. Hubert, Méthode des blocs sensitifs pour la synthèse optimale de mécanismes flexibles monolithiquesàmonolithiquesà actionnement et mesure piézoélectriques intégrés, Congrès français de mécanique (CFM'09), 2009.

]. J. Bibliographie-[-acu-+-04, C. Agnus, Y. Clévy, R. Urushima, A. Perez et al., A micromanipulation station based on a new integrated microprehensile microrobot on chip (mmoc), 35 th International Symposium on Robotics (ISR'2004), 2004.

A. [. Aphale, S. O. Fleming, and . Moheimani, Integral resonant control of collocated smart structures, Smart Materials and Structures, vol.16, issue.2, pp.439-446, 2007.
DOI : 10.1088/0964-1726/16/2/023

F. [. Allaire, A. Jouve, and . Toader, Structural optimization using sensitivity analysis and a level-set method, Journal of Computational Physics, vol.194, issue.1, pp.363-393, 2004.
DOI : 10.1016/j.jcp.2003.09.032

T. [. Ahluwalia, A. Lookman, and . Saxena, Dynamic strain loading of cubic to tetragonal martensites, Acta Materialia, vol.54, issue.8, pp.2109-2120, 2006.
DOI : 10.1016/j.actamat.2005.12.040

[. Ieee, IEEE Standard on Piezoelectricity -Standard 176- 1987, 1987.

]. K. Aströmf00, K. Aström, and . Furuta, Swinging up a pendulum by energy control, Automatica, vol.36, issue.2, pp.287-295, 2000.

]. K. Aströmm08, R. M. Aström, and . Murray, Feedback Systems : An Introduction for Scientists and Engineers, 2008.

]. J. Bb01a, A. Breguet, and . Bergander, Toward the personal factory ? SPIE, pp.293-303, 2001.

]. S. Bb01b, S. Bütefisch, and . Büttgenbach, A new pneumatically actuated miniature gripper for micro assembly, SPIE conf. on microrobotics and microassembly III, pp.32-39

]. P. Ber04 and . Bernardoni, Outils et méthodes de conception de structures mécaniquesmécaniquesà déformations réparties et actionnement discret applications en microrobotique, thèse de l'université de paris vi, 2004.

O. [. Bendsoe and . Sigmund, Topology optimization : theory, methods and applications, 2003.

R. [. Bütefisch, S. Wilke, and . Büttgenbach, Silicon three-axial tactile probe for mechanical characterization of micro grippers, SPIE conf. on microrobotics and microassembly III, pp.61-67, 2001.

]. H. Cal85 and . Callen, Thermodynamics and an introduction to thermostatistics , 2 nde edition, 1985.

]. R. Can67 and . Cannon, Dynamics of Physical Systems, 1967.

I. [. Couch and . Chopra, A quasi-static model for NiMnGa magnetic shape memory alloy, Smart Materials and Structures, vol.16, issue.1, pp.11-21, 2007.
DOI : 10.1088/0964-1726/16/1/S02

]. F. Cel91 and . Cellier, Continuous System Modeling, 1991.

]. F. Cel06 and . Cellier, Continuous System Simulation, 2006.

M. [. Canfield and . Frecker, Topology optimization of compliant mechanical amplifiers for piezoelectric actuators. Structural and Multidisciplinary Optimization, pp.269-278, 2000.

E. [. Cox, M. Garcia, and . Goldfarb, Actuator development for a flapping microrobotic microaerial vehicle, SPIE conf. on microrobotics and micromanipulation, pp.102-108, 1998.

A. [. Clévy, J. Hubert, N. Agnus, and . Chaillet, A micromanipulation cell including a tool changer, Journal of Micromechanics and Microengineering, vol.15, issue.10, pp.292-301, 2005.
DOI : 10.1088/0960-1317/15/10/S07

A. [. Clévy, N. Hubert, and . Chaillet, A new micro-tools exchange principle for micromanipulation, 2004 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS) (IEEE Cat. No.04CH37566), 2004.
DOI : 10.1109/IROS.2004.1389357

A. [. Clévy, N. Hubert, and . Chaillet, Modeling, identification and control of a thermal glue-based temporary fixing system: application to the micro-robotic field, Proceedings 2006 IEEE International Conference on Robotics and Automation, 2006. ICRA 2006., 2006.
DOI : 10.1109/ROBOT.2006.1641847

A. [. Clévy, N. Hubert, and . Chaillet, Flexible micro-assembly system equipped with an automated tool changer, Journal of Micro-Nano Mechatronics, vol.11, issue.1, pp.59-72, 2008.
DOI : 10.1007/s12213-008-0012-z

C. Clévy, A. Hubert, S. Fahlbusch, N. Chaillet, and J. Michler, Design, Fabrication and Characterization of a Flexible System Based on Thermal Glue for in Air and in SEM Microassembly, EFAC Third International Precision Assembly Seminar (IPAS'2006), 2006.
DOI : 10.1007/0-387-31277-3_3

]. C. Chi06 and . Chicone, Ordinary Differential Equations with Applications, 2006.

