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CONCEPTION ET MODELISATION D'UN NANOCAPTEUR DE MASSE PAR DETECTION PIEZORESISTIVE

Abstract : Technological improvements in electronic field allow to fabricate smaller components. Within this miniaturization process, these components offer various physical properties which can give them new functionalities. It is the commonly called "more than Moore" domain. The purpose of this work is to design from electronic lithographic technique a component able to detect the presence of species, even in a very weak amount. The detection is done by measuring the resonance frequency shift of a mechanical resonator, the shift being due to the accretion of the species on the resonator. The mechanical-electrical signal conversion runs off silicon piezoresistive properties. The feasibility of this sensitive component integration within an electronic architecture is then studied in order to target the production of a marketable sensor. A linear model of all the architecture elementary steps allows to combine them within a selfoscillation loop. The main noise phenomena are also included in order to compute the sensor performances. These performances are then compared to a similar architecture using capacitive detection. In the end, the non linearity impact over the performences is also assessed.
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https://tel.archives-ouvertes.fr/tel-00533197
Contributor : Sébastien Labarthe <>
Submitted on : Friday, November 5, 2010 - 2:28:41 PM
Last modification on : Friday, December 18, 2020 - 1:10:04 PM
Long-term archiving on: : Sunday, February 6, 2011 - 2:53:23 AM

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  • HAL Id : tel-00533197, version 1

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Sébastien Labarthe. CONCEPTION ET MODELISATION D'UN NANOCAPTEUR DE MASSE PAR DETECTION PIEZORESISTIVE. Physique [physics]. Université Joseph-Fourier - Grenoble I, 2010. Français. ⟨tel-00533197⟩

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