A. Chaput, M. Bendraoui, C. Cadoret, R. Pariset, and . Cadoret, Phosphine and Arsine Decompostion in CVD Reactors for InP and InGaAs, Growth Journal of Crystal Growth, vol.192, pp.423-431, 1988.

E. Gil-lafon, J. Napierala, D. Castelluci, A. Pimpinelli, R. Cadoret et al., Selective growth of GaAs by HVPE: keys for accurate control of the growth morphologies, Journal of Crystal Growth, vol.222, issue.3, pp.482-496, 2001.
DOI : 10.1016/S0022-0248(00)00961-1

M. Deschler, K. Grüter, A. Schlegel, R. Beccard, H. Jürgensen et al., Balk : Very rapid growth of high quality GaAs, InP and related III-V materials compounds, Journal de Physique, vol.49, issue.C4, pp.689-692, 1998.

H. Banvillet, E. Gil, R. Cadoret, P. Disseix, K. Ferdjani et al., Optical investigation in ultrathin InAs/InP quantum wells grown by hydride vapor???phase epitaxy, Journal of Applied Physics, vol.70, issue.3, pp.1638-1641, 1991.
DOI : 10.1063/1.349529

E. Gil, H. Banvillet, N. Piffault, R. Cadoret, K. Ferdjani et al., Strained Quantum Wells growth by Hydride Vapor Phase Epitaxy and photoluminescence studies J, Electrochem. Soc, vol.138, pp.4-238, 1991.

M. Lambert, L. Goldstein, A. Peralès, F. Gaborit, C. Starck et al., High quality InP and In1???xGaxAsyP1???y grown by gas source MBE, Journal of Crystal Growth, vol.111, issue.1-4, p.495, 1991.
DOI : 10.1016/0022-0248(91)91027-8

[. Kuroda, S. Sugou, T. Sasaki, and M. Kitamura, Selective growth of InGaAs/InP layers by gas source MBE with atomic hydrogen irradiation, 1993 (5th) International Conference on Indium Phosphide and Related Materials, pp.52-55, 1993.
DOI : 10.1109/ICIPRM.1993.380712

[. F. Morris and H. Fukui, A new GaAs, GaP, and GaAsxP1???x vacuum deposition technique using arsine and phosphine gas, Journal of Vacuum Science and Technology, vol.11, issue.2, pp.506-510, 1974.
DOI : 10.1116/1.1317848

[. Goldstein, Chemical beam epitaxy and related techniques Edited by, p.279, 1997.

[. T. Tsang, Elimination of oval defects in epilayers by using chemical beam epitaxy, Applied Physics Letters, vol.46, issue.11, p.1086, 1974.
DOI : 10.1063/1.95770

[. Nordell and J. , MOVPE growth of InP around reactive ion etched mesas, Journal of Crystal Growth, vol.114, issue.1-2, pp.92-98, 1991.
DOI : 10.1016/0022-0248(91)90683-V

H. Sik, Y. L. Bellego, P. Win, S. Bouchole, G. Patriarche et al., Planar selective regrowth of high resistivity semi-insulating InP(Fe) by LP-MOVPE for buried lasers using TBP, Journal of Crystal Growth, vol.195, issue.1-4, pp.479-484, 1998.
DOI : 10.1016/S0022-0248(98)00706-4

[. Bertone, A. Bricconi, R. Y. Fang, L. Greborio, G. Magnetti et al., MOCVD regrowth of semi-insulating InP and p-n junction blocking layers around laser active stripes, Journal of Crystal Growth, vol.170, issue.1-4, pp.715-718, 1997.
DOI : 10.1016/S0022-0248(96)00537-4

M. Nido, K. Komazaki, K. Kobayashi, M. Endo, T. Ueno et al., AlGaAs/GaAs self-aligned LD's fabricated by the process containing vapor phase etching and subsequent MOVPE regrowth, IEEE Journal of Quantum Electronics, vol.23, issue.6, pp.720-724, 1987.
DOI : 10.1109/JQE.1987.1073412

[. Nordell and J. Borglind, Improved InP regrowth properties in metalorganic vapor phase epitaxy by addition of CCl 4

[. Nordell, J. Borglind, and G. , Influence of MOVPE growth conditions and CCl4 addition on InP crystal shapes, Journal of Crystal Growth, vol.125, issue.3-4, pp.597-611, 1992.
DOI : 10.1016/0022-0248(92)90302-Y

[. Härle, B. Rose, and D. , Robein : Influence of CCl 4 on InP and on the incorporation of Zn and Si in InP for Chlorine Assisted Selective Area Epitaxy by AP, MOVPE 6 th International Conference on Metalorganic Vapour Phase Epitaxy, pp.273-274, 1992.