]. C. Cle02 and . Clevy, ´ etude et réalisation d'un micromanipulateur piézoélectrique monolithique permettant les changements d'outils. Master's thesis

]. C. Cle05 and . Clevy, ContributionàContribution`Contributionà la micro-manipulation robotisée : un système de changement d'outils automatique pour le microassemblage, 2005.

A. Cox, D. Monopoli, M. Goldfarb, and E. Garcia, The development of piezoelectrically actuated micro-aerial vehicles, SPIE conf. on microrobotics and microassembly, pp.101-108, 1999.

R. [. Desimone and . James, A constrained theory of magnetoelasticity, Journal of the Mechanics and Physics of Solids, vol.50, issue.2, pp.283-320, 2002.
DOI : 10.1016/S0022-5096(01)00050-3

E. [. Desoer and . Kuh, Basic Circuit Theory, 1969.

]. D. Ewi00 and . Ewins, Modal testing 2, 2000.

]. B. Eyg97 and . Eyglument, Manuel de thermique : théorie et pratique. Hermès, 2ì eme edition, Fat00] S. Fatikow. Mikroroboter und mikromontage. B.G. Teubner, 1997.

U. [. Fatikow and . Rembold, Microsystem technology and microrobotics, 1997.
DOI : 10.1007/978-3-662-03450-7

]. B. Fri86 and . Friedland, Control System Design, an introduction to statespace methods, 1986.

]. K. Fur99 and . Furuta, Experimental processing and assembling system (microfactory ), The fifth International Micromachine Symposium, pp.173-177, 1999.

]. Gau04 and . Gauhier, Conception d'actionneursàactionneursà base d'alliagè a mémoire de forme magnétique, 2004.

]. Gau07 and . Gauhier, Modélisation des alliagesàalliages`alliagesà mémoire de forme magnétique pour la conversion d'´ energie dans les actionneurs et leur commande, 2007.

]. W. Gaw04 and . Gawronski, Advanced Structural Dynamics and Active Control of structures Miniaturized reconfigurable micro-assembly system, International Precision Assembly Seminar, 2004.

. Gcb-+-10a-]-m, N. Grossard, M. Chaillet, A. Boukallel, C. Hubert et al., Towards the mechanical and control-oriented optimization of micromechatronic systems for robust control, Workshop Control issues in the micro/nano-world, 2010.

. Gcb-+-10b-]-m, N. Grossard, M. Chaillet, C. Boukallel, A. Rotinat-libersa et al., Synthèse et commande robuste d'une micropince piézoélectrique intégrée numéro spécial " commande dans le micromonde The development of two piezoelectrically actuated mesoscale robot quadrupeds Multistable actuator based on magnetic shape memory alloys Multistable actuator based on magnetic shape memory alloys, SPIE conf. on microrobotics and microassembly Workshop on Magnetic Shape Memory Alloys, pp.661-691, 2005.

. Y. Gha-+-07a-]-j, A. Gauthier, J. Hubert, N. Abadie, C. Chaillet et al., Conversion d'´ energie magnéto-thermo-mécanique dans les alliagesàalliagesà mémoire de forme magnétiques, Conférence sur les Sciences et Applications des Matériaux Electroactifs (CSAME'07), pp.6-7, 2007.

. Y. Gha-+-07b-]-j, A. Gauthier, J. Hubert, C. Abadie, N. Lexcellent et al., Original hybrid control for robotic structures using magnetic shape memory alloys actuators, IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS'2007), pp.29-31, 2007.

. Y. Gha-+-08a-]-j, A. Gauthier, J. Hubert, N. Abadie, C. Chaillet et al., Conversion d'´ energie magnéto-thermo-mécanique dans les alliagesàalliagesà mémoire de forme magnétiques, 2008.

