.fr/hal-00127836

S. Benchabane, Guidage et filtrage des ondes dans les cristaux phononiques, 2006.
URL : https://hal.archives-ouvertes.fr/tel-00140347

I. El-kady, R. H. Olsson, and J. G. Fleming, Phononic band-gap crystals for radio frequency communications, Applied Physics Letters, vol.92, issue.23, pp.92-233504, 2008.
DOI : 10.1063/1.2938863

S. Mohammadi, A. A. Eftekhar, A. Khelif, W. D. Hunt, and A. Adibi, Evidence of large high frequency complete phononic band gaps in silicon phononic crystal plates, Applied Physics Letters, vol.92, issue.22, pp.92-221905, 2008.
DOI : 10.1063/1.2939097
URL : https://hal.archives-ouvertes.fr/hal-00343928

F. G. Wu, Z. L. Hou, Z. Y. Liu, and Y. Y. Liu, Acoustic band gaps in two-dimensional rectangular arrays of liquid cylinders, Solid State Communications, vol.123, issue.5, pp.239-242, 2002.
DOI : 10.1016/S0038-1098(02)00203-X

F. G. Wu, Z. Y. Liu, and Y. Y. Liu, Acoustic band gaps in 2D liquid phononic crystals of rectangular structure, Journal of Physics D: Applied Physics, vol.35, issue.2, pp.162-165, 2002.
DOI : 10.1088/0022-3727/35/2/309

W. M. Kuang, Z. L. Hou, and Y. Y. Liu, The effects of shapes and symmetries of scatterers on the phononic band gap in 2D phononic crystals, Physics Letters A, vol.332, issue.5-6, pp.5-6, 2004.
DOI : 10.1016/j.physleta.2004.10.009

Z. L. Hou, F. G. Wu, and Y. Liu, Phononic crystals containing piezoelectric material, Solid State Communications, vol.130, issue.11, pp.745-749, 2004.
DOI : 10.1016/j.ssc.2004.03.052

J. Zhan and P. Wei, The influence of material constants on band gaps of piezoelectric phononic crystal, Piezoelectricity, Acoustic Waves, and Device Applications, pp.360-363, 2008.

B. Wu, A. Kumar, and S. Pamarthy, High aspect ratio silicon etch: A review, Journal of Applied Physics, vol.108, issue.5, pp.51101-51121, 2010.
DOI : 10.1063/1.3474652

Y. Tanaka and S. Tamura, Surface acoustic waves in two-dimensional periodic elastic structures, Physical Review B, vol.58, issue.12, pp.7958-7965, 1998.
DOI : 10.1103/PhysRevB.58.7958

S. Benchabane, A. Khelif, J. Y. Rauch, L. Robert, and V. Laude, Evidence for complete surface wave band gap in a piezoelectric phononic crystal, Physical Review E, vol.73, issue.6, p.65601, 2006.
DOI : 10.1103/PhysRevE.73.065601

B. Manzanares-martinez and F. Ramos-mendieta, Surface elastic waves in solid composites of two-dimensional periodicity, Physical Review B, vol.68, issue.13, p.134303, 2003.
DOI : 10.1103/PhysRevB.68.134303

V. Laude, M. Wilm, S. Benchabane, and A. Khelif, Full band gaps for surface acoustic waves in piezoelectric phononic crystals, Ultrasonics Symposium IEEE, vol.2, pp.1046-1049, 2004.
URL : https://hal.archives-ouvertes.fr/hal-00096072

T. T. Wu, L. C. Wu, and Z. G. Huang, Frequency band-gap measurement of two-dimensional air/silicon phononic crystals using layered slanted finger interdigital transducers, Journal of Applied Physics, vol.97, issue.9, p.94916, 2005.
DOI : 10.1063/1.1893209

M. Torres, F. R. De-espinosa, D. Garcia-pablos, and N. Garcia, Sonic Band Gaps in Finite Elastic Media: Surface States and Localization Phenomena in Linear and Point Defects, Physical Review Letters, vol.82, issue.15, pp.3054-3057, 1999.
DOI : 10.1103/PhysRevLett.82.3054

R. E. Vines and J. P. Wolfe, Scanning phononic lattices with surface acoustic waves, Physica B, vol.263, pp.567-570, 1999.

