Contrôle nanoscopique du mouvement par courant tunnel: étude et réalisation

Abstract : The present work proposes to use the tunnel current as a sensor to manipulate an object with micrometric dimensions. The use of such a sensor is proposed as an alternative to optical sensors, commonly used to measure or control the position of objects at a micrometric or nanometric scale. This work shows that the tunnel current can be controlled simultaneously with an electrostatic actuator and a piezoelectric actuator to tackle difficulties relative to the reduction of scale, such as drifts or measurement noise. For that purpose, an experimental set-up has been built-up at the GIPSA-Lab in the framework of this PhD. A robust control strategy has been implemented in this set-up to control the position of a microcantilever with an accuracy below the ångström at a speed higher than several hundred of Hertz.
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Networking and Internet Architecture. Institut National Polytechnique de Grenoble - INPG, 2010. French


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Contributor : Sylvain Blanvillain <>
Submitted on : Wednesday, November 10, 2010 - 12:38:58 AM
Last modification on : Wednesday, January 14, 2015 - 1:06:49 AM

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  • HAL Id : tel-00534533, version 1

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Sylvain Blanvillain. Contrôle nanoscopique du mouvement par courant tunnel: étude et réalisation. Networking and Internet Architecture. Institut National Polytechnique de Grenoble - INPG, 2010. French. <tel-00534533>

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