. Y. Gha-+-08b-]-j, A. Gauthier, J. Hubert, N. Abadie, C. Chaillet et al., Nonlinear hamiltonian modelling of magnetic shape memory alloy based actuators Sensors and Actuators A : Physical Characterization of magnetic shape memory (msm) material and its application in a hybrid micro actuator Balanced Control of Flexible Structures, 10th International Conference on New ActuatorsGLH + 07] J.Y. Gauthier, C. Lexcellent, A. Hubert, J. Abadie, and N. Chaillet . Modeling rearrangement process of martensite platelets in a magnetic shape memory alloy Ni 2 MnGa single crystal under magnetic field and (or) stress action. Journal of Intelligent Material Systems and Structures, pp.536-547, 1996.

. Y. Glh-+-10-]-j, C. Gauthier, A. Lexcellent, J. Hubert, N. Abadie et al., Ni-mn-ga single crystal shape memory alloy magneto-thermomechanical modeling, 14th International Conference on Experimental Mechanics (ICEM14), 2010.

]. H. Gol80 and . Goldstein, Classical Mechanics, 1980.

M. Geradin and D. Rixen, Théorie des vibrations, applicationà application`applicationà la dynamique des structures 2 e ´ edition. Masson, recherche en mécanique, 1996.

]. M. Gro08, ]. S. Grossardhabc99, C. Henein, S. Aymon, R. Bottinelli et al., ContributionàContribution`Contributionà la conception optimale et la commande de systèmes mécatroniques flexiblesàflexibles`flexiblesà actionnement piézoélectrique intégré -Application en microrobotique Fatigue failure of thin wire-electrodischarge machined flexible hinges, SPIE conf. on microrobotics and microassembly, pp.110-121, 1999.

S. [. Henein, R. Bottinelli, and . Clavel, Parellel spring stages with flexures of micrometric cross-sections, SPIE conf. on microrobotics and microfabrication, pp.209-220, 1997.

J. [. Hansen, V. Güttler, S. Seidmann, ]. Büttgenbachhl93, L. Hac et al., An optimization software for the design of micro coils Sensor and actuator location in motion control of flexible structures Construction of an integrated manufacturing system for 3d microstucture-concept, design and realization, Proc. of 12th micromechanics Europe workshop, pp.241-244239, 1993.

]. A. Hub02, I. Hubert, ]. W. Tu-braunschweighur60, and . Hurty, Modeling, simulation and design of legged microrobot Vibration of structural systems by component-modesynthesis, Journal of Engineering Mechanical Division, vol.86, pp.51-69, 1960.

]. W. Hur65 and . Hurty, Dynamic analysis of structural systems using component modes, AIAA Journal, vol.3, issue.4, pp.678-685, 1965.

B. D. Jackson, Classical electrodynamics, 3 rd ed, 1999.

]. H. Jan07 and . Janocha, Adaptronics and Smart Structures -Basics, Materials , Design and Applications, 2007.

]. D. Jil98 and . Jiles, Introduction to magnetism and magnetic materials, 1998.

M. [. James and . Wuttig, Magnetostriction of martensite, Philosophical Magazine A, pp.1273-1299, 1998.
DOI : 10.1063/1.117637

D. [. Kohl, B. Brugger, and . Krevet, Ferromagnetic shape memory actuator for large 2d optical scanning, 19th IEEE International Conference on Micro Electro Mechanical Systems, 2006.
DOI : 10.1109/memsys.2006.1627919

D. [. Kohl, M. Brugger, T. Ohtsuka, and . Takagi, A novel actuation mechanism on the basis of ferromagnetic SMA thin films, Sensors and Actuators A: Physical, vol.114, issue.2-3, pp.445-450, 2004.
DOI : 10.1016/j.sna.2003.11.006

D. [. Kiefer and . Lagoudas, Magnetic field-induced martensitic variant reorientation in magnetic shape memory alloys. Philosophical Magazine Special Issue : Recent Advances in Theoretical Mechanics, pp.33-354289, 2005.

D. [. Karnopp, R. C. Margolis, and . Rosenberg, System Dynamics : A Unified Approach 2 nde edition, 1990.
DOI : 10.1002/9781118152812

Y. [. Koenig, H. K. Tokad, and . Kesavan, Analysis of Discrete Physical Systems, 1967.

]. C. Lan86 and . Lanczos, The variational principles of mechanics 4, 1970.

[. Landau, Identification et commande des systèmes. Traité des nouvelles technologies, série Automatique. Hermès, 1993.

]. C. Les88, . B. Lesueur-[-lg93-]-k, W. Lim, and . Gawronski, Rayonnement acoustique des structures? Vibroacoustique, Interaction fluide-structure. Editions EY- ROLLES, collection de la direction desétudesdesétudes et recherche d'´ electricité de France Actuators and sensor placement for control of flexible structures in Control and Dynamics Systems : Advances in Theory and Applications, 1988.

