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Elaboration de super-réseaux de boîtes quantiques à base de SiGe et développement de dispositifs pour l'étude de leurs propriétés thermoélectriques

Abstract : Use of SiGe thin film thermoelectric devices is planed in many applications such as power microgeneration or local cooling of microelectronic components. One main advantage of SiGe relies on its ability to be monolithically integrated in ICs. However, SiGe is affected by a low coefficient of performance. Within the framework of this thesis, we focused on the nanostructuration of this material in the form of quantum dot superlattices (QDSL), which is expected to allow a strong increase of its figure-of-merit, by altering thermal transport at the nanometer scale. The growth of heavily doped monocrystalline QDSL in an industrial CVD tool at 750°C is presented from morphological (AFM), structural (SEM, TEM) and chemical (SIMS) analysis. Strong Si-Ge intermixing phenomenons are notably brought out and correlated with thermal conductivity measurements that do not demonstrate a significant effect of dots on thermal transport. The growth of original polycrystalline structures is also presented. Eventually, the crucial question of the figure-of-merit determination is addressed in particular with regard to the measurement uncertainty problem. One solution consisting in measuring simultaneously several electrical, thermal and thermoelectric parameters on a same sample is put forward and concretely implemented by the simultaneous fabrication of adapted test devices.
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Submitted on : Thursday, March 24, 2011 - 10:44:08 AM
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David Hauser. Elaboration de super-réseaux de boîtes quantiques à base de SiGe et développement de dispositifs pour l'étude de leurs propriétés thermoélectriques. Autre. Université de Grenoble, 2011. Français. ⟨NNT : 2011GRENT004⟩. ⟨tel-00579524⟩

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