On-chip interconnect evaluation on delay time increase by crosstalk, International Electron Devices Meeting 1999. Technical Digest (Cat. No.99CH36318), pp.631-634, 1999. ,
DOI : 10.1109/IEDM.1999.824232
Metallization in VLSI Technology, 1988. ,
Electromigration reliability issues in dual-damascene Cu interconnections, IEEE Transactions on Reliability, vol.51, issue.4, p.403, 2002. ,
DOI : 10.1109/TR.2002.804737
Thèse « Elaboration et caracterisation de matériaux à très faible constant diélectrique de type a-SiOCH élaborés par PECVD, 2008. ,
Low Dielectric Constant Materials, Chemical Reviews, vol.110, issue.1, pp.56-110, 2010. ,
DOI : 10.1021/cr9002819
Spectroscopic Ellipsometry Analysis of Nanoporous Low Dielectric Constant Films Processed via Supercritical CO2 for Next-generation Microelectronic Devices, 2007. ,
Low dielectric constant polymers for microelectronics, Progress in Polymer Science, vol.26, issue.1, pp.3-65, 2001. ,
DOI : 10.1016/S0079-6700(00)00043-5
Low Dielectric Constant Materials for ULSI Interconects, Annu. Rev. Mater. Sci, pp.30-645, 2000. ,
Low-k dielectric materials, Materials Today, vol.7, issue.1, pp.34-39, 2004. ,
DOI : 10.1016/S1369-7021(04)00053-7
Film Deposition by Plasma Techniques, 1992. ,
DOI : 10.1007/978-3-642-84511-6
Formation continue INPG de Grenoble intitulée "traitements de surface par plasmas, 2009. ,
An introduction to plasma Polymerisation " , Plasma Deposition, Treatment and Etching of Polymers, édité par R. d'Agostino, 1990. ,
Etude de matériaux diélectriques à très faible permittivité déposés par voie chimique en phase vapeur développés pour l'isolation des interconnexions cuivre des circuits intégrés pour les générations technologiques 45 et 32 nm, 2006. ,
Low Dielectric Constant Materials, Chemical Reviews, vol.110, issue.1, pp.56-110, 2010. ,
DOI : 10.1021/cr9002819
High-density plasma chemical vapor deposition of amorphous carbon films, Diamond and Related Materials, vol.13, issue.2, p.311, 2004. ,
DOI : 10.1016/j.diamond.2003.10.024
Novel Low k Dielectrics Based on Diamondlike Carbon Materials, Journal of The Electrochemical Society, vol.145, issue.5, p.1649, 1998. ,
DOI : 10.1149/1.1838531
Changes in structure and nature of defects by annealing of fluorinated amorphous carbon thin films with low dielectric constant, Applied Physics Letters, vol.72, issue.21, p.2704, 1998. ,
DOI : 10.1063/1.121105
Permittivity and Conductivity of Low-Dielectric-Constant SiOC:H Films Deposited by Plasma-Enhanced Chemical Vapor Deposition, Journal of The Electrochemical Society, vol.150, issue.3, p.47, 2003. ,
DOI : 10.1149/1.1545467
interconnect materials, Journal of Applied Physics, vol.93, issue.3, p.1785, 2003. ,
DOI : 10.1063/1.1534628
Organosilicon Thin Films Deposited from Cyclic and Acyclic Precursors Using Water as an Oxidant, Journal of The Electrochemical Society, vol.151, issue.5, p.105, 2004. ,
DOI : 10.1149/1.1688801
Effects of condensation reactions on the structural, mechanical, and electrical properties of plasma-deposited organosilicon thin films from octamethylcyclotetrasiloxane, Journal of Applied Physics, vol.97, issue.11, pp.113707-113701, 2005. ,
DOI : 10.1063/1.1923163
Si???O???C???H composite films prepared by plasma-enhanced chemical vapor deposition using bis-trimethylsilylmethane precursor, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol.18, issue.4, p.1216, 2000. ,
DOI : 10.1116/1.582328
Formation Mechanism and Structural Characteristics of Low-Dielectric-Constant SiOC(-H) Films Deposited by Using Plasma-Enhanced Chemical-Vapor Deposition with DMDMS and O2 Precursors, Journal of the Korean Physical Society, vol.50, issue.4, pp.1119-1124, 2007. ,
DOI : 10.3938/jkps.50.1119