D. Suzuki, T. Kimura, T. H. Takiguchi, M. Tada, Y. Takemi et al., Planar Selective Re-growth around a Dry-etched Mesa along the [110] Direction by Addition of HCl during MOCVD Growth, th International Conference on Indium Phosphide and Related Materials (IPRM), pp.321-324, 1998.

[. Takeuchi and T. Tanahashi, Comparison of chlorocarbons as an additive during MOVPE for flat burying growth of InP, Journal of Crystal Growth, vol.174, issue.1-4, pp.611-615, 1997.
DOI : 10.1016/S0022-0248(97)00066-3

[. Bertone, R. Campi, and G. , Etching of InP-based MQW laser structure in a MOCVD reactor by chlorinated compounds, Journal of Crystal Growth, vol.195, issue.1-4, pp.624-629, 1998.
DOI : 10.1016/S0022-0248(98)00671-X

K. Naniwae, K. Kirihara, K. Nishi, and S. Sugou, Alloy composition control of InGaAs/InP grown by Cl-assisted MOVPE with tertiarybutylchloride, Journal of Crystal Growth, vol.248, pp.400-404, 2003.
DOI : 10.1016/S0022-0248(02)01832-8

[. I. Kondow, S. Binqiang, and C. W. Tu, Chemical Beam Etching of GaAs Using a Novel Precursor of Tertiarybutylchloride (TBCl), Japanese Journal of Applied Physics, vol.38, issue.Part 2, No. 6A/B, pp.617-619, 1999.
DOI : 10.1143/JJAP.38.L617

[. I. Kondow, B. Shi, and C. W. Tu, In situ etching using a novel precursor of tertiarybutylchloride (TBCl), Journal of Crystal Growth, vol.209, issue.2-3, pp.263-266, 2000.
DOI : 10.1016/S0022-0248(99)00552-7

[. I. Wolfram, W. Ebert, J. Kreissl, and N. Grote, MOVPE-based in situ etching of In(GaAs)P/InP using tertiarybutylchloride, Journal of Crystal Growth, vol.221, issue.1-4, pp.177-182, 2000.
DOI : 10.1016/S0022-0248(00)00682-5

D. Franke, N. Sabelfeld, W. Ebert, P. Harde, P. Wolfram et al., Surface quality of InP etched with tertiarybutylchloride in an MOVPE reactor, Journal of Crystal Growth, vol.248, pp.421-425, 2003.
DOI : 10.1016/S0022-0248(02)02046-8

[. Gouraud, D. Franke, P. Harde, and A. , Paraskevopoulos : Iron doping behaviour in InP grown by LP-MOVPE in the presence of tertiarybutylchloride 15, th International Conference on Indium Phosphide and Related Materials (IPRM), pp.48-51, 2003.

[. Gouraud, D. Franke, P. Harde, and A. , Paraskevopoulos : Planarised selective regrowth of semi-insulating InP by LP-MOVPE using Tertiarybutylchloride 10 th European Workshop on Metalorganic Vapour Phase Epitaxy, 2003.

A. Paraskevopoulos, D. Franke, P. Harde, S. Gouraud, M. L. Pallec et al., Decobert : Planarised selective regrowth of InP:Fe by LP-MOVPE using Tertiarybutylchloride for high-speed modulator, devices 16 th International Conference on Indium Phosphide and Related Materials (IPRM), 2004.

[. L. Ii.-1-]-t, J. E. Koch, and . Bowers, Nature of wavelength chirping in directly modulated semiconductors lasers, Electron. Lett, vol.20, issue.2526, p.1038, 1984.

