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Caractérisation micromécanique de matériaux en couche mince destinés aux micro- et nano- technologies

Abstract : The development of micro- and nano- technologies is strongly correlated with the knowledge of the mechanical behavior of constitutive thin coatings. Experimental characterization is mandatory insofar as mechanical properties, at such a scale, are dependent of micro structural features and its history. Moreover, there are numerous implementations of thin coatings. This the sis reports a transversal approach, based on nanoindentation setup, in order to address the characterization of coatings deposited on substrate, and on uni axial tensile tests for freestanding specimens with a thickness less than the micrometer. Particularly, it lies on an itinerant microtensile apparatus, improved and evaluated during this work through campaigns performed on sputtering aluminium with thicknesses down to 700nm and 4µm thick electroplated gold.
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https://tel.archives-ouvertes.fr/tel-00508255
Contributor : Cédric Seguineau <>
Submitted on : Monday, August 2, 2010 - 4:34:38 PM
Last modification on : Thursday, November 19, 2020 - 3:54:15 PM
Long-term archiving on: : Thursday, December 1, 2016 - 3:05:44 PM

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Cédric Seguineau. Caractérisation micromécanique de matériaux en couche mince destinés aux micro- et nano- technologies. Mécanique [physics.med-ph]. Institut National Polytechnique de Grenoble - INPG, 2009. Français. ⟨tel-00508255⟩

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