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Conception, fabrication, caractérisation de micromembranes résonantes en silicium, à actionnement piézoélectrique et détection piézorésistive intégrés appliquées à la détection d'agents biologiques simulant la menace.

Thomas Alava 1
1 LAAS-NBS - Équipe NanoBioSystèmes
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : The threat of a massive and lethal biological attack aiming at armies or civilians has compelled military research institutions to invest massively in planning the response to such an attack. The response to a biological attack is contingent to abilities of perception and identification of this attack. Therefore, the need of low-cost, reliable, easily transportable, biological detection solutions is crucial. In this manuscript, we study the cases of biosensors based on silicon resonant micro-membranes, fabricated by standards micro-fabrication techniques. We first emphasize the advantages of these types of sensors to fill the requirements of the studied problematic. Then, according to initial objectives expressed in term of mass resolution and sensitivity, we report the theoretical study enabling the sizing and design of micro-membranes in order to satisfy these requirements. The global detection principle is dynamic micro-gravimetry. The vibration of membranes is provided through the action of a piezoelectric patch deposited on top of the membranes, the vibration detection is operated by piezoresistances located at micro-membranes' clamping. We report the micro-systems fabrication, their packaging and the fabrication of associated detection electronics. Finally, the electrical, electro-mechanical and biological characterization enables the focus on main results obtained during this work with respect to state of the art. First point lies in the demonstration of a physical co-integration of piezoelectric and piezoresistive phenomena inside a same resonating microstructure for biosensing applications. On a second hand the ability to track in real time the resonant frequency of several multiplexed micro-membranes vibrating in a liquid media provided to piezoresistive detection of vibration is reported. At last, results obtained for detection of biological warfare agents' surrogates are presented.
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Submitted on : Wednesday, December 1, 2010 - 3:45:47 PM
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  • HAL Id : tel-00541991, version 1

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Thomas Alava. Conception, fabrication, caractérisation de micromembranes résonantes en silicium, à actionnement piézoélectrique et détection piézorésistive intégrés appliquées à la détection d'agents biologiques simulant la menace.. Micro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 2010. Français. ⟨tel-00541991⟩

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