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Réalisation d'interconnexions de faible résistivité à base de nanotubes de carbone biparois pour la nanoélectronique

Florent Seichepine 1
1 LAAS-NBS - Équipe NanoBioSystèmes
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : Carbon nanotubes (CNT) are known for their current carrier capability which could be used for microelectronics applications. However, the challenge is to find integration ways to use these CNT at the large scale. This PhD work focus on the development of new ways to manipulate double walled carbon nanotubes at the wafer scale. Several techniques are developed in this work. The use of spray coating with several patterning techniques allows the large scale deposition of microstructured CNT carpet. This work has been patented mainly for cellular engineering purpose. A technique has been developed to characterize the electrical properties of a large number of CNT. The random integration of CNT on an array of electrodes is used to test a low number of parallel CNT. The successive breakdown of these connected CNT is used to study their electrical properties, such as resistivity and maximum current density. Finally, we have developed a technique based on buried electrodes dielectrophoresis and capillary assembly to create large arrays of oriented carbon nanotubes carpet. This technique has been optimized to obtain high density deposition and thus reduce the resistivity. This very versatile technique has been used to create arrays of sensors and nano resonators.
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https://tel.archives-ouvertes.fr/tel-00657973
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Submitted on : Monday, January 9, 2012 - 3:52:35 PM
Last modification on : Thursday, June 10, 2021 - 3:06:20 AM
Long-term archiving on: : Tuesday, April 10, 2012 - 2:36:20 AM

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  • HAL Id : tel-00657973, version 1

Citation

Florent Seichepine. Réalisation d'interconnexions de faible résistivité à base de nanotubes de carbone biparois pour la nanoélectronique. Micro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 2011. Français. ⟨tel-00657973⟩

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