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Conception, Fabrication, Caractérisation de microactionneurs à base de nanotubes de carbone

Abstract : Nanotechnologies provide the possibility to reduce size, energy consumption and cost by miniaturizing of actual components. They allow also the development of new functionalities for high performances integrated systems for applications in the fields of electronic and telecommunication. Carbon nanotubes are particularly appropriate to be integrated in NEMS because of their dimensions and electrical and mechanical properties. Their mechanical resonance frequency located in the range of GHz make them attractive for promising applications in the microwave field. Their localization in-situ on devices using the CVD (Chemical Vapor Deposition) growth technique open a way for the fabrication of CNT based NEMS. However it is interesting to get the Young's modulus of CNT in order to design NEMS devices. So, it may be important to develop an in-situ technique for CNT mechanical characterization. The work of this thesis has two aims: (1) the extraction of Young's Modulus of CNT obtained par CVD and (2) the realization of a building block to remove the technological barriers associated with integration of CNT. Micro electromechanical tweezers based on vertical CNT ropes have been modelled and fabricated for the first time. The experimental measurement of the pull-in voltage of the tweezers, associated with the electromechanical model developed in this work, which takes into account the CNT rope density has allowed the extraction of the CNT Young's modulus.
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Submitted on : Monday, May 10, 2010 - 2:00:03 PM
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  • HAL Id : tel-00482397, version 1




Z. Raslan. Conception, Fabrication, Caractérisation de microactionneurs à base de nanotubes de carbone. Micro et nanotechnologies/Microélectronique. Université Joseph-Fourier - Grenoble I, 2009. Français. ⟨tel-00482397⟩



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