Évaluation du potentiel de performances micro-accéléromètres inertiels vibrants en silicium

Abstract : A major research effort is necessary to ensure flight control for miniaturized UAV. This research is based on a new generation of inertial sensors, the vibrating sensors, which offer because of their principle and their associated technology achievement, interesting prospects in terms of miniaturization / performance / cost. The focus of this research was to study the relationship between performance and size of silicon vibrating accelerometers.We have established the boundaries of this type of sensor based on the size of the resonator. In particular, the quality factor has emerged as a determining factor and an experimental study was conducted to validate the theoretical models. Thus, many experimental results have enabled us to estimate the expected performances. Finally, a first architecture of silicon vibrating accelerometer is presented
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Autre. Université Paris-Est, 2008. Français. <NNT : 2008PEST0243>


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Baptiste Le Foulgoc. Évaluation du potentiel de performances micro-accéléromètres inertiels vibrants en silicium. Autre. Université Paris-Est, 2008. Français. <NNT : 2008PEST0243>. <tel-00473800v2>

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