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Modeling and optimizing flexible capacity allocation in semiconductor manufacturing

Abstract : In this thesis, capacity allocation is modeled for a semiconductor fabrication facility (wafer fab), with measures and methods that optimize the capacity allocation of wafer fabs. The proposed approach supports effective qualification management in wafer fabs (i.e. qualifications of products on tools), such that the engineers can increase the flexibility for operators. Operators need flexibility to decide how the workload should be allocated in order to optimally use the capacity of the tools. To do that, four flexibility measures are proposed: toolset flexibility (favors qualification of tools for process with high workload), WIP flexibility (favors possibility of balancing the workload on the tools), time flexibility (favors balancing of the production times on the tools) and system flexibility (combines all the previous measures). In order to use two of the flexibility measures (WIP flexibility and time flexibility), the optimal balance of workload and production times on the tools need to be found. To do this, optimization programs need to be solved beforehand. Furthermore, the integration of dynamically changing workload, the optimization of multiple qualifications of products on tools and numerous numerical experiments are presented.
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Submitted on : Thursday, March 25, 2010 - 4:30:28 PM
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  • HAL Id : tel-00467027, version 1


Carl Johnzén. Modeling and optimizing flexible capacity allocation in semiconductor manufacturing. Engineering Sciences [physics]. Ecole Nationale Supérieure des Mines de Saint-Etienne, 2009. English. ⟨tel-00467027⟩



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