Low-Dielectric-Constant SiOC(-H) Films Prepared from DMDMS and O2 Precursors by Using Plasma Enhanced Chemical Vapor Deposition, Journal of the Korean Physical Society, vol.50, issue.6, pp.1814-1818, 2007. ,
DOI : 10.3938/jkps.50.1814
UV curing effects on mechanical and electrical performances of a PECVD non-porogen porous SiOC:H films (in k [2.2???2.4] range) for 45nm node and below, Microelectronic Engineering, vol.83, issue.11-12, p.2136, 2006. ,
DOI : 10.1016/j.mee.2006.09.022
Controllable Change of Porosity of 3-Methylsilane Low-k Dielectric Film, Electrochemical and Solid-State Letters, vol.4, issue.1, p.3, 2001. ,
DOI : 10.1149/1.1344283
Développement de matériaux diélectriques pour les interconnexions des circuits intégrés: a-SiOC:H poreux Ultra Low K et a-SiC:H Low k, 2005. ,
Plasma enhanced chemical vapor deposition of silicon oxide films with divinyldimethylsilane and tetravinylsilane, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol.24, issue.2, p.291, 2006. ,
DOI : 10.1116/1.2171706
Characterization and optimization of porogen-based PECVD deposited extreme low-k materials as a function of UV-cure time, Surface and Coatings Technology, vol.201, issue.22-23, p.9264, 2007. ,
DOI : 10.1016/j.surfcoat.2007.04.096
The role of ultraviolet radiation during ultralow k films curing: Strengthening mechanisms and sacrificial porogen removal, Journal of Applied Physics, vol.102, issue.9, p.94107, 2007. ,
DOI : 10.1063/1.2805451
URL : https://hal.archives-ouvertes.fr/hal-00463070
Integration of SiOC air gaps in copper interconnects, Microelectronic Engineering, vol.70, issue.2-4, pp.274-279, 2003. ,
DOI : 10.1016/S0167-9317(03)00438-6
Air-Gaps for High-Performance On-Chip Interconnect Part II: Modeling, Fabrication, and Characterization, Journal of Electronic Materials, vol.84, issue.10, p.1534, 2008. ,
DOI : 10.1007/s11664-008-0513-5
Thèse « Etudes électrochimiques des cinétiques de polycondensation sol-gel et de la fractalité des aérogels, 2004. ,
Polyimides, Progress in Polymer Science, vol.16, issue.4, p.561, 1991. ,
DOI : 10.1016/0079-6700(91)90010-I
Solid State Technol, 1995. ,
The structures and properties of hydrogen silsesquioxane (HSQ) films produced by thermal curing, Journal of Materials Chemistry, vol.12, issue.4, p.1138, 2002. ,
DOI : 10.1039/b107697n
Structural, Electrical, and Mechanical Properties Development during Curing of Low-k Hydrogen Silsesquioxane Films, Journal of The Electrochemical Society, vol.149, issue.3, p.9, 2002. ,
DOI : 10.1149/1.1447225
Molecular modeling of low-k films of carbon-doped silicon oxides for theoretical investigations of the mechanical and dielectric properties, Applied Physics Letters, vol.89, issue.6, p.61907, 2006. ,
DOI : 10.1063/1.2336273
High-Modulus Spin-On Organosilicate Glasses for Nanoporous Applications, Advanced Materials, vol.69, issue.5, p.705, 2007. ,
DOI : 10.1002/adma.200601528
Films Derived from Hyperbranched Polycarbosilanes (HBPCS), Advanced Functional Materials, vol.48, issue.399, p.4022, 2008. ,
DOI : 10.1002/adfm.200801197
Nanoporous SiLK?? Dielectric Films Prepared from Free-Radical Graft Polymerization and Thermolysis, Macromolecular Chemistry and Physics, vol.17, issue.24, p.2483, 2005. ,
DOI : 10.1002/macp.200500371
Low dielectric-constant insulators for electronics applications, Materials Chemistry and Physics, vol.42, issue.2, p.91, 1995. ,
DOI : 10.1016/0254-0584(95)01569-8
Synthesis of Low-Dielectric Silica Aerogel Films by Ambient Drying, Journal of the American Ceramic Society, vol.225, issue.3, p.453, 2001. ,
DOI : 10.1111/j.1151-2916.2001.tb00677.x
Low dielectric constant nanoporous poly(methyl silsesquioxane) using poly(styrene-block-2-vinylpyridine) as a template, Polymer, vol.45, issue.16, p.5691, 2004. ,