K. Mochizuki, M. Fujise, M. Kuwazuru, M. Nunokawa, and Y. , Iwamoto : Optical Fiber Dispersion Measurements Technique Using a, Steak Camera Journal of Lighwave Technology, vol.4, issue.1, pp.119-124, 1987.

[. T. Gallo and R. Whiteman, Optical modulators for fibre systems Gallium Arsenide Integrated Circuit, GaAs IC) Symposium, 2003, 25th Annual Technical Digest, pp.9-12

[. Forsberg, B. Hessmo, and L. , Limits to Modulation Rates of Electroabsorption Modulators, IEEE Journal of Quantum Electronics, vol.40, issue.4, pp.400-405, 2004.
DOI : 10.1109/JQE.2004.825209

[. K. Ii.-9-]-n, N. A. Dutta, and . Olson, Electro-absorption in InGaAsP-InP double heterostructures, Electronics Letters, vol.20, p.634, 1984.

[. A. Ii.-10-]-d, D. S. Miller, T. Chemla, A. C. Damen, W. Grossard et al., Electrical field dependence of optical absorption near the band gap of quantum well structures Phys, Rev. B, vol.32, issue.2, p.1043, 1985.

[. H. Ii.-11-]-t, E. C. Wood, C. A. Carr, B. I. Burrus, U. Miller et al., Large electro-absorption effect in GaInAs/InP multiple quantum well (MQW) optical modulator grown by, OMVPE Electronics Letters, vol.24, issue.14, p.840, 1988.

[. Wakita, I. Kotaka, K. Yoshino, S. Kondo, and Y. , Nogushi : Polarization-Independent Electroabsorption Modulators Using Strain- Compensated InGaAs-InAlAs MQW Structures Photonics Technology Letters, pp.1481-1420, 1995.

[. Pallec, J. Decobert, C. Kazmierski, A. Ramdane, N. Dahdah et al., Lagay : 43GHz bandwidth InGaAlAs/InP Electro Absorption Modulator with a Sub- Volt Modulation Drive Capability, 50 nm Spectral Range 16 th International Conference on Indium Phosphide and Related Materials (IPRM), 2004.

[. Tanbun-ek, R. A. Logan, and J. P. , High frequency buried heterostructure 1.5 ??m GaInAsP/InP lasers, grown entirely by metalorganic vapour phase epitaxy in two epitaxial growth steps, Electronics Letters, vol.24, issue.24, pp.1483-1484, 1988.
DOI : 10.1049/el:19881012

[. Lourdudoss, O. Kjebon, N. Nordell, and J. , Borglind : I-V behaviour of p/SI-InP, SI-InP :Fe/n configurations related to leakage current in buried heterostructure lasers with current blokcing Si-InP :Fe 7 th Conference on Semi-Insulating Materials, pp.331-334, 1992.

[. Kjebon, S. Lourdudoss, B. Hammarlund, S. Lindgren, M. Rask et al., Broberg : 1.55 µm buried heterostructure laser via regrowth of semi-insulating InP :Fe around vertical mesas fabricated by reactive ion etching using methane and hydrogen Applied Physics Letters, pp.253-255, 1991.

[. Lourdudoss, O. Kjebon, J. Wallin, and S. Lindgren, High-Frequency GaInAsP/InP laser mesas in <-100> direction with thick semi-insulating InP :Fe Photonics Technology Letters, pp.1119-1122, 1993.

[. Nordell, J. Borglind, O. Kjebon, and S. , MOVPE regrowth of semi-insulating InP around reactive ion etched laser mesas, Electronics Letters, vol.27, issue.11, p.926, 1991.
DOI : 10.1049/el:19910579

[. R. Ii.-22-]-a, C. M. Clawson, T. T. Hanson, and . Vu, MOVPE growth of SiO 2 -masked InP structures at reduced pressures, Journal of Crystal Growth, vol.77, pp.334-339, 1986.

[. J. Ii.-23-]-w and P. D. Choi, Dapkus : Selective growth and regrowth of high Al content AlGaAs for use in BH lasers, Journal of Crystal Growth, vol.195, pp.495-502, 1998.