D. M. Profunser, O. B. Wright, O. Matsuda, U. Lang, K. Abdelkrim et al., 6E-5 High Frequency Surface Waves Scattered in Microstructured Phononic Crystals, Ultrasonics Symposium, pp.501-504, 2006.

K. Kokkonen, M. Kaivola, S. Benchabane, A. Khelif, and V. Laude, Scattering of surface acoustic waves by a phononic crystal revealed by heterodyne interferometry, Applied Physics Letters, vol.91, issue.8, pp.91-083517, 2007.
DOI : 10.1063/1.2768910
URL : https://hal.archives-ouvertes.fr/hal-00173880

A. Khelif, B. Aoubiza, S. Mohammadi, A. Adibi, and V. Laude, Hypersonic band gaps in two-dimensional piezoelectric phononic crystal slabs, IEEE Ultrasonics Symposium, 2005., pp.65-68, 2005.
DOI : 10.1109/ULTSYM.2005.1602797
URL : https://hal.archives-ouvertes.fr/hal-00096079

A. Khelif, B. Aoubiza, S. Mohammadi, A. Adibi, and V. Laude, Complete band gaps in two-dimensional phononic crystal slabs, Physical Review E, vol.74, issue.4, p.46610, 2006.
DOI : 10.1103/PhysRevE.74.046610
URL : https://hal.archives-ouvertes.fr/hal-00115023

J. C. Hsu and T. T. Wu, Analysis of lamb-wave dispersion and band gaps of twodimensional piezoelectric pononic-crystal plates, Ieee Ultrasonics Symposium Proceedings, Vols 1-6, pp.624-627, 2007.

R. H. Olsson, I. , J. G. Fleming, I. F. El-kady, M. R. Tuck et al., Micromachined bulk wave acoustic bandgap devices", TRANSDUCERS '07 & Eurosensors XXI, 14th International Conference on Solid-State Sensors, Actuators and Microsystems, pp.317-321, 2007.

R. H. Olsson, I. F. El-kady, M. F. Su, M. R. Tuck, and J. G. Fleming, Microfabricated VHF acoustic crystals and waveguides, Sensors and Actuators A: Physical, vol.145, issue.146, pp.87-93, 2008.
DOI : 10.1016/j.sna.2007.10.081

B. Djafari-rouhani, Y. Pennec, J. O. Vasseur, and A. C. Hladky-hennion, Band gaps in a phononic crystal made of a periodical array of dots on a plate, 2008 14th International Workshop on Thermal Inveatigation of ICs and Systems, pp.163-167, 2008.
DOI : 10.1109/THERMINIC.2008.4669901
URL : https://hal.archives-ouvertes.fr/hal-00361117

L. Feng, X. P. Liu, M. H. Lu, Y. B. Chen, Y. F. Chen et al., Acoustic Backward-Wave Negative Refractions in the Second Band of a Sonic Crystal, Physical Review Letters, vol.96, issue.1, p.14301, 2006.
DOI : 10.1103/PhysRevLett.96.014301

X. D. Zhang and Z. Y. Liu, Negative refraction of acoustic waves in two-dimensional phononic crystals, Applied Physics Letters, vol.85, issue.2, pp.341-343, 2004.
DOI : 10.1063/1.1772854

A. Sukhovich, L. Jing, and J. H. Page, Negative refraction and focusing of ultrasound in two-dimensional phononic crystals, Physical Review B, vol.77, issue.1, p.14301, 2008.
DOI : 10.1103/PhysRevB.77.014301

A. Khelif, A. Choujaa, S. Benchabane, B. Djafari-rouhani, and V. Laude, Guiding and bending of acoustic waves in highly confined phononic crystal waveguides, Applied Physics Letters, vol.84, issue.22, pp.4400-4402, 2004.
DOI : 10.1063/1.1757642
URL : https://hal.archives-ouvertes.fr/hal-00073930