DOI : 10.1016/j.polymer.2004.05.071
Ultra low dielectric constant polysilsesquioxane films using T8(Me4NO)8 as porogen, Thin Solid Films, vol.518, issue.17, p.4768, 2010. ,
DOI : 10.1016/j.tsf.2010.01.020
Vacuum-Assisted Aerosol Deposition of a Low-Dielectric-Constant Periodic Mesoporous Organosilica Film, Advanced Materials, vol.12, issue.1, p.99, 2010. ,
DOI : 10.1002/adma.200901498
Structural characteristics of methylsilsesquioxane based porous low-k thin films fabricated with increasing cross-linked particle porogen loading, Journal of Applied Physics, vol.100, issue.6, pp.64104-064101, 2006. ,
DOI : 10.1063/1.2337772
Pure-Silica Zeolite Low-k Dielectric Thin Films, Advanced Materials, vol.13, issue.10, p.746, 2001. ,
DOI : 10.1002/1521-4095(200105)13:10<746::AID-ADMA746>3.0.CO;2-J
Characterization of spin-on zeolite films prepared from Silicalite-1 nanoparticle suspensions, Microporous and Mesoporous Materials, vol.118, issue.1-3, p.458, 2009. ,
DOI : 10.1016/j.micromeso.2008.09.027
Effects of Crystallinity in Spin-On Pure-Silica-Zeolite MFI Low-Dielectric-Constant Films, Advanced Functional Materials, vol.48, issue.10, p.1019, 2004. ,
DOI : 10.1002/adfm.200305147
Ultra-Low-k Pure-Silica Zeolite MFI Films Using Cyclodextrin as Porogen, Advanced Materials, vol.15, issue.18, p.1528, 2003. ,
DOI : 10.1002/adma.200305173
Mesostructured hybrid organic???inorganic thin films, Journal of Materials Chemistry, vol.42, issue.45, p.3598, 2005. ,
DOI : 10.1039/b506072a
URL : https://hal.archives-ouvertes.fr/hal-00022641
Incorporation of Organic Groups within the Channel Wall of Spin-On Mesostructured Silica Films by a Vapor Infiltration Technique, Langmuir, vol.20, issue.9, pp.3780-3784, 2004. ,
DOI : 10.1021/la036453+
Evaporation-Induced Self-Assembly: Nanostructures Made Easy, Advanced Materials, vol.11, issue.7, p.579, 1999. ,
DOI : 10.1002/(SICI)1521-4095(199905)11:7<579::AID-ADMA579>3.0.CO;2-R
Formation of Novel Oriented Transparent Films of Layered Silica-Surfactant Nanocomposites, Journal of the American Chemical Society, vol.116, issue.17, p.7941, 1994. ,
DOI : 10.1021/ja00096a079
Vapor-Phase Synthesis of Mesoporous Silica Thin Films, Chemistry of Materials, vol.15, issue.4, p.1006, 2003. ,
DOI : 10.1021/cm021011p
Synthesis conditions for hexagonal mesoporous silica layers, Journal of Materials Chemistry, vol.10, issue.3, pp.663-669, 2000. ,
DOI : 10.1039/a906181i
Thèse « Films organisés de silice mésoporeuse : synthèse, caractérisation structurale et utilisation pour la croissance de nanoparticules, Ecole polytechnique Palaiseau, 2002. ,
Oligomeric Alkoxysilanes with Cagelike Hybrids as Cores: Designed Precursors of Nanohybrid Materials, Chemistry - An Asian Journal, vol.15, issue.45, p.600, 2008. ,
DOI : 10.1002/asia.200700242
Self-Assembly of Designed Oligomeric Siloxanes with Alkyl Chains into Silica-Based Hybrid Mesostructures, Journal of the American Chemical Society, vol.127, issue.40, p.14108, 2005. ,
DOI : 10.1021/ja0541736
Squarely Mesoporous and Functional Nanocomposites by Self-Directed Assembly of Organosilane, Advanced Materials, vol.97, issue.4, p.797, 2008. ,
DOI : 10.1002/adma.200701927
Vacuum-Assisted Aerosol Deposition of a Low-Dielectric-Constant Periodic Mesoporous Organosilica Film, Advanced Materials, vol.12, issue.1, p.99, 2010. ,
DOI : 10.1002/adma.200901498
Symmetry, Chemistry Letters, vol.33, issue.9, p.1132, 2004. ,
DOI : 10.1246/cl.2004.1132
URL : https://hal.archives-ouvertes.fr/hal-01504485
Synthesis of Ordered Cubic Periodic Mesoporous Organosilicas with Ultra-Large Pores, Chemistry of Materials, vol.19, issue.7, p.1870, 2007. ,
DOI : 10.1021/cm062989f
