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Modélisation et conception des micro commutateurs RF MEMS a actionnement électrostatique et/ou piezoélectrique

Hikmat Achkar 1
1 LAAS-MINC - Équipe MIcro et Nanosystèmes pour les Communications sans fil
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : The majority of RF MEMS switches are actuated using the electrostatic forces to vary the distance between the two electrodes to cut or transmit the signal. This type of actuation, despite its advantage, has a major drawback which is the dielectric charging which lead to the failure of the switch. To solve this problem, we worked in parallel in two directions. The first direction consists of using of piezo-electric actuation to suppress the dielectric charging. The second one is based on the improving of mechanical behavior of the structure by increasing the restoring force without increasing the actuation voltage. The proposed design has been validated using a multiphysic simulation platform.
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https://tel.archives-ouvertes.fr/tel-00462560
Contributor : Arlette Evrard <>
Submitted on : Wednesday, March 10, 2010 - 10:42:22 AM
Last modification on : Thursday, June 10, 2021 - 3:01:23 AM
Long-term archiving on: : Friday, June 18, 2010 - 10:39:13 PM

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  • HAL Id : tel-00462560, version 1

Citation

Hikmat Achkar. Modélisation et conception des micro commutateurs RF MEMS a actionnement électrostatique et/ou piezoélectrique. Micro and nanotechnologies/Microelectronics. Université Paul Sabatier - Toulouse III, 2009. English. ⟨tel-00462560⟩

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