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Contrôle nanoscopique du mouvement par courant tunnel: étude et réalisation

Abstract : The present work proposes to use the tunnel current as a sensor to manipulate an object with micrometric dimensions. The use of such a sensor is proposed as an alternative to optical sensors, commonly used to measure or control the position of objects at a micrometric or nanometric scale. This work shows that the tunnel current can be controlled simultaneously with an electrostatic actuator and a piezoelectric actuator to tackle difficulties relative to the reduction of scale, such as drifts or measurement noise. For that purpose, an experimental set-up has been built-up at the GIPSA-Lab in the framework of this PhD. A robust control strategy has been implemented in this set-up to control the position of a microcantilever with an accuracy below the ångström at a speed higher than several hundred of Hertz.
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Contributor : Sylvain Blanvillain <>
Submitted on : Wednesday, November 10, 2010 - 12:38:58 AM
Last modification on : Thursday, November 19, 2020 - 12:59:39 PM
Long-term archiving on: : Friday, February 11, 2011 - 2:42:06 AM


  • HAL Id : tel-00534533, version 1



Sylvain Blanvillain. Contrôle nanoscopique du mouvement par courant tunnel: étude et réalisation. Réseaux et télécommunications [cs.NI]. Institut National Polytechnique de Grenoble - INPG, 2010. Français. ⟨tel-00534533⟩



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