Thermal-induced phase transitions in self-assembled mesostructured films studied by small-angle X-ray scattering, Journal of Synchrotron Radiation, vol.12, issue.6, p.734, 2005. ,
DOI : 10.1107/S0909049505014585
Hierarchical Porous Silica Films with Ultralow Refractive Index, Chemistry of Materials, vol.21, issue.10, pp.2055-2061, 2009. ,
DOI : 10.1021/cm802750w
Mesoporous Aminopropyl-Functionalized Hybrid Thin Films with Modulable Surface and Environment-Responsive Behavior, Chemistry of Materials, vol.20, issue.14, p.4661, 2008. ,
DOI : 10.1021/cm800597k
Robust conductive mesoporous carbon???silica composite films with highly ordered and oriented orthorhombic structures from triblock-copolymer template co-assembly, Journal of Materials Chemistry, vol.18, issue.9, p.1691, 2010. ,
DOI : 10.1039/b919400b
-poly(ethylene oxide)-Templated Silica Films with Cubic-Ordered Spherical Mesopores, Langmuir, vol.19, issue.18, pp.7295-7301, 2003. ,
DOI : 10.1021/la034798m
URL : https://hal.archives-ouvertes.fr/hal-01021197
Mesostructured MTES-Derived Silica Thin Film with Spherical Voids Investigated by TEM:?? 2. Dislocations and Strain Relaxation, Langmuir, vol.19, issue.18, p.7289, 2003. ,
DOI : 10.1021/la034309i
Self-Assembly and Characterization of Mesostructured Silica Films with a 3D Arrangement of Isolated Spherical Mesopores, Advanced Functional Materials, vol.13, issue.1, p.47, 2003. ,
DOI : 10.1002/adfm.200390005
Mesostructured MTES-Derived Silica Thin Film with Spherical Voids Investigated by TEM:?? 1. Mesostructure Determination, Langmuir, vol.19, issue.18, p.7282, 2003. ,
DOI : 10.1021/la034310h
Self-Assembly and Characterization of Mesostructured Silica Films with a 3D Arrangement of Isolated Spherical Mesopores, Advanced Functional Materials, vol.13, issue.1, p.47, 2003. ,
DOI : 10.1002/adfm.200390005
High-Modulus Spin-On Organosilicate Glasses for Nanoporous Applications, Advanced Materials, vol.69, issue.5, p.705, 2007. ,
DOI : 10.1002/adma.200601528
Characterisation of porosity and sensor response times of sol???gel-derived thin films for oxygen sensor applications, Journal of Non-Crystalline Solids, vol.306, issue.2, pp.138-148, 2002. ,
DOI : 10.1016/S0022-3093(02)01154-7
Synthesis conditions for hexagonal mesoporous silica layers, Journal of Materials Chemistry, vol.10, issue.3, pp.663-669, 2000. ,
DOI : 10.1039/a906181i
Molecular Orientation and Film Morphology of Pentacene on Native Silicon Oxide Surface, The Journal of Physical Chemistry B, vol.109, issue.20, p.9892, 2005. ,
DOI : 10.1021/jp046490p
Molecular Orientation of Evaporated Pentacene Films on Gold:?? Alignment Effect of Self-Assembled Monolayer, Langmuir, vol.21, issue.6, pp.2260-2266, 2005. ,
DOI : 10.1021/la047634u
Travaux sur le développement d'un auxiliaire chiral applicable à la phase solide et permettant de créer des centres chiraux quaternaires, Canada, 2008. ,
Hétérocycles aromatiques étendus : variations structurales pour l'autoassemblage bi-dimensionnel et la reconnaissance d'ADN G-quadruplexe, 2008. ,
Self-Assembly from the Gas-Phase: Design and Implementation of Small-Molecule Chromophore Precursors with Large Nonlinear Optical Responses, Journal of the American Chemical Society, vol.131, issue.35, pp.12595-12612, 2009. ,
DOI : 10.1021/ja900131y
Thèse « Dépôt de Carbone amorphe hydrogéné par PECVD pour l'élaboration de microcibles. Dopage et caractérisation », 2000. ,
Thèse "optimisation des conditions de synthèse par CVD plasma de membranes conductrices de protons pour piles à combustible, 2009. ,
Etude de la polymérisation plasma, en mode continu ou pulsé, de l'aniline et de la, p.3 ,
Crosslinking impact of mesoporous MSQ films used in microelectronic interconnections on mechanical properties, Thin Solid Films, vol.495, issue.1-2, pp.124-129, 2006. ,