. O. Lgf-+-98-]-n, M. K. Lobontiu, G. Gordon, E. Fischer, M. Garcia et al., Design and analysis of elastodynamic locomotion for robotic insects, SPIE conf. on microrobotics and micromanipulation, pp.118-127, 1998.

]. L. Lju99 and . Ljung, System identification, theory for user, 1999.

]. M. Mad02 and . Madou, Fundamentals of Microfabrication : The Science of Miniaturization, 2002.

]. G. Mar78 and . Martin, On the control of flexible mechanical systems, PhD Dissertation, 1978.

V. [. Müllner, G. Chernenko, and . Kostorz, A microscopic approach to the magnetic-field-induced deformation of martensite (magnetoplasticity), Journal of Magnetism and Magnetic Materials, vol.267, issue.3, pp.325-334, 2003.
DOI : 10.1016/S0304-8853(03)00400-1

]. L. Mei97 and . Meirovitch, Principles and techniques of vibrations, 1997.

G. [. Mukherjee, D. Fedder, J. Ramaswamy, and . White, Emerging simulation approaches for micromachined devices. IEEE trans. on computer-aided design of integrated circuits and systems, pp.1572-1589, 2000.

. Mgb-+-10-]-r, M. Khoury-moussa, M. Grossard, N. Boukallel, A. Chaillet et al., Observation-oriented design of a monolithic piezoelectric microac-tuator with optimally integrated sensor, 41st International Symposium on Robotics (ISR'2010), 2010.

. Mgc-+-10-]-r, M. Khoury-moussa, N. Grossard, M. Chaillet, A. Boukallel et al., Optimal design and control simulation of a monolithic piezoelectric microactuator with integrated sensor, IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM'2010), 2010.

A. [. Millet and . Hubert, Design of a 3 dof displacement stage based on ferrofluids, ACTUATOR'2006, pp.14-16, 2006.
URL : https://hal.archives-ouvertes.fr/hal-00334024

]. T. Mil89 and . Miller, Brushless Permanent-magnet and reluctance motor drives, 1989.

]. G. Mil05 and . Millet, ´ etude des possibilités d'utilisation des ferrofluides en micro-robotique. Master's thesis, 2005.

]. B. Moo81 and . Moore, Principal component analysis in linear systems : controllability, observability, and model reduction, IEEE Trans. on Automatic Control, vol.26, pp.17-32, 1981.

V. [. Ohnmacht, S. Seidmann, and . Büttgenbach, Microcoils and microrelays ??? an optimized multilayer fabrication process, Sensors and Actuators A: Physical, vol.83, issue.1-3, pp.124-129, 2000.
DOI : 10.1016/S0924-4247(00)00286-7

B. N. Ozisik, Finite difference methods in heat transfert, 1994.

]. R. Pac-+-04, J. Perez, C. Agnus, A. Clévy, N. Hubert et al., 2 dof piezoactuator for micromanipulation tasks, pp.767-770, 2004.

]. R. Pac-+-05, J. Perez, C. Agnus, A. Clévy, N. Hubert et al., Modelling , fabrication and validation of a high performance 2 dof microgripper, IEEE/ASME Transactions on Mechatronics, vol.10, issue.2, 2005.

]. J. Pon05 and . Pons, Emerging Actuator Technologies : A Micromechatronic Approach, 2005.

]. A. Pre02 and . Preumont, Vibration control of active structures : an introduction, 2002.

J. [. Polderman and . Willems, Introduction to Mathematical Systems Theory ? A Behavioral Approach, 2006.

Y. [. Rakotondrabe, F. Haddab, and . Lutz, Modular and reorganisable micromanipulation station, RTP Microrobotique, 2004.

S. [. Seidmann and . Büttgenbach, A optimized fabrication process for microcoils utilizing uv-depth-lithography and bcb. In proc, 2000.

S. [. Seidmann, S. Bütefisch, and . Büttgenbach, Application and investigation of in-plane compliant su8-structures formems, 11th int. conf. on solid-state sensors and actuators, 2001.

S. [. Smits and . Dalke, The constituant equations of piezoelctric bimorphs, International Ultrasonic Symposium, pp.781-784, 1989.

