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CONTROLE SPECTROPHOTOMETRIQUE LARGE BANDE DE FILTRES INTERFERENTIELS EN COURS DE DEPOT

Abstract : Wide Band Optical Monitoring for thin film thickness control during process deposition is demonstrated with a reflectance and transmittance optical set up
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https://tel.archives-ouvertes.fr/tel-00472428
Contributor : Fabien Lemarchand <>
Submitted on : Monday, April 12, 2010 - 3:12:15 PM
Last modification on : Thursday, January 23, 2020 - 6:22:08 PM
Long-term archiving on: : Tuesday, September 14, 2010 - 6:27:05 PM

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  • HAL Id : tel-00472428, version 1

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B. Badoil. CONTROLE SPECTROPHOTOMETRIQUE LARGE BANDE DE FILTRES INTERFERENTIELS EN COURS DE DEPOT. Sciences de l'ingénieur [physics]. Université Paul Cézanne - Aix-Marseille III, 2007. Français. ⟨tel-00472428⟩

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