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?. .. ???, . .. Cvd-????????????????????, .. ?. ??, ?. .. Thermodynamique, .. ?. ?? et al., 20 II. 2. 2. Cinétique et mécanisme du transport ???????????????????..21 II. 2. 3, II. Techniques d'élaboration des films Précurseurs alkyles ??????????...?????????????25 II. 2. 4. Avantages et inconvénients du procédé ??????????????????..26 II. 3. Technique de dépôt Sol-Gel ??????????????????????.???..27 II. 3. 1. Généralités ??????????????????????????.???..27 II. 3. 2. Principes fondamentaux du processus Sol-Gel ????????????.???..27 II. 3. 2. 1. Précurseurs Sol-Gel ????????????????????.???.27 II. 3. 2. 2. Réactions mises en jeu ???????????????????.???, p.28

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I. Figure, Spectre de FTIR d'une poudre de sol (x=3, h=20) traitée à 80°C

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V. Figure, Figures de pôles de deux familles des plans {111} q et {-111} m des dépôts de zircone avec couches multiples obtenues par la voie Sol-Gel traités à : 450°C (a) 2 couches (b)

?. .. Pa and . .. ??-??????????????????????????????????, 98 III. 12. Figures de pôles selon l'orientation {111} pour les films de zircone élaborés sous différentes pressions partielles d'oxygène : a) 5 Pa ; b) 40 Pa et c), p.101

P. Et, Particularité : Morphologie ???????????????????107 III. 17. Images MEB-FEG des films de zircone déposés à différentes pressions totales (a), p.75

P. Et, 260 Pa, respectivement (section transverse) ???????????????.108 III. 18. Variation de la vitesse de dépôt en fonction de la pression totale ????????, p.109

?. Pa, 112 III. 20. Figures des pôles selon l'orientation <200> pour les films de zircone déposés à différentes pressions totales dans l'enceinte de réaction : (a), pp.75-260

?. Pa, 112 III. 21. Diffractogramme DRX des films de zircone déposés sur de substrats de silicium à différentes fréquences d'injection

?. Hz and . Iii, Orientation préférentielle {200} pour les films de zircone déposés

?. .. ??151 and . Iii, Morphologies (surface) et épaisseurs (coupe transverse) des films de zircone en fonction de la température du substrat ; (a-f) 600°C, (b-g) 650°C, (c-h) 750°C, (d-i) 850°C et (e-j) 950°C ?152 III. 48. Tracé d'Arrhenius pour les films de zircone déposés à différentes températures du substrat, ????????????????????????????????????154 III. 49. Coefficients de texture en fonction des températures du substrat ????..????155 III. 50. Figures de pôles selon les orientations {111} et {200} pour les films déposés à : (a), p.600

. Monoclinique, {111} quadratique et (c) {200} quadratique pour le film de zircone déposés à 850°C ????????????????????????????????????159 III. 52. Figures de pôles selon les orientations ; (a) {-111} monoclinique, p.111

. Monoclinique, {111} quadratique et (c) {200} quadratique pour le film de zircone déposés à 950°C ????????????????????????????????????160 III. 53. Courbes d ?? = f (sin 2 ?) des films de zircone déposés à différentes températures du substrat, ????????????????????????????????????163 III. 54. Evolution des contraintes résiduelles dans les films de zircone en fonction de la température du substrat. ?????????????????????????????...164

6. and 9. ??????????????????????????????, ?221 IV. 30. Schématisation des contraintes intrinsèques et thermiques dans un revêtement de zircone sur substrat d'alumine ??????????????????????????????, p.223

6. , P. Pa-par, and M. ????????????????????????, Évolution des contraintes intrinsèques évaluées à partir des contraintes résiduelles et des contraintes extrinsèques dans les films de zircone déposés à 600°C en fonction du temps de dépôt. (? thermoélastiques ~ 1.1 GPa) ?????????????????????????????, Evolution des orientations cristallographiques au sein du film de ZrO 2 quadratique déposé à?240 V.7. Évolution des contraintes intrinsèques mesurées par XRD dans les films de zircone déposés par MOCVD à différentes températures du substrat. (? thermoélastiques tableau III.15) ???????241 V. 8. Microstructure des films de zircone déposés par MOCVD à différentes températures du substrat : (a) 650°C et (b) 950°C ??????????????????????????.242 V. 9. Évolution des contraintes intrinsèques dans les dépôts de zircone obtenus par MOCVD et

. Sol, Gel et leur impact sur la microstructure ??????????????????????243 V.10. Illustration schématique de la superposition de deux dépôts de zircone réalisés par MOCVD ???????????????????????????????????, p.245