DOI : 10.1016/j.tsf.2005.08.291
URL : https://hal.archives-ouvertes.fr/hal-00140224
Synthèses et techniques de caractérisation des films minces mésostructurés organosiliciés déposés par spin on et des films de styrène déposés par PECVD ,
Thèse« Films organisés de silice mésoporeuse : synthèse, caractérisation structurale et utilisation pour la croissance de nanoparticules, Ecole polytechnique Palaiseau, 2002. ,
Self-Assembly and Characterization of Mesostructured Silica Films with a 3D Arrangement of Isolated Spherical Mesopores, Advanced Functional Materials, vol.13, issue.1, p.47, 2003. ,
DOI : 10.1002/adfm.200390005
Polymerization reactions in methyltriethoxysilane studied through 29Si NMR with polarization transfer, Journal of Non-Crystalline Solids, vol.231, issue.1-2, pp.58-77, 1998. ,
DOI : 10.1016/S0022-3093(98)00403-7
A comparative study between inductively and capacitively coupled plasma deposited polystyrene films: chemical and morphological characterizations, Surface and Interface Analysis, vol.227, issue.9, p.1266, 2006. ,
DOI : 10.1002/sia.2388
Characteristics of low-k SiOC(???H) films deposited at various substrate temperature by PECVD using DMDMS/O2 precursor, Thin Solid Films, vol.516, issue.2-4, pp.340-344, 2007. ,
DOI : 10.1016/j.tsf.2007.06.097
Thèse « Etude d'un matériau diélectrique poreux de type SiOCH. Effets des post traitements plasma et de nettoyage et intégration », 2007. ,
Thèse « Elaboration et caracterisation de matériaux à très faible constant diélectrique de type a-SiOCH élaborés par PECVD, 2008. ,
Principe de base de Réflectométrie X et Application à l'Analyse de Porosité, Colloque formation « TIMCOMCOM2 », 2008. ,
Adsorption et condensation de gaz dans des couches minces diélectriques mésoporeuses suivies par ellipsométrie spectroscopique, 2005. ,
Three characterization techniques coupled with adsorption for studying the nanoporosity of supported films and membranes, Microporous and Mesoporous Materials, vol.111, issue.1-3, pp.417-428, 2008. ,
DOI : 10.1016/j.micromeso.2007.08.033
URL : https://hal.archives-ouvertes.fr/hal-00273915
Développement de membranes céramiques multifonctionnelles à porosité hiérarchique pour le traitement et la séparation de gaz, 2009. ,
Coupling X-ray Scattering and Nitrogen Adsorption:?? An Interesting Approach for the Characterization of Ordered Mesoporous Materials. Application to Hexagonal Silica, Chemistry of Materials, vol.14, issue.8, pp.3391-3397, 2002. ,
DOI : 10.1021/cm0211453
Mechanical properties of hierarchical porous silica thin films: Experimental characterization by nanoindentation and Finite Element modeling, Microporous and Mesoporous Materials, vol.140, issue.1-3, pp.120-129, 2011. ,
DOI : 10.1016/j.micromeso.2010.09.004
Self-Assembly and Characterization of Mesostructured Silica Films with a 3D Arrangement of Isolated Spherical Mesopores, Advanced Functional Materials, vol.13, issue.1, p.47, 2003. ,
DOI : 10.1002/adfm.200390005
Thèse « Films organisés de silice mésoporeuse : synthèse, caractérisation structurale et utilisation pour la croissance de nanoparticules, Ecole polytechnique Palaiseau, 2002. ,
Développement de membranes céramiques multifonctionnelles à porosité hiérarchique pour le traitement et la séparation de gaz, 2009. ,
Thermal-induced phase transitions in self-assembled mesostructured films studied by small-angle X-ray scattering, Journal of Synchrotron Radiation, vol.12, issue.6, p.734, 2005. ,
DOI : 10.1107/S0909049505014585
Mesostructured MTES-Derived Silica Thin Film with Spherical Voids Investigated by TEM:?? 1. Mesostructure Determination, Langmuir, vol.19, issue.18, p.7282, 2003. ,
DOI : 10.1021/la034310h