A. Khelif, A. Choujaa, S. Benchabane, V. Laude, and B. Djafari-rouhani, Guiding and filtering acoustic waves in a two-dimensional phononic crystal, IEEE Ultrasonics Symposium, 2004, pp.654-657, 2004.
DOI : 10.1109/ULTSYM.2004.1417809
URL : https://hal.archives-ouvertes.fr/hal-00096071

T. Miyashita, Sonic crystals and sonic wave-guides, Measurement Science and Technology, vol.16, issue.5, pp.47-63, 2005.
DOI : 10.1088/0957-0233/16/5/R01

T. T. Wu, C. H. Hsu, and J. H. Sun, Design of a highly magnified directional acoustic source based on the resonant cavity of two-dimensional phononic crystals, Applied Physics Letters, vol.89, issue.17, pp.89-171912, 2006.
DOI : 10.1063/1.2370382

F. C. Hsu, T. T. Wu, J. C. Hsu, and J. H. Sun, Directional enhanced acoustic radiation caused by a point cavity in a finite-size two-dimensional phononic crystal, Applied Physics Letters, vol.93, issue.20, pp.93-201904, 2008.
DOI : 10.1063/1.3033220

S. Benchabane, A. Khelif, A. Choujaa, B. Djafari-rouhani, and V. Laude, Interaction of waveguide and localized modes in a phononic crystal, Europhysics Letters (EPL), vol.71, issue.4, pp.570-575, 2005.
DOI : 10.1209/epl/i2005-10131-2
URL : https://hal.archives-ouvertes.fr/hal-00074873

Y. Pennec, B. Djafari-rouhani, J. O. Vasseur, H. Larabi, A. Khelif et al., Acoustic channel drop tunneling in a phononic crystal, Applied Physics Letters, vol.87, issue.26, p.261912, 2005.
DOI : 10.1063/1.2158019
URL : https://hal.archives-ouvertes.fr/hal-00072921

Y. Pennec, B. Djafari-rouhani, J. Vasseur, H. Larabi, A. Khelif et al., Channel drop process of elastic wave in a two dimensional phononic crystal, IEEE Ultrasonics Symposium, 2005., pp.69-72, 2005.
DOI : 10.1109/ULTSYM.2005.1602798
URL : https://hal.archives-ouvertes.fr/hal-00096081

J. Lourtioz, H. Benisty, A. Chelnokov, S. David, and S. Olivier, Photonic crystals and the real world of optical telecommunications, Annals of Telecommunications, vol.58, issue.9, pp.1197-1237, 2003.

V. Laude, A. Khelif, S. Benchabane, M. Wilm, T. Sylvestre et al., Phononic band-gap guidance of acoustic modes in photonic crystal fibers, Physical Review B, vol.71, issue.4, p.45107, 2005.
DOI : 10.1103/PhysRevB.71.045107
URL : https://hal.archives-ouvertes.fr/hal-00097438

R. S. Hegde, H. G. Winful, and A. Galvanaskas, Suppression of stimulated Brillouin scattering in a photonic/phononic crystal fiber", Lasers and Electro-Optics, Conference on, pp.1-2, 2007.

D. Gerard, V. Laude, B. Sadani, A. Khelif, D. Van-labeke et al., Modulation of the extraordinary optical transmission by surface acoustic waves, Physical Review B, vol.76, issue.23, p.235427, 2007.
DOI : 10.1103/PhysRevB.76.235427
URL : https://hal.archives-ouvertes.fr/hal-00258531

A. Volatier, G. Caruyer, D. Pellissier-tanon, P. Ancey, E. Defay et al., UHF/VHF resonators using lamb waves co-integrated with bulk acoustic wave resonators, IEEE Ultrasonics Symposium, 2005., pp.902-905, 2005.
DOI : 10.1109/ULTSYM.2005.1602996

M. Desvergne, E. Defay, D. Wolozan, M. Aid, P. Vincent et al., Intermediate frequency lamb wave coupled resonator filters for RF receiver architectures, ESSDERC 2007, 37th European Solid State Device Research Conference, pp.358-361, 2007.
DOI : 10.1109/ESSDERC.2007.4430952

F. Domingue, I. Kone, M. Gorisse, and A. Reinhardt, Micro-résonateurs acoustiques à ondes de Lamb pour les communications sans fil, ACFAS, 2010.