M. [. Sarawate and . Dapino, A continuum thermodynamics model for the sensing effect in ferromagnetic shape memory Ni???Mn???Ga, Journal of Applied Physics, vol.101, issue.12, pp.123522-123523, 2007.
DOI : 10.1063/1.2748356

M. [. Smith, T. R. Dapino, A. P. Braun, and . Mortensen, A homogenized energy framework for ferromagnetic hysteresis, IEEE Transactions on Magnetics, vol.42, issue.7, pp.1747-1769, 2006.
DOI : 10.1109/TMAG.2006.875717

A. [. Shearer, H. H. Murphy, and . Richardson, Introduction to System Dynamics, 1967.

M. [. Seidmann, S. Ohnmacht, and . Büttgenbach, A optimized multilayer fabrication process for high aspect ratio electromagnetic devices and microsystems (mems) In 10th int. conf. on solid-state sensors and actuators, Transducer'99, pp.102-105, 1999.

E. [. Suorsa, K. Pagounis, and . Ullakko, Magnetic shape memory actuator performance, Journal of Magnetism and Magnetic Materials, vol.272, issue.276, pp.272-2762029, 2004.
DOI : 10.1016/j.jmmm.2003.12.1026

E. [. Suorsa, K. Pagounis, and . Ullakko, Position dependent inductance based on magnetic shape memory materials, Sensors and Actuators A: Physical, vol.121, issue.1, pp.136-141, 2005.
DOI : 10.1016/j.sna.2005.01.001

. Sta-+-04-]-i, J. Suorsa, I. Tellinen, E. Aaltio, K. Pagounis et al., Design of active element for msm-actuator, ACTUATOR 2004 / 9th International Conference on New Actuators, 2004.

. Stp-+-02-]-i, J. Suorsa, E. Tellinen, I. Pagounis, K. Aaltio et al., Applications of magnetic shape memory actuators, 8th international conference ACTUATOR 2002, 2002.

R. [. Thompson and . Fearing, Automating microassembly with ortho-tweezers and force sensing, Proceedings 2001 IEEE/RSJ International Conference on Intelligent Robots and Systems. Expanding the Societal Role of Robotics in the the Next Millennium (Cat. No.01CH37180), 2001.
DOI : 10.1109/IROS.2001.977166

R. [. Tickle and . James, Magnetic and magnetomechanical properties of Ni2MnGa, Journal of Magnetism and Magnetic Materials, vol.195, issue.3, pp.627-638, 1999.
DOI : 10.1016/S0304-8853(99)00292-9

]. W. Tri89 and . Trimmer, Microrobots and micromechanical systems, Sensors & actuators, vol.19, pp.267-287, 1989.

]. J. Tsj-+-02, I. Tellinen, A. Suorsa, I. Jääskeläinen, K. Aaltio et al., Basic properties of magnetic shape memory actuators, 8th international conference ACTUATOR 2002, 2002.

D. [. Timoshenko, W. Young, and . Weaver, Vibration problems in engineering 4 th ed, 1974.

]. K. Uch97 and . Uchino, Piezoelectric Actuators and Ultrasonic Motors, 1997.

. Uhk-+-96-]-k, J. K. Ullakko, C. Huang, R. C. Kantner, V. V. Handley et al., Large magnetic-field-induced strains in ni2mnga single crystals, Applied Physics Letters, pp.1966-1968, 1996.

K. [. Udeshi and . Tsui, Assembly sequence planning for automated micro assembly, (ISATP 2005). The 6th IEEE International Symposium on Assembly and Task Planning: From Nano to Macro Assembly and Manufacturing, 2005., 2005.
DOI : 10.1109/ISATP.2005.1511457

B. E. Wellstead, Introduction to Physical Modelling, 1979.

]. J. Wil07 and . Willems, The behavioral approach to open and interconnected systems ? modeling by tearing, zooming, and linking, IEEE Control Systems Magazine, pp.46-99, 2007.

W. Wang, Q. Li, X. Zhang, C. Wu, and . Ge, Design and control of linear actuators made by magnetically controlled shape memory alloy, IEEE International Conference on Mechatronics, pp.583-586, 2005.

W. [. Wang, Q. Li, X. Zhang, and . Wu, Operation principle and design of a differential magnetic shape memory actuator, Fourtieth IAS Annual Meeting, pp.2114-2118, 2005.

J. [. Yang, B. J. Gaines, and . Nelson, A flexible experimental workcell for efficient and reliable wafer-level 3d microassembly, International Conference on Robotics and Automation, pp.133-138, 2001.

J. [. Yang, B. J. Gaines, and . Nelson, A supervisory wafer-level 3d microassembly system for hybrid mems fabrication, Journal of Intelligent and Robotic Systems, vol.37, issue.1, pp.43-68, 2003.
DOI : 10.1023/A:1023982907874

[. Zhang and F. Wang, A Novel Linear Actuator and Its Controlling System, 2007 IEEE International Conference on Automation and Logistics, pp.979-984, 2007.
DOI : 10.1109/ICAL.2007.4338709