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Développement des micro-capteurs chimiques CHEMFETs pour des applications à l'hémodialyse

William Sant 1
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : This work lies within the scope of the microtechnological development for the medical analysis improvement. It proposes to improve the comfort of the haemodialysed patient by monitoring the dialysis effectiveness. It aims at the development of disposable ChemFETs chemical microsensors for the detection of the H+ ions, urea and creatinin. The principle of detection is based on the realisation of an enzymatic layer on top of the ChemFET pH-sensitive gate. Thus, The enzymatic reaction is responsible for a pH variation that is detected by the ChemFET. The first part of the research tasks consisted in developing a standard, simple and reliable technological process for the fabrication of SiO2/Si3N4 pH-sensitive ChemFETs microsensors. These R&D works were validated using the technological simulation software ATHENA" and the electric simulation software ATLAS". The components were then fabricated using the LAAS-CNRS cleanroom facilities, were then reported and connected on a printed circuit, and encapsulated by a biocompatible silicone ensuring the sealing of the system. These microsensors were characterised electrically for the pH detection. Good measurement reproducibility and quasi-nernstian responses (55 mV/pH) were evidenced, validating the technological process. Thus, they were adapted to enzymatic detection and more precisely for urea and creatinine detection. The enzymatic membranes were deposited, first, by dip coating, second, in order to take into account the microsensors industrial development, by spin coating and photolithography techniques. The feasibility of the urea and creatinine detection has finally been demonstrated thanks to pH-ChemFETs, and their detection properties have been optimised in dialysate solutions.
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Submitted on : Friday, April 8, 2011 - 8:34:35 AM
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  • HAL Id : tel-00584297, version 1


William Sant. Développement des micro-capteurs chimiques CHEMFETs pour des applications à l'hémodialyse. Micro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 2004. Français. ⟨tel-00584297⟩



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