I. Koné, Résonateurs à Ondes Acoustiques Guidées sur Miroir de Bragg, 2010.

R. Jakkaraju, G. Henn, C. Shearer, A. Harris, N. Rimmer et al., Integrated approach to electrode and AlN depositions for bulk acoustic wave (BAW) devices, Microelectronic Engineering, vol.70, issue.2-4, pp.566-570, 2003.
DOI : 10.1016/S0167-9317(03)00386-1

A. Artieda, M. Barbieri, C. S. Sandu, and P. Muralt, Effect of substrate roughness on c-oriented AlN thin films, Journal of Applied Physics, vol.105, issue.2, p.24504, 2009.
DOI : 10.1063/1.3068309

A. Volatier, G. Caruyer, D. P. Tanon, P. Ancey, E. Defay et al., UHF/VHF resonators using lamb waves co-integrated with bulk acoustic wave resonators, IEEE Ultrasonics Symposium, 2005., pp.902-905, 2005.
DOI : 10.1109/ULTSYM.2005.1602996

T. Hoang, Design and realization of SAW pressure sensor using Aluminum Nitride, 2009.
URL : https://hal.archives-ouvertes.fr/tel-00540305

P. Ivaldi, J. Abergel, G. Arndt, P. Robert, P. Andreucci et al., 50 nm thick AlN resonant micro-cantilever for gas sensing application, 2010 IEEE International Frequency Control Symposium, pp.81-84, 2010.
DOI : 10.1109/FREQ.2010.5556370

P. Ivaldi, J. Abergel, E. Colinet, M. H. Matheny, L. G. Villanueva et al., 50 nm thick AlN film-based piezoelectric cantilevers for gravimetric detection, Journal of Micromechanics and Microengineering, vol.21, issue.8, p.85023, 2011.
DOI : 10.1088/0960-1317/21/8/085023

A. Lefèvre, Procédé pour obtenir une couche d'AlN à flancs sensiblement verticaux, CEA, p.37099, 2010.

I. Kone, B. Dubus, L. Buchaillot, A. Reinhardt, F. Casset et al., Resonator using Guided waves in a piezoelectric layer above a Bragg mirror, 2008 IEEE International Frequency Control Symposium, pp.581-585, 2008.
DOI : 10.1109/FREQ.2008.4623066
URL : https://hal.archives-ouvertes.fr/hal-00360387

R. Ruby, J. Larson, C. Feng, and S. Fazzio, The effect of perimeter geometry on FBAR resonator electrical performance, Microwave Symposium Digest, 2005 IEEE MTT-S International, p.pp, 2005.

R. C. Ruby, J. D. Larson, R. S. Fazzio, and C. Feng, Performance degradation effects in FBAR filters and resonators due to lamb wave modes, IEEE Ultrasonics Symposium, 2005., pp.1832-1835, 2005.
DOI : 10.1109/ULTSYM.2005.1603225

A. Reinhardt, M. Clement, J. Olivares, E. Iborra, N. Rimmer et al., Multiple frequency Solidly Mounted BAW filters, 2011 Joint Conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS) Proceedings, pp.1-5, 2011.
DOI : 10.1109/FCS.2011.5977800

A. Alippi, F. Craciun, and E. Molinari, Piezoelectric plate resonances due to first Lamb symmetrical mode, Journal of Applied Physics, vol.64, issue.4, pp.2238-2240, 1988.
DOI : 10.1063/1.341695

Y. Jin and S. G. Joshi, Coupling of interdigital transducer to ultrasonic Lamb waves, Applied Physics Letters, vol.58, issue.17, pp.1830-1832, 1991.
DOI : 10.1063/1.105102

Y. Nakagawa, S. Tanaka, and S. Kakio, Lamb-Wave-Type High Frequency Resonator, Japanese Journal of Applied Physics, vol.42, issue.Part 1, No. 5B, pp.42-3086, 2003.
DOI : 10.1143/JJAP.42.3086