Synthesis of Ordered Cubic Periodic Mesoporous Organosilicas with Ultra-Large Pores, Chemistry of Materials, vol.19, issue.7, p.1870, 2007. ,
DOI : 10.1021/cm062989f
Poly(borosiloxanes) as precursors for carbon fiber ceramic matrix composites, Materials Research, vol.10, issue.2, pp.147-151, 2007. ,
DOI : 10.1590/S1516-14392007000200009
URL : http://doi.org/10.1590/s1516-14392007000200009
Printing Studies with Conductive Inks and Exploration of New Conducting Polymer Compositions, 2006. ,
Kinetic study of methyltriethoxysilane (MTES) hydrolysis by FTIR spectroscopy under different temperatures and solvents, Vibrational Spectroscopy, vol.46, issue.1, pp.1-7, 2008. ,
DOI : 10.1016/j.vibspec.2007.07.002
Gel to Glass Transformation of Methyltriethoxysilane:?? A Silicon Oxycarbide Glass Precursor Investigated Using Vibrational Spectroscopy, Chemistry of Materials, vol.17, issue.17, pp.4468-4473, 2005. ,
DOI : 10.1021/cm050501p
URL : https://hal.archives-ouvertes.fr/hal-00247491
Preparation of organic/inorganic hybrid silica using methyltriethoxysilane and tetraethoxysilane as co-precursors, Journal of Sol-Gel Science and Technology, vol.8, issue.5, pp.93-99, 2010. ,
DOI : 10.1007/s10971-009-2061-8
Low Dielectric Constant Materials, Chemical Reviews, vol.110, issue.1, pp.56-110, 2010. ,
DOI : 10.1021/cr9002819
Introduction to Infrared and Raman spectroscopy, 1990. ,
A New Application of UV???Ozone Treatment in the Preparation of Substrate-Supported, Mesoporous Thin Films, Chemistry of Materials, vol.12, issue.12, pp.3879-3884, 2000. ,
DOI : 10.1021/cm000456f
Powder Surface Area and Porosity, 1984. ,
Adsorption by Powders & Porous Solids, 1999. ,
Three characterization techniques coupled with adsorption for studying the nanoporosity of supported films and membranes, Microporous and Mesoporous Materials, vol.111, issue.1-3, pp.417-428, 2008. ,
DOI : 10.1016/j.micromeso.2007.08.033
URL : https://hal.archives-ouvertes.fr/hal-00273915
Evaluating Pore Sizes in Mesoporous Materials:?? A Simplified Standard Adsorption Method and a Simplified Broekhoff???de Boer Method, Langmuir, vol.15, issue.16, pp.5403-5409, 1999. ,
DOI : 10.1021/la990209u
Improvement of the Derjaguin-Broekhoff-de Boer Theory for the Capillary Condensation/Evaporation of Nitrogen in Spherical Cavities and Its Application for the Pore Size Analysis of Silicas with Ordered Cagelike Mesopores, Langmuir, vol.21, issue.23, pp.10530-10536, 2005. ,
DOI : 10.1021/la0513609
Expansion of the F127-templated mesostructure in aerosol-generated particles by using polypropylene glycol as a swelling agent, Microporous and Mesoporous Materials, vol.113, issue.1-3, pp.1-13, 2008. ,
DOI : 10.1016/j.micromeso.2007.10.045
Density Functional Theory of Adsorption in Spherical Cavities and Pore Size Characterization of Templated Nanoporous Silicas with Cubic and Three-Dimensional Hexagonal Structures, Langmuir, vol.18, issue.5, pp.1550-1560, 2002. ,
DOI : 10.1021/la0107594
Self-Assembly and Characterization of Mesostructured Silica Films with a 3D Arrangement of Isolated Spherical Mesopores, Advanced Functional Materials, vol.13, issue.1, p.47, 2003. ,
DOI : 10.1002/adfm.200390005
Utilisation des Fibres de Carbone Activé comme catalyseurs de O-et Nglycosylation Application à la synthèse d'analogues de saponines et de nucléosides, 2004. ,
Texture des matériaux pulvérulents ou poreux, p.1050, 2003. ,
Low Dielectric Constant Materials, Chemical Reviews, vol.110, issue.1, pp.56-110, 2010. ,
DOI : 10.1021/cr9002819
Fundamentals of inorganic membrane science and technology, p.331, 1996. ,
DOI : 10.1016/S0927-5193(96)80001-5
Développement de membranes céramiques multifonctionnelles à porosité hiérarchique pour le traitement et la séparation de gaz, 2009. ,
