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Photonic micromachined devices : design, fabrication and experiment

Abstract : In this PhD project, three different approaches have been studied for tunable photonic devices based on MEMS technology. First, the optical double barrier structure has been numerically studied and experimentally demonstrated as the thermo-optical switch, switchable polarizer and optical tunneling junctions integrated as reconfigurable WDM system. Second, the slow light structure using metamaterial with coupled split ring unit cells is numerically analyzed. Finally, a tunable magnetic metamaterial is demonstrated using MEMS technology. The first major work is to use the optical tunneling effects to design MEMS based photonic devices. Three different tunable photonic devices has been demonstrated using thermo-optical tuning. a thermo-optic switch is realized using MEMS technology. The device is fabricated on silicon-on-isolator wafer using deep etching process. The transmission of the optical switch is controlled by the optical length of the central rib which is thermally controlled by the external pumping current. In experiment, it measures a switching speed of 1 us and an extinction ratio of 30 dB. A switchable polarizer is demonstrated using the double optical barrier structure which transmit the light with one polarization state and filter out the others. In experiment it measures a PER of lager than 23 dB when the pumping current is above 60mA. The switching time is shorter than 125 us which is limited by the polarization analyzer used in the experiment. A MEMS reconfigurable add-drop multiplexer is realized by applied the optical tunneling structure to the ribbed waveguide. The tunable add-drop multiplexer is based on Y-shape optical double barriers tunneling junction which are realized by MEMS technology
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Submitted on : Monday, July 7, 2014 - 12:30:20 PM
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  • HAL Id : tel-00596905, version 1


Weiming Zhu. Photonic micromachined devices : design, fabrication and experiment. Other. Université Paris-Est, 2010. English. ⟨NNT : 2010PEST1045⟩. ⟨tel-00596905⟩



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