[. Nordell and J. , MOVPE growth of InP around reactive ion etched mesas, Journal of Crystal Growth, vol.114, issue.1-2, pp.92-98, 1991.
DOI : 10.1016/0022-0248(91)90683-V

[. Nordell and J. Borglind, Improved InP regrowth properties in metalorganic vapor phase epitaxy by addition of CCl 4

[. Nordell, J. Borglind, and G. , Influence of MOVPE growth conditions and CCl4 addition on InP crystal shapes, Journal of Crystal Growth, vol.125, issue.3-4, pp.597-611, 1992.
DOI : 10.1016/0022-0248(92)90302-Y

[. Asada, S. Sugou, K. Kasahara, and S. Kumashiro, Analysis of leakage current in buried heterostructure lasers with semiinsulating blocking layers, IEEE Journal of Quantum Electronics, vol.25, issue.6, pp.1362-1368, 1989.
DOI : 10.1109/3.29269

[. Bertone, A. Bricconi, R. Y. Fang, L. Greborio, G. Magnetti et al., MOCVD regrowth of semi-insulating InP and p-n junction blocking layers around laser active stripes, Journal of Crystal Growth, vol.170, issue.1-4, pp.715-718, 1997.
DOI : 10.1016/S0022-0248(96)00537-4

H. Sik, Y. L. Bellego, P. Win, S. Bouchoule, G. Patriarche et al., Planar selective regrowth of high resistivity semi-insulating InP(Fe) by LP-MOVPE for buried lasers using TBP, Journal of Crystal Growth, vol.195, issue.1-4, pp.479-484, 1998.
DOI : 10.1016/S0022-0248(98)00706-4

[. Wakita, K. Yoshino, S. Matsumoto, I. Kotaka, N. Yoshimoto et al., Very low insertion loss (<5dB) and high-speed InGaAs/InAlAs MQW modulators buried in semi-insulating InP Technical Digest, pp.137-138, 1997.

M. Beck, J. Fais, U. Oesterle, M. Ilegems, E. Gini et al., Buried Heterostructure Quantum Cascade Lasers with a Large Optical Cavity Waveguide Photonics Technology Letters, pp.1450-1452, 2000.

D. Söderström, S. Lourdudoss, A. Dadgar, O. Stenzel, D. Bimberg et al., Dopant diffusion and current-voltage studies on epitaxial InP codoped with Ru and Fe, Journal of Electronic Materials, vol.89, issue.8, pp.972-976, 2001.
DOI : 10.1007/BF02657719

[. H. Ii.-35-]-w, S. Y. Cheng, A. Huang, J. Appelbaum, K. D. Pooladdej et al., Zehr : Wide-Band Modulation of 1.3 µm InGaAsP Buried Crescent Lasers with Iron and Cobalt-Doped Semi-Insulating Current Blocking Layers, Journal of Quantum Electronics, vol.25, issue.6, pp.1353-1361, 1989.

M. Tamura, T. Yamanaka, H. Fukano, Y. Akage, Y. Kondo et al., Saitoh : High-speed electroabsorption modulators using ruthenium doped SI-InP: impact of interdiffusion-free burying technology on E/O mmodulation characteristics 15, th International Conference on Indium Phosphide and Related Materials (IPRM), pp.12-16, 2003.

M. Tamura, T. Yamanaka, H. Fukano, Y. Akage, Y. Kondo et al., Saitoh : High-speed electroabsorption modulators buried with ruthenium doped SI- InP Photonics Technology Letters, pp.2613-2615, 2004.

M. Ogasawara, R. Iga, T. Yamanaka, S. Kondo, and Y. , Kondo : Suppression of Zn diffusion into absorption layers in electroabsorption (EA) modulators due to the use of Ru-doped semi-insulating, InP buried heterostructures 15 th International Conference on Indium Phosphide and Related Materials (IPRM), pp.12-16, 2003.