A mesoporous silica (MCM-48) membrane: preparation and characterization, Journal of Membrane Science, vol.182, issue.1-2, pp.235-244, 2001. ,
DOI : 10.1016/S0376-7388(00)00570-6
-poly(ethylene oxide)-Templated Silica Films with Cubic-Ordered Spherical Mesopores, Langmuir, vol.19, issue.18, pp.7295-7301, 2003. ,
DOI : 10.1021/la034798m
URL : https://hal.archives-ouvertes.fr/hal-01021197
Modulus???density scaling behaviour and framework architecture of nanoporous self-assembled silicas, Nature Materials, vol.64, issue.6, p.418, 2007. ,
DOI : 10.1038/nmat1913
Young's modulus surface and Poisson's ratio curve for cubic metals, Journal of Physics and Chemistry of Solids, vol.68, issue.4, pp.503-510, 2007. ,
DOI : 10.1016/j.jpcs.2007.01.025
Effective stiffness tensor of composite media : II. Applications to isotropic dispersions, Journal of the Mechanics and Physics of Solids, vol.46, issue.8, p.1411, 1998. ,
DOI : 10.1016/S0022-5096(97)00083-5
Elasticity of porous ceramics???A critical study of modulus???porosity relations, Journal of the European Ceramic Society, vol.26, issue.7, p.1085, 2006. ,
DOI : 10.1016/j.jeurceramsoc.2005.01.041
Mechanical behavior of ultralow-dielectric-constant mesoporous amorphous silica, Applied Physics Letters, vol.92, issue.25, p.251903, 2008. ,
DOI : 10.1063/1.2949556
Improving mechanical robustness of ultralow-k SiOCH plasma enhanced chemical vapor deposition glasses by controlled porogen decomposition prior to UV-hardening, Journal of Applied Physics, vol.107, issue.10, p.104122, 2010. ,
DOI : 10.1063/1.3428958
Vacuum-Assisted Aerosol Deposition of a Low-Dielectric-Constant Periodic Mesoporous Organosilica Film, Advanced Materials, vol.12, issue.1, p.99, 2010. ,
DOI : 10.1002/adma.200901498
Films Derived from Hyperbranched Polycarbosilanes (HBPCS), Advanced Functional Materials, vol.48, issue.399, p.4022, 2008. ,
DOI : 10.1002/adfm.200801197
Plasma-Polymerized Organosilicones and Organometallics, 1990. ,
DOI : 10.1016/B978-0-12-200430-8.50009-9
Investigations of the hydrophobic and scratch resistance behavior of polystyrene films deposited on bell metal using RF-PACVD process, Applied Surface Science, vol.257, issue.9, pp.4211-4218, 2011. ,
DOI : 10.1016/j.apsusc.2010.12.022
Plasma Polymerization, p.432, 1985. ,
DOI : 10.1016/B978-0-08-096701-1.00136-1
Plasma polymerization of styrene with controlled particle energy, Journal of Polymer Science Part A: Polymer Chemistry, vol.36, issue.8, p.1265, 1997. ,
DOI : 10.1002/(SICI)1099-0518(199806)36:8<1265::AID-POLA9>3.0.CO;2-Z
-Stilbene, The Journal of Physical Chemistry A, vol.101, issue.20, pp.3823-3831, 1997. ,
DOI : 10.1021/jp970620v
URL : https://hal.archives-ouvertes.fr/hal-00857436
A comparative study between inductively and capacitively coupled plasma deposited polystyrene films: chemical and morphological characterizations, Surface and Interface Analysis, vol.227, issue.9, p.1266, 2006. ,
DOI : 10.1002/sia.2388
Water Wettability and Zeta-Potential of Polystyrene Surface Modified by Ne or Na Implantation, Journal of Colloid and Interface Science, vol.197, issue.2, pp.257-262, 1998. ,
DOI : 10.1006/jcis.1997.5289
Low Dielectric Constant Materials, Chemical Reviews, vol.110, issue.1, pp.56-110, 2010. ,
DOI : 10.1021/cr9002819
Développement de matériaux déposés par PECVD pour les interconnexions optiques dans les circuits intégrés par une apporche back end, 2006. ,
Perylene derivative sensitized multi-walled carbon nanotube thin film, Carbon, vol.43, issue.12, pp.2501-2507, 2005. ,
DOI : 10.1016/j.carbon.2005.05.014
Structural and orientational studies of chiral N-[4(1-pyrene)butyroyl]-phenylalanine in cast film, Spectrochimica Acta Part A: Molecular and Biomolecular Spectroscopy, vol.61, issue.11-12, pp.2713-2719, 2005. ,
