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Réalisation d'interconnexions de faible résistivité à base de nanotubes de carbone biparois pour la nano-électronique

Abstract : Since their discovery in 1991 by S.Iijima, carbon nanotubes have been study for their mechanicals and electrical properties. This is especially on that last topic they are the most investigated. They are providing better electrical conduction than copper for micro and nano electronic. The topic of this study is to provide a way to use them as electrical conductors. In order to integrate them on complex electronic system, we must insure that the ways we plan to use are compatible with the possible presence of electronic components on the substrate. To do that, we will use localise growth of carbon nanotubes, at temperature as low as possible; anyway, another process consisting on a post synthesis manipulation will also be investigated.
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https://tel.archives-ouvertes.fr/tel-00525069
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Submitted on : Monday, October 11, 2010 - 10:02:52 AM
Last modification on : Friday, January 10, 2020 - 9:08:08 PM
Long-term archiving on: : Wednesday, January 12, 2011 - 2:45:37 AM

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  • HAL Id : tel-00525069, version 1

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Cyril Tinguely. Réalisation d'interconnexions de faible résistivité à base de nanotubes de carbone biparois pour la nano-électronique. Micro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 2010. Français. ⟨tel-00525069⟩

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