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Application des techniques de contrôle aux réseaux de micro et nanostructures

Abstract : One of the most important benefits provided by M/NEMS is their ability to be fabricated in a massive way combining them into arrays. However, many problems limit the use of such systems such as control complexity, elements dispersion and couplings, non-linearities and noise sources, etc. Hence, it is crucial to take these features into consideration since the design stage, eliminating their effects or making advantage of them to make new architectures that achieve high performances. A contribution to flexible micro-structures control is developed using a large array of distributed nano-transducers. The continuous structure is then replaced by a NEMS array whose model is detailed for the first time in function of existing dispersions. Coupled arrays architectures are suggested in order to reduce the dispersions effects, enhancing by that the selectivity of the derived filters. Based on the distributed transductions scheme, a novel tuning strategy is elaborated by using modal control. The different arrays (coupled or not) can be used in sensing applications, where the measurement system is modelled depending on the used technique and on the chosen structure before improving the performances by appropriate control. A new configuration based on transduction nonlinearities is designed for variation compensation and measurement of a sensor resonance frequency allowing system complexity reduction.
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Contributor : Chady Kharrat <>
Submitted on : Sunday, January 24, 2010 - 7:30:23 PM
Last modification on : Thursday, June 11, 2020 - 5:04:04 PM
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  • HAL Id : tel-00449998, version 1



Chady Kharrat. Application des techniques de contrôle aux réseaux de micro et nanostructures. Automatique / Robotique. Université Joseph-Fourier - Grenoble I, 2009. Français. ⟨tel-00449998⟩



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