Y. Nakagawa, M. Momose, and S. Kakio, Characteristics of Reflection of Resonators Using Lamb Wave on AT-Cut Quartz, Japanese Journal of Applied Physics, vol.43, issue.5B, pp.43-3020, 2004.
DOI : 10.1143/JJAP.43.3020

Y. Nakagawa, M. Momose, and S. Kakio, Resonators Using a Lamb Wave on AT-Cut Quartz, Japanese Journal of Applied Physics, vol.46, issue.7B, pp.46-4665, 2007.
DOI : 10.1143/JJAP.46.4665

T. Laurent, F. O. Bastien, J. Pommier, A. Cachard, D. Remiens et al., Lamb wave and plate mode in ZnO/silicon and AlN/silicon membrane, Sensors and Actuators A: Physical, vol.87, issue.1-2, pp.26-37, 2000.
DOI : 10.1016/S0924-4247(00)00470-2
URL : https://hal.archives-ouvertes.fr/hal-00158554

J. Bjurstrom, I. Katardjiev, V. , and V. Yantchev, Lateral-field-excited thin-film Lamb wave resonator, Applied Physics Letters, vol.86, issue.15, p.154103, 2005.
DOI : 10.1063/1.1900312

H. Jia, R. Duhamel, J. F. Manceau, M. De-labachelerie, and F. Bastien, Improvement of Lamb waves sensors temperature sensitivity compensation, IEEE Symposium on Ultrasonics, 2003, pp.321-326, 2005.
DOI : 10.1109/ULTSYM.2003.1293377

V. Yantchev and I. Katardjiev, Micromachined thin film plate acoustic resonators utilizing the lowest order symmetric lamb wave mode, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, vol.54, issue.1, pp.87-95, 2007.
DOI : 10.1109/TUFFC.2007.214

M. Desvergne, C. Bernier, P. Vincent, Y. Deval, and J. B. Begueret, Intermediate Frequency Lamb Wave Resonators and Filters for RF Receiver Architectures, ICECS '06. 13th IEEE International Conference on, pp.1045-1048, 2006.
URL : https://hal.archives-ouvertes.fr/hal-00178586

M. Desvergnes, Etude des résonateurs MEMS à ondes de Lamb ? Application au filtrage en fréquence intermédiaire dans les récepteurs de radiotélécommunication, 2007.

P. J. Stephanou and A. P. Pisano, PS-4 GHZ Contour Extensional Mode Aluminum Nitride MEMS Resonators, 2006 IEEE Ultrasonics Symposium, pp.2401-2404, 2006.
DOI : 10.1109/ULTSYM.2006.581

J. H. Kuypers, C. Lin, G. Vigevani, and A. P. Pisano, Intrinsic temperature compensation of aluminum nitride Lamb wave resonators for multiple-frequency references, 2008 IEEE International Frequency Control Symposium, pp.240-249, 2008.
DOI : 10.1109/FREQ.2008.4622998

G. Wingqvist, L. Arapan, V. Yantchev, and I. Katardjiev, Temperature compensation of thin AlN film resonators utilizing the lowest order symmetric lamb mode, 2008 IEEE Ultrasonics Symposium, pp.1207-1210, 2008.
DOI : 10.1109/ULTSYM.2008.0291

G. Polo-filisan, Métamodèle de résonateurs piézoélectriques à ondes de Lamb, 2009.

W. P. Mason, A Dynamic Measurement of the Elastic, Electric and Piezoelectric Constants of Rochelle Salt, Physical Review, vol.55, issue.8, pp.775-789, 1939.
DOI : 10.1103/PhysRev.55.775

J. F. Rosenbaum, Bulk Acoustic Wave Theory and Devices, Artech House, 1988.

J. F. Rosenbaum, Bulk acoustic wave, theory and devices, Artech House, 1988.

R. Abdolvand and F. Ayazi, 7E-4 Enhanced Power Handling and Quality Factor in Thin-Film Piezoelectric-on-Substrate Resonators, 2007 IEEE Ultrasonics Symposium Proceedings, pp.608-611, 2007.
DOI : 10.1109/ULTSYM.2007.158

V. Yantchev, L. Arapan, and I. Katardjiev, Micromachined thin film plate acoustic wave resonators (FPAR): Part II, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, vol.56, issue.12, pp.2701-2710, 2009.
DOI : 10.1109/TUFFC.2009.1361

