Simulation et optimisation du transport automatise dans la fabrication de semi-conducteurs.

Abstract : Essential components of all computers, semiconductors are widely used in many sectors. Quick advances in these technologies force a challenging rhythm to manufacturers. Following the Moore’s Law, chip capacity doubles approximately every two years and prices are divided by two. Thus, the increase of the diameter of wafers to 300 mm makes them heavier to transport in lots. Automated Material Handling Systems (AMHS) are an excellent alternative to tackle this problem. Because of the high price of production equipment, the goal is to use production capacity as much as possible while avoiding to keep too much inventory. To reach this goal, it is important that the transportation and storage system ensures that machines do not wait for available lots, and also that lots do not wait for available machines. In the literature, due to the problem complexity (up to 700 steps, re-entrant flows, etc.), the modeling of transportation is made with strong assumptions on the production or vice-versa. However, transport is a service for production. This thesis aims at providing a modeling approach that allows the integration in details transport, production and storage constraints, in order to improve production key indicators. A detailed understanding of the system allows us to build of a discrete event simulation model which is, in our point of view, the best compromise between the necessary level of details and computational times. Finally, through industrial validations, the complete study of the model allows critical parameters of transport management to be analyzed. The results help to get a better understanding of the system and open interesting research perspectives.
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Téwendé Jean-Etienne Arthur Kiba. Simulation et optimisation du transport automatise dans la fabrication de semi-conducteurs.. Autre. Ecole Nationale Supérieure des Mines de Saint-Etienne, 2010. Français. ⟨NNT : 2010EMSE0582⟩. ⟨tel-00611812⟩

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