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Résonateurs à Ondes Acoustiques Guidées sur Miroir de Bragg

Abstract : Passive acoustic devices are enabling elements for RF architectures. Aside from the well known surface acoustic wave (SAW) and bulk acoustic wave (BAW) filters used for RF filtering, Lamb wave devices have recently been seen as an alternative to SAW devices currently used also for intermediate frequency filtering. These resonators are compatible with a membrane-based BAW technology (FBAR) and could thus be co-integrated with them with no additional cost. However, STMicroelectronics and CEALeti have focused their developments around BAW resonators using a Bragg mirror for acoustic isolation (SMR). Therefore, the aim of this work is to demonstrate the possibility of fabricating resonators close to Lamb wave resonators, but technologically compatible with a BAW-SMR technology. After reviewing the applications of electromechanical resonators in RF architectures and the proposals for the kind of resonators we are investigating available in the literature, we start with a theoretical investigation of these devices. This enables us to determine basic characteristics of these resonators: electromechanical coupling factors close to Lamb wave devices, but operation at frequencies close to BAW resonators. Then, we describe the design of demonstrators. Finally, we describe a fabrication process, similar to BAW-SMR fabrication process, which has provided to date the first operating devices using this principle. Electrical characterizations show that the fabricated resonators are functional, and we discuss possible improvements. This work led to publications in four conferences, (three international conferences), a paper, a patent and two internal publications at IEMN-STMicroelectronics common laboratory. Keywords : Resonator, Filter, BAW, SAW, Lamb wave, Guided wave, MEMS, RF Architecture, Mobile telecommunication, Acoustic, Bragg mirror, Finite Element Modeling (FEM), Scattering Matrix. Glossaire : SAW : Surface Acoustic Wave Resonator/Résonateur à ondes acoustiques des surface, BAW : Bulk Acoustic Wave/Ondes de volume, FBAR : Film Bulk Acoustic Resonator/Résonateur à ondes de volume sur une membrane, SMR : Solidily Mounted Resonator/Résonateur à ondes de volume sur un miroir de Bragg.
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https://tel.archives-ouvertes.fr/tel-00540624
Contributor : Issiaka Koné <>
Submitted on : Sunday, November 28, 2010 - 8:11:59 PM
Last modification on : Tuesday, December 8, 2020 - 3:32:34 AM
Long-term archiving on: : Saturday, December 3, 2016 - 1:26:56 AM

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  • HAL Id : tel-00540624, version 1

Citation

Koné Issiaka. Résonateurs à Ondes Acoustiques Guidées sur Miroir de Bragg. Micro et nanotechnologies/Microélectronique. Université des Sciences et Technologie de Lille - Lille I, 2010. Français. ⟨tel-00540624⟩

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