C. Zuo, J. Van-der-spiegel, and G. Piazza, 1.05 GHz MEMS oscillator based on lateral-field-excited piezoelectric AlN resonators, 2009 IEEE International Frequency Control Symposium Joint with the 22nd European Frequency and Time forum, pp.381-384, 2009.
DOI : 10.1109/FREQ.2009.5168205
URL : https://hal.archives-ouvertes.fr/in2p3-00013684

T. Yen, C. Lin, Y. Lai, D. Wittwer, M. A. Hopcroft et al., Fine frequency selection techniques for aluminum nitride Lamb wave resonators, 2010 IEEE International Frequency Control Symposium, pp.9-13, 2010.
DOI : 10.1109/FREQ.2010.5556384

T. Yen, C. Lin, M. A. Hopcroft, J. H. Kuypers, D. G. Senesky et al., Synthesis of narrowband AlN Lamb wave ladder-type filters based on overhang adjustment, 2010 IEEE International Ultrasonics Symposium, pp.970-973, 2010.
DOI : 10.1109/ULTSYM.2010.5935975

G. Piazza, P. J. Stephanou, and A. P. Pisano, One and two port piezoelectric higher order contour-mode MEMS resonators for mechanical signal processing, Solid-State Electronics, vol.51, issue.11-12, pp.11-12, 2007.
DOI : 10.1016/j.sse.2007.09.037

N. Kuo, C. Zuo, and G. Piazza, Microscale inverse acoustic band gap structure in aluminum nitride, Applied Physics Letters, vol.95, issue.9, p.93501, 2009.
DOI : 10.1063/1.3213345

J. Kaitila, M. Ylilammi, and J. Ella, Resonator structure and a filter comprising such a resonator structure, p.6812619, 2004.

R. Sinha, L. R. Carley, and D. Kim, Array of BAW resonators with mask controlled resonant frequencies, Brevet, p.277034, 2010.

M. Gorisse, A. Reinhardt, C. Billard, M. Borel, E. Defay et al., Lateral Field Excitation of membrane-based Aluminum Nitride resonators, 2011 Joint Conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS) Proceedings, pp.139-143, 2011.
DOI : 10.1109/FCS.2011.5977794

C. D. Corso, A. Dickherber, and W. D. Hunt, Lateral field excitation of thickness shear mode waves in a thin film ZnO solidly mounted resonator, Journal of Applied Physics, vol.101, issue.5, p.54514, 2007.
DOI : 10.1063/1.2562040

M. Gorisse, F. Domingue, G. Polo-filisan, C. Billard, I. Koné et al., Parametric study of aluminum nitride Lamb wave resonators, 2010 IEEE International Ultrasonics Symposium, pp.2087-2090, 2010.
DOI : 10.1109/ULTSYM.2010.5935720
URL : https://hal.archives-ouvertes.fr/hal-00800839

F. G. Wu, Z. L. Hou, Z. Y. Liu, and Y. Y. Liu, Point defect states in two-dimensional phononic crystals, Physics Letters A, vol.292, issue.3, pp.198-202, 2001.
DOI : 10.1016/S0375-9601(01)00800-3

Y. J. Cao, Z. L. Hou, and Y. Y. Liu, Convergence problem of plane-wave expansion method for phononic crystals, Physics Letters A, vol.327, issue.2-3, pp.247-253, 2004.
DOI : 10.1016/j.physleta.2004.05.030

T. T. Wu, Z. G. Huang, and S. Lin, Surface and bulk acoustic waves in two-dimensional phononic crystal consisting of materials with general anisotropy, Physical Review B, vol.69, issue.9, p.94301, 2004.
DOI : 10.1103/PhysRevB.69.094301

Z. L. Hou, X. J. Fu, and Y. Y. Liu, Singularity of the Bloch theorem in the fluid/solid phononic crystal, Physical Review B, vol.73, issue.2, p.24304, 2006.
DOI : 10.1103/PhysRevB.73.024304