DOI : 10.1016/j.saa.2004.10.029
High-Mobility Organic Transistors Based on Single-Crystalline Microribbons of Triisopropylsilylethynyl Pentacene via Solution-Phase Self-Assembly, Advanced Materials, vol.127, issue.5, pp.678-682, 2007. ,
DOI : 10.1002/adma.200601259
Molecular Orientation and Film Morphology of Pentacene on Native Silicon Oxide Surface, The Journal of Physical Chemistry B, vol.109, issue.20, pp.9892-9896, 2005. ,
DOI : 10.1021/jp046490p
Structure and morphology of phenylsilanes polymer films synthesized by the plasma polymerization method, Journal of Materials Science, vol.33, issue.7, pp.1897-1905, 1998. ,
DOI : 10.1023/A:1004365607632
Investigation of plasma polymerized benzene and furan thin films for application in opto-electronic devices, Journal of Applied Polymer Science, vol.73, issue.3, pp.523-528, 2003. ,
DOI : 10.1002/app.11450
Transport Properties", Encyclopedia of polymer science, 2 nd Ed, p.724, 1989. ,
CRC Handbook of Solubility Parameters and other Cohesion Parameters, 1983. ,
Elaboration par PECVD et caractérisation de membranes polysiloxanes plasma pour la perméation gazeuse, 2000. ,
Elaboration et caractérisation de matériaux mixtes polyimide-silice: application à la séparation de gaze et corrélation propriétés-structure, 1996. ,
Effects of CO2 exposure and physical aging on the gas permeability of thin 6FDA-based polyimide membranesPart 1. Without crosslinking, Journal of Membrane Science, vol.282, issue.1-2, pp.21-31, 2006. ,
DOI : 10.1016/j.memsci.2006.05.004
Gas permeation parameters and other physicochemical properties of a polymer of intrinsic microporosity: Polybenzodioxane PIM-1, Journal of Membrane Science, vol.325, issue.2, pp.851-860, 2008. ,
DOI : 10.1016/j.memsci.2008.09.010
Thèse « Films organisés de silice mésoporeuse : synthèse, caractérisation structurale et utilisation pour la croissance de nanoparticules, Ecole polytechnique Palaiseau, 2002. ,
Développement de membranes céramiques multifonctionnelles à porosité hiérarchique pour le traitement et la séparation de gaz, 2009. ,
Three characterization techniques coupled with adsorption for studying the nanoporosity of supported films and membranes, Microporous and Mesoporous Materials, vol.111, issue.1-3, pp.417-428, 2008. ,
DOI : 10.1016/j.micromeso.2007.08.033
URL : https://hal.archives-ouvertes.fr/hal-00273915
Adsorption et condensation de gaz dans des couches minces diélectriques mésoporeuses suivies par ellipsométrie spectroscopique, 2005. ,
Mechanical properties of hierarchical porous silica thin films: Experimental characterization by nanoindentation and Finite Element modeling, Microporous and Mesoporous Materials, vol.140, issue.1-3, pp.120-129, 2011. ,
DOI : 10.1016/j.micromeso.2010.09.004
Elastic Properties of Model Porous Ceramics, Journal of the American Ceramic Society, vol.60, issue.7-8, pp.3041-3048, 2000. ,
DOI : 10.1111/j.1151-2916.2000.tb01680.x
Combined empirical???analytical method for determining contact radius and indenter displacement during Hertzian indentation on coating/substrate systems, Journal of Materials Research, vol.19, issue.09, pp.2774-2781, 2004. ,
DOI : 10.1016/S1359-6454(03)00290-8
Determining the elastic modulus and hardness of an ultra-thin film on a substrate using nanoindentation, Journal of Materials Research, vol.12, issue.03, pp.1114-1126, 2009. ,
DOI : 10.1557/jmr.2004.19.1.3
Nano-indentation of hybrid silica coatings on surgical grade stainless steel, Thin Solid Films, vol.516, issue.6, p.1082, 2008. ,
DOI : 10.1016/j.tsf.2007.07.186
Thèse « Elaboration et caracterisation de matériaux à très faible constant diélectrique de type a-SiOCH élaborés par PECVD, 2008. ,