[. Blauuw, B. Emmerstorfer, L. Kreller, A. J. Hobbs, and . Springthorpe, Effects of S, Si, or Fe dopants on the diffusion of Zn in InP during MOCVD, Journal of Electronic Materials, vol.51, issue.2, pp.173-179, 1992.
DOI : 10.1007/BF02655833

[. R. Ii.-43-]-g and . Knox, Organometallic Compounds of Iron London, 1985.

[. G. Ii.-44-]-d, B. Knight, and . Emmerstorfer, Incorporation and activation of Fe in InP using low pressure MOCVD, Journal of Crystal Growth, vol.125, pp.449-456, 1992.

[. G. Ii.-45-]-d, B. Knight, G. Emmerstorfer, C. Pakulski, A. J. Larocque et al., Low Pressure MOCVD Growth of Buried Heterostructure Laser Wafers Using High Quality Semi, Insulating InP Journal of Electronic Materials, vol.21, issue.2, pp.165-171, 1992.

[. Ii, H. Yan, W. Zhu, G. Wang, F. Xu et al., Wang : Growth of Fe-doped semi-insulating InP by LP-MOCVD SPIE, pp.80-83, 1997.

[. Müller, D. Hofmann, P. Kipfer, and F. , Mosel : The preparation of Fe-Doped and Nominally Undoped Semi, -Insulating InP 2 nd International Conference on Indium Phosphide and Related Materials (IPRM), pp.23-25, 1990.

[. Söderström and S. Lourdudoss, structures exemplified with semi-insulating InP, Journal of Applied Physics, vol.89, issue.7, pp.4004-4009, 2001.
DOI : 10.1063/1.1352029

D. K. Oh, C. Park, H. R. Choo, H. M. Kim, K. E. Pyun et al., Growth and characterization of Iron-doped semi-insulating, InP Journal of the Korean Physical Society, vol.28, issue.4, pp.510-512, 1995.

[. C. Ii.-50-]-c, M. S. Wu, K. C. Feng, S. H. Lin, C. Y. Chan et al., Semi-insulating iron-doped indium phosphide grown by low-pressure metalorganic chemical vapour deposition, Journal of Materials Science: Materials in Electronics, issue.4, pp.62-66, 1993.

[. Söderström, G. Fornuto, and A. Buccieri, Studies on InP:Fe growth in a close-spaced showerhead MOPVE reactor 10 th European Workshop on MOVPE, pp.8-11, 2003.

[. G. Ii.-52-]-d, B. Knight, and . Emmerstorfer, Incorporation and activation of Fe in InP using low pressure MOCVD, Journal of Crystal Growth, vol.125, pp.449-456, 1992.

[. Ii, F. Seidl, J. Mosel, U. Friedrich, and G. Kretzer, Müller : Optical cross-sections and distribution of Fe 2+ and Fe 3+ in semi-insulating liquid encapsulated Czochralski grown InP, Fe Materials Science and Engineering, pp.21-321, 1993.

[. T. Ii.-55-]-a, J. A. Macrander, V. G. Long, A. F. Riggs, W. D. Bloemeke et al., Electrical characterization of Fe-doped semi-insulating InP grown by metalorganic vapour phase epitaxy, Applied Physics Letters, vol.45, issue.12, p.1297, 1984.

[. J. Ii.-56-]-p, J. E. Corvini, and . Bowers, Model for trap filling and avalanche breakdown in semi-insulating Fe, InP Journal of Applied Physics, vol.82, issue.1, p.259, 1997.

M. Tamura, T. Yamanaka, H. Fukano, Y. Akage, Y. Kondo et al., Saitoh : High-Speed Electroabsorption Modulators Buried With Ruthenium-Doped SI-InP Photonics Technology Letters, pp.2613-2615, 2004.

[. G. Iii.-5-]-d, G. Knight, J. Kelly, S. P. Hu, and M. L. Watkins, Thewalt : Characterization of interfacial dopant layer for high-purity, InPgrown MOCVD Journal of Crystal Growth, vol.182, pp.23-29, 1997.

H. Mawatari, M. Fukuda, S. Matsumoto, K. Kishi, and Y. Itaya, Reliability and Degradation Behaviors of Semi-Insulating Fe-Doped InP Buried Heterostructure Laser Fabricated by RIE and MOVPE Journal of Lightwave Technology : Reliability and Degradation Behaviors of Semi-Insulating Fe-Doped InP Buried Heterostructure Laser Fabricated by RIE and MOVPE Microelectron, Reliab, vol.1512, issue.36 11, pp.534-537, 1996.

