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Conception et caractérisation de microgénérateurs piézoélectriques pour microsystèmes autonomes

Abstract : This PhD thesis context is about energy harvesting in order to have autonomous sensors. The problematic of the coupling of piezoelectric mechanical energy harvesters with the mechanical vibration source has been studied. To be efficient, the harvesters have to work at lower frequencies and on larger frequency ranges. To work at lower frequencies, we designed, fabricated and characterized AlN piezoelectric clamped free beams. We proved that it was possible to harvest 0.6µW for a volume of less than 3mm3. Our devices have very good figures of merit compared to literature. To work on wider frequency ranges, we propose an innovative nonlinear hardening method. It has been proven experimentally, with an adaptability of the resonance frequency of more than 50% under 500Hz.
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https://tel.archives-ouvertes.fr/tel-00669633
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Submitted on : Wednesday, June 6, 2012 - 2:57:05 PM
Last modification on : Friday, December 11, 2020 - 8:28:04 AM
Long-term archiving on: : Friday, September 7, 2012 - 2:21:45 AM

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  • HAL Id : tel-00669633, version 1

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Maxime Defosseux. Conception et caractérisation de microgénérateurs piézoélectriques pour microsystèmes autonomes. Micro et nanotechnologies/Microélectronique. Université de Grenoble, 2011. Français. ⟨tel-00669633⟩

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