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Etude des Inhomogénéités de Déformation dans les Films Minces Polycristallins par Diffraction X Cohérente

Abstract : Strain heterogeneities in polycrystalline thin films are of great interest in technology because many fabrication and reliability problems are stress related. Nevertheless measuring local strains in sub-micron grains remains a real experimental challenge. This thesis is focused on recent and promising results in the field of strain measurements in small dimensions via X-ray micro-diffraction. A 3D mapping of 111 Bragg reflection from a Au sub-micron single grain was measured during a thermal cycle. Coherent properties of the beam has been used to retrieve a component of the displacement field in 3D from this single grain with a resolution around 17 × 17 × 22 nm via phase retrieval procedures. However algorithms do not always converge when the grain is highly strained. Thus alternative techniques are proposed and tested to overcome this stagnation. Complementary results from laboratory diffraction and micro 3D X-Ray Diffraction have also been analysed to compare strain at different scales. Strong strain heterogeneities has been evidenced between grains.
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https://tel.archives-ouvertes.fr/tel-00622848
Contributor : Nicolas Vaxelaire <>
Submitted on : Monday, September 12, 2011 - 6:15:08 PM
Last modification on : Thursday, March 15, 2018 - 4:56:06 PM
Long-term archiving on: : Tuesday, November 13, 2012 - 10:35:10 AM

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  • HAL Id : tel-00622848, version 1

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Nicolas Vaxelaire. Etude des Inhomogénéités de Déformation dans les Films Minces Polycristallins par Diffraction X Cohérente. Matière Condensée [cond-mat]. Université Paul Cézanne - Aix-Marseille III, 2011. Français. ⟨tel-00622848⟩

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