Z. L. Hou and B. M. Assouar, Modeling of Lamb wave propagation in plate with two-dimensional phononic crystal layer coated on uniform substrate using plane-wave-expansion method, Ieee Ultrasonics Symposium Proceedings, Vols 1-6, pp.179-182, 2007.
DOI : 10.1016/j.physleta.2007.10.080

J. O. Vasseur, P. A. Deymier, B. Chenni, B. Djafari-rouhani, L. Dobrzynski et al., Experimental and Theoretical Evidence for the Existence of Absolute Acoustic Band Gaps in Two-Dimensional Solid Phononic Crystals, Physical Review Letters, vol.86, issue.14, pp.86-3012, 2001.
DOI : 10.1103/PhysRevLett.86.3012

S. Ballandras, G. Pierre, F. Blanc, P. F. Edoa, and W. Steichen, A periodic finite element formulation for the design of 2-2 composite transducers, 1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027), pp.957-960, 1999.
DOI : 10.1109/ULTSYM.1999.849147

O. C. Zienkiewicz and R. L. Taylor, The Finite Element Method Fifth edition -Volume 1: The basis, 2000.

G. Teissier, Mémoire de stage d'immersion, ENSMM, rapport de stage, 2010.

S. Mohammadi, A. A. Eftekhar, A. Khelif, H. Moubchir, R. Westafer et al., Complete phononic bandgaps and bandgap maps in two-dimensional silicon phononic crystal plates, Electronics Letters, vol.43, issue.16, pp.43-898, 2007.
DOI : 10.1049/el:20071159
URL : https://hal.archives-ouvertes.fr/hal-00175038

S. Mohammadi, A. A. Eftekhar, W. D. Hunt, and A. Adibi, High-Q micromechanical resonators in a two-dimensional phononic crystal slab, Applied Physics Letters, vol.94, issue.5, p.51906, 2009.
DOI : 10.1063/1.3078284

M. Ziaei-moayyed, M. F. Su, C. Reinke, I. F. El-kady, and R. H. Olsson, Silicon carbide phononic crystal cavities for micromechanical resonators, 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, pp.1377-1381, 2011.
DOI : 10.1109/MEMSYS.2011.5734691

J. H. Sun and T. T. Wu, A Lamb Wave Source Based on the Resonant Cavity of Phononic-Crystal Plates, Ieee Transactions on Ultrasonics Ferroelectrics and Frequency Control, vol.56, issue.1, pp.121-128, 2009.

D. Goettler, M. Su, Z. Leseman, Y. Soliman, R. Olsson et al., Realizing the frequency quality factor product limit in silicon via compact phononic crystal resonators, Journal of Applied Physics, vol.108, issue.8, p.84505, 2010.
DOI : 10.1063/1.3475987

S. Mohammadi, A. A. Eftekhar, R. Pourabolghasem, and A. Adibi, Simultaneous high-Q confinement and selective direct piezoelectric excitation of flexural and extensional lateral vibrations in a silicon phononic crystal slab resonator, Sensors and Actuators A: Physical, vol.167, issue.2, pp.524-530, 2011.
DOI : 10.1016/j.sna.2011.03.014

S. Benchabane, G. Ulliac, O. Gaiffe, R. Salut, Y. Achaoui et al., Hypersonic phononic crystal for surface acoustic waves, 2010 IEEE International Ultrasonics Symposium, pp.158-161, 2010.
DOI : 10.1109/ULTSYM.2010.5935553
URL : https://hal.archives-ouvertes.fr/hal-00541927

Y. M. Soliman, M. F. Su, Z. C. Leseman, C. M. Reinke, I. El-kady et al., Phononic crystals operating in the gigahertz range with extremely wide band gaps, Applied Physics Letters, vol.97, issue.19, pp.97-193502, 2010.
DOI : 10.1063/1.3504701

M. Gorisse, S. Benchabane, G. Teissier, C. Billard, A. Reinhardt et al., Observation of band gaps in the gigahertz range and deaf bands in a hypersonic aluminum nitride phononic crystal slab, Applied Physics Letters, vol.98, issue.23, pp.98-234103, 2011.
DOI : 10.1063/1.3598425
URL : https://hal.archives-ouvertes.fr/hal-00639162