A. Knauer, E. Richter, and M. , Effects of storage time of epi-ready InP:Fe substrates on the quality of metalorganic vapour phase epitaxial grown InP, Journal of Crystal Growth, vol.146, issue.1-4, pp.549-553, 1995.
DOI : 10.1016/0022-0248(94)00560-5

H. Ishikawa, S. Miwa, T. Maruyama, and M. Kamada, Origin of n-type conduction at the interface between épitaxiale-grown layer and InP substrate and its suppression by heating in phosphine atmosphere, Journal of Applied Physics, vol.78, issue.8, pp.3898-3903, 1992.

[. Iii, W. Wolfram, J. Ebert, N. Kreissl, and . Grote, MOVPE-based in situ etching of In(GaAs)P/InP using tertiarybutylchloride, Journal of Crystal Growth, vol.22, pp.177-182, 2000.

[. Franke, N. Sabelfeld, W. Ebert, P. Harde, P. Wolfram et al., Surface quality of InP etched with tertiarybutylchloride in an MOVPE reactor, Journal of Crystal Growth, vol.248, pp.421-425, 2003.
DOI : 10.1016/S0022-0248(02)02046-8

[. H. Iii.-13-]-t, W. T. Chiu, M. D. Tsang, C. A. Williams, K. Mendonça et al., Surface cleaning of GaAs by in situ chemical beam etching, Applied Physics Letters, vol.65, issue.26, pp.3368-3370, 1994.

]. S. Kollakowski, A. Strittmatter, E. Dröger, E. H. Böttcher, and D. , 65 GHz InGaAs/InAlGaAs/InP waveguide-integrated photodetectors for the 1.3???1.55 ??m wavelength regime, Applied Physics Letters, vol.74, issue.4, pp.612-614, 1999.
DOI : 10.1063/1.123181

[. Iii, H. Nakamura, T. Kurita, and . Fukui, Growth Condition Dependence of N-type Carriers at the Interface between InP Substrates and Epitaxial Layers Grown by MOCVD, th International Conference on Indium Phosphide and Related Materials (IPRM), pp.140-143, 1995.

[. S. Iii.-16-]-t, L. A. Kim, and L. K. Filese, Magel : Effect of the oxide-desorption temperature on the substrate-epilayer interface charge in organometallic vapor-phase epitaxy of, GaAs Applied Physics Letters, vol.68, issue.15, pp.2126-2128, 1996.

[. Wakita, K. Yoshino, S. Matsumoto, I. Kotaka, N. Yoshimoto et al., Very low insertion loss (<5dB) and high-speed InGaAs, InAlAs MQW modulators buried in semi-insulating InP 27 th European Conference on Optical Communication, Proceedings, pp.1-3

[. Decobert, G. Rondeau, H. Maher, C. Ladner, A. Falcou et al., Doping optimizations for InGaAs/InP composite channel HEMTs, Journal of Crystal Growth, vol.195, issue.1-4, pp.681-686, 1998.
DOI : 10.1016/S0022-0248(98)00590-9

[. Decobert, N. Lagay, C. Cuisin, B. Dagens, B. Thedrez et al., MOVPE growth of AlGaInAs???InP highly tensile-strained MQWs for 1.3??m low-threshold lasers, Journal of Crystal Growth, vol.272, issue.1-4, pp.543-548, 2004.
DOI : 10.1016/j.jcrysgro.2004.08.032

[. Iii, G. Thomas, and H. Jacob, Hardtdegen : Improvement of the surface quality of InP wafers using TOF-SIMS as characterization, th International Conference on Indium Phosphide and Related Materials (IPRM), pp.96-99, 1998.

[. P. Iii.-23-]-s, D. H. Watkins, G. Cheung, G. Knight, and . Kelly, Effect of interfacial dopant layer on transport properties of high purity, InP Applied Physics Letters, vol.68, issue.14, pp.1960-1962, 1996.

