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Couches minces amorphes d'ITO : caractérisation, structure, évolution et fonctionnalisation sous rayonnements UV.

Abstract : Indium oxide is transparent in the visible spectrum. Electrical conductivity is obtained by tin doping (ITO) and/or by the creation of oxygen vacancies. Thin films have been deposited by RF cathodic sputtering at room temperature. So, organic flexible substrates can be used safely. In a first part, implemented characterization procedures are described. Structural, electrical and optical properties of our optimized amorphous films are reported and discussed. Such films reach electrical and optical characteristics similar to those of the best polycrystalline ITO layers, usually processed at high temperature. Next, the interactions between layers and UV radiations are investigated. An excimer laser beam can print a lay-out by ablation. At lower fluences, laser annealing and crystallisation are compared to a standard oven annealing. Finally, we emphazise the role of UV radiations in the control of surface reactions, mainly with water. Changes induced by very low UV fluences on the electrical properties of ITO films are studied.
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https://tel.archives-ouvertes.fr/tel-00567155
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Submitted on : Friday, February 18, 2011 - 3:06:05 PM
Last modification on : Friday, January 8, 2021 - 3:42:54 AM
Long-term archiving on: : Thursday, May 19, 2011 - 2:55:48 AM

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  • HAL Id : tel-00567155, version 1

Citation

Gérard Legeay. Couches minces amorphes d'ITO : caractérisation, structure, évolution et fonctionnalisation sous rayonnements UV.. Matière Condensée [cond-mat]. Université Rennes 1, 2011. Français. ⟨tel-00567155⟩

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