Y. Achaoui, A. Khélif, S. Benchabane, and V. Laude, Polarization state and level repulsion in two-dimensional phononic crystals and waveguides in the presence of material anisotropy, Journal of Physics D: Applied Physics, vol.43, issue.18, pp.43-185401, 2010.
DOI : 10.1088/0022-3727/43/18/185401
URL : https://hal.archives-ouvertes.fr/hal-00539575

F. L. Hsiao, A. Khelif, H. Moubchir, A. Choujaa, C. C. Chen et al., Complete band gaps and deaf bands of triangular and honeycomb water-steel phononic crystals, Journal of Applied Physics, vol.101, issue.4, p.44903, 2007.
DOI : 10.1063/1.2472650
URL : https://hal.archives-ouvertes.fr/hal-00143548

T. Wu and Z. Huang, Tunable phononic band gaps of surface and bulk acoustic waves in two-dimensional phononic crystals, Ultrasonics Symposium, vol.2, pp.1042-1045, 2004.

Z. Huang and T. Wu, Temperature effect on the bandgaps of surface and bulk acoustic waves in two-dimensional phononic crystals, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, vol.52, issue.3, pp.365-370, 2005.
DOI : 10.1109/TUFFC.2005.1417258

K. L. Jim, C. W. Leung, S. T. Lau, S. H. Choy, and H. L. Chan, Thermal tuning of phononic bandstructure in ferroelectric ceramic/epoxy phononic crystal, Applied Physics Letters, vol.94, issue.19, pp.94-193501, 2009.
DOI : 10.1063/1.3136752

K. Bertoldi and M. C. Boyce, Wave propagation and instabilities in monolithic and periodically structured elastomeric materials undergoing large deformations, Physical Review B, vol.78, issue.18, p.184107, 2008.
DOI : 10.1103/PhysRevB.78.184107

J. Y. Yeh, Control analysis of the tunable phononic crystal with electrorheological material, Physica B: Condensed Matter, vol.400, issue.1-2, pp.137-144, 2007.
DOI : 10.1016/j.physb.2007.06.030

B. Wu, R. J. Wei, C. F. He, and H. Y. Zhao, Research on two-dimensional phononic crystal with magnetorheological material, pp.1484-1486, 2008.

A. Volatier, Intégration de matériaux piézoélectriques et électrostrictifs dans les dispositifs radiofréquence à ondes acoustiques, 2007.

F. Benabid, Hollow-core photonic bandgap fibre: new light guidance for new science and technology, Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, vol.58, issue.20, pp.3439-3462, 1849.
DOI : 10.1103/PhysRevLett.58.2059

N. Wang, J. M. Tsai, F. L. Hsiao, B. W. Soon, D. L. Kwong et al., Experimental Investigation of a Cavity-Mode Resonator Using a Micromachined Two-Dimensional Silicon Phononic Crystal in a Square Lattice, IEEE Electron Device Letters, vol.32, issue.6, pp.32-821, 2011.
DOI : 10.1109/LED.2011.2136311

S. Mohammadi, A. A. Eftekhar, and A. Adibi, Support loss-free micro/nanomechanical resonators using phononic crystal slab waveguides, Frequency Control Symposium (FCS) IEEE International, pp.521-523, 2010.

M. Ke, M. Zubtsov, and R. Lucklum, Sub-wavelength phononic crystal liquid sensor, Journal of Applied Physics, vol.110, issue.2, p.26101, 2011.
DOI : 10.1063/1.3610391

L. Y. Wu, L. W. Chen, and C. M. Liu, Acoustic energy harvesting using resonant cavity of a sonic crystal, Applied Physics Letters, vol.95, issue.1, p.13506, 2009.
DOI : 10.1063/1.3176019

L. Sorenson, J. Fu, and F. Ayazi, Linear acoustic bandgap arrays for spurious mode suppression in piezoelectric MEMS resonators, 2011 Joint Conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS) Proceedings, pp.1-5, 2011.
DOI : 10.1109/FCS.2011.5977862

T. S. Luk and I. El-kady, Photonic and phononic crystal research at Sandia, 2008.