[. Iii, S. B. Chen, D. C. Visbeck, R. F. Law, and . Hicks, Structure-sensitive oxidation of the Indium Phosphide (001) surface, Journal of Applied Physics, vol.91, issue.11, pp.9366-9367, 2002.

[. Izumi, N. Yoshida, H. Takano, K. Nishitani, and M. , Study on the accumulated impurities at the epilayer/substrate interface and their influence on the leakage current of metal-semiconductor-field effect transistors, Journal of Crystal Growth, vol.133, issue.1-2, pp.123-131, 1993.
DOI : 10.1016/0022-0248(93)90112-A

[. Sato, T. Tsuchiya, T. Kitatani, A. Taike, H. Uchiyama et al., Highly reliable 1.3 µm InGaAlAs buried-heterostructure laser fabricated with in-situ cleaning, Electronics Letters, vol.40, issue.11, 2004.

[. Künzel, A. Hase, and U. Griebenow, Hydrogen radical processing in-situ semiconductor surface cleaning for épitaxiale regrowth 8, th International Conference on Indium Phosphide and Related Materials (IPRM), pp.408-411, 1996.

S. Gouraud, M. Cuisin, C. Kazmierski, J. Decobert, F. Alexandre et al., High speed AlGaInAs multiple-quantum-well electroabsorption modulator buried and planarized with semi-insulating Fe-doped InP grown by Chloride assisted LP-MOVPE, International Conference on Indium Phosphide and Related Materials, 2005., pp.8-12, 2005.
DOI : 10.1109/ICIPRM.2005.1517425

. Bibliographie, Bigan : Etudes des effets d'électro-absorption en onde guidée pour la modulation d'intensité lumineuse à 1, 1991.

M. Tamura, T. Yamanaka, H. Fukano, Y. Akage, Y. Kondo et al., Saitoh : High-speed Eiectroabsorption Modulators Using Ruthenium-Doped SI-InP: Impact of Interdiffusion-Free Burying Technology on EIO Modulation Characteristics 15, th International Conference on Indium Phosphide and Related Materials (IPRM), pp.12-16, 2003.

S. Gouraud, M. Cuisin, C. Kazmierski, J. Decobert, F. Alexandre et al., High speed AlGaInAs multiple-quantum-well electroabsorption modulator buried and planarized with semi-insulating Fe-doped InP grown by Chloride assisted LP-MOVPE, International Conference on Indium Phosphide and Related Materials, 2005., pp.8-12, 2005.
DOI : 10.1109/ICIPRM.2005.1517425

S. Gouraud, D. Franke, P. Harde, and A. , Paraskevopoulos : Iron Doping Behaviour in InP grown by LP-MOVPE in the presence of Tertiarybutylchloride 17 th, Deutsche Gesellschaft für Kristallwachstum und Kristallzüchtung, 2002.

S. Gouraud, D. Franke, P. Harde, and A. , Paraskevopoulos : Planarised selective regrowth of semi-insulating InP by LP-MOVPE using Tertiarybutylchloride 10 th European Workshop on Metalorganic Vapour Phase Epitaxy, 2003.

S. Gouraud, D. Franke, and P. , Harde : Iron Doping Behaviour in InP grown by LP, MOVPE in the Presence of TertiaryButylChloride 15 th International Conference on Indium Phosphide and Related Materials (IPRM), pp.12-16, 2003.

A. Paraskevopoulos, D. Franke, P. Harde, S. Gouraud, M. L. Pallec et al., Decobert : Planarised selective regrowth of InP:Fe by LP-MOVPE using Tertiarybutylchloride for high-speed modulator, devices 16 th International Conference on Indium Phosphide and Related Materials (IPRM), 2004.

S. Gouraud, M. Cuisin, C. Kazmierski, J. Decobert, F. Alexandre et al., High speed AlGaInAs multiple-quantum-well electroabsorption modulator buried and planarized with semi-insulating Fe-doped InP grown by Chloride assisted LP-MOVPE, International Conference on Indium Phosphide and Related Materials, 2005., pp.8-12, 2005.
DOI : 10.1109/ICIPRM.2005.1517425