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Modélisation et simulation du dépôt des oxydes à forte permittivité par la technique du Monte-Carlo cinétique

Abstract : Miniaturizing components requires radical changes in the development of future micro electronic devices. In this perspective, the gate dielectric of MOS devices can become so thin as to be made permeable to leakage currents. One solution is to replace SiO2 by a material with a higher permittivity which would allow the use of thicker layers with similar results. My work presents a multi-scale modelling of the growth of HfO2 on Si by atomic layer (ALD), which allows me to link the nano-structuration of an interface with the process of development. I demonstrate that knowing how basic chemical processes work, thanks to DFT calculations, allows considering a process simulation based on the development of a Kinetic Monte Carlo software named "HIKAD." Going beyond rather obvious mechanisms, I introduce the notion of densification mechanisms of deposited oxide layers. These mechanisms are the key element to understand how the growth of the layer in terms of coverage works. But even beyond that aspect, they allow to study the system's evolution towards a massive material, starting from molecular reactions. I shall discuss all those points in the light of recent experimental characterisation results concerning the deposition of hafnium oxides.
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https://tel.archives-ouvertes.fr/tel-00541993
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Submitted on : Wednesday, December 1, 2010 - 3:53:42 PM
Last modification on : Friday, January 10, 2020 - 9:08:09 PM
Long-term archiving on: : Wednesday, March 2, 2011 - 3:15:25 AM

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  • HAL Id : tel-00541993, version 1

Citation

Cédric Mastail. Modélisation et simulation du dépôt des oxydes à forte permittivité par la technique du Monte-Carlo cinétique. Micro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 2009. Français. ⟨tel-00541993⟩

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