Apport de la microscopie électronique en transmission à l'étude des mémoires non volatiles de nouvelle génération

Abstract : Microelectronic recent developments impose ton increase the speed and integration density of embedded memories. However, getting reliable products first require developing production process, understanding reliability issues, and managing physical analysis of defects. Thus, the work done during this thesis concerns the failure analysis and physical characterisation of non volatile memories by transmission electron microscopy (TEM). Four research subjects have been studied. The first one applied to microstructure degradation of advanced EEPROM cell, produced at STMicroelectronics, after electrical and thermal solicitations. Then, a new charge based storage quasi non volatile architecture called SQeRAM, actually under investigation at STMicroelctronics, was characterised by TEM, in order to get the microstructure of charge storage areas and understand the physical origin of poor retention performances of these devices. Thirdly, a collaboration with the start up Crocus Technology gave us the opportunity to participate to the process development of a new generation of thermally assisted writing magnetoresistive memory (TA-MRAM). Here, different complex magnetic stacks constituting the memorisation element of these devices have been characterised. Finally, the last addressed research axe concerned a new generation of non volatile macromolecular resistance switching memory based on the organo-metallic complex CuTCNQ. In this case, CuTCNQ microstructure and growth in small via interconnections was studied, for different synthesis methods developed by IMEC and Aachen Technical University
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Micro and nanotechnologies/Microelectronics. Université du Sud Toulon Var, 2009. French


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Submitted on : Tuesday, November 29, 2011 - 3:45:03 PM
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Antoine Demolliens. Apport de la microscopie électronique en transmission à l'étude des mémoires non volatiles de nouvelle génération. Micro and nanotechnologies/Microelectronics. Université du Sud Toulon Var, 2009. French. <tel-00646295>

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