Développement et modélisation de plateformes à ondes acoustiques de surface guidées : caractérisation des propriétés mécaniques de films minces mésoporeux

Abstract : This research thesis presents the development of acoustic wave sensors, particularly Love wave sensors, using mesoporous materials. The first part of this work has focused on the development of a method to characterize the stiffness modulus of a mesoporous film, deposited on a sensor, and under humidity exposure. The experimental setup allows simultaneous acoustic and ellipsometric measurements. Changes in the stiffness modulus of a mesoporous titania film as a function of humidity were calculated using a curve-fitting procedure between experimental results and a numerical model dedicated to modeling the Love waves propagation in the structure. We have shown that the influence of sorption on the mechanical behavior of a mesoporous film is an important factor to consider, especially in the design of micro-sensors. Subsequently, devices coated with SiO2 and TiO2 mesoporous were developed for different applications : the detection of volatile organic compounds, the detection of biological species and the monitoring of a photocatalysis reaction. Finally, we realized sensors coated with a single layer of mesoporous TiO2 that performs the functions of waveguide and sensitive layer, which enable to increase significantly the sensor sensitivity.
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  • HAL Id : tel-00668870, version 1

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Laurianne Blanc. Développement et modélisation de plateformes à ondes acoustiques de surface guidées : caractérisation des propriétés mécaniques de films minces mésoporeux. Micro et nanotechnologies/Microélectronique. Université Sciences et Technologies - Bordeaux I, 2011. Français. ⟨tel-00668870⟩

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