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T. Leïchlé, M. Manso-silvan, P. Belaubre, A. Valsesia, G. Ceccone et al., Publication List List of Publications Part of the work presented in this thesis has contributed to the following publicationsNanostructuring surfaces with conjugated silica colloids deposited using silicon-based microcantilevers, Journal papers ? Nanotechnology, issue.4, pp.16-525, 2005.

@. T. Leïchlé, L. Nicu, E. Descamps, B. Corso, P. Mailley et al., Copper electrodeposition localized in picoliter droplets using microcantilever arrays, Applied Physics Letters, vol.88, issue.25, p.254108, 2006.
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@. T. Leïchlé, D. Saya, J. Pourciel, F. Mathieu, L. Nicu et al., Liquid loading of silicon-based cantilevers using electrowetting actuation for microspotting applications, Sensors and Actuators A: Physical, vol.132, issue.2, p.590, 2006.
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@. T. Leïchlé, D. Saya, J. Pourciel, F. Mathieu, C. Bergaud et al., A closedloop MEMS-based spotter integrating position sensors with nanometric precision for the control of droplet uniformity, IEEE NTC Review on Advances in Micro Nano, and Molecular Systems, vol.1, p.337, 2006.

@. A. Valsesia, T. Leïchlé, L. Lacroix, L. Nicu, F. Bretagnol et al., Deposition of Nanobead Hexagonal Crystals Using Silicon Microcantilevers, Small, vol.88, issue.12, p.1444, 2006.
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@. D. Saya, T. Leïchlé, J. Pourciel, C. Bergaud, and L. Nicu, Collective fabrication of an in-plane silicon nanotip for parallel femtoliter droplet deposition, Journal of Micromechanics and Microengineering, vol.17, issue.1, 2007.
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@. L. Tanguy, T. Leïchlé, and L. Nicu, Dynamic spreading of a liquid finger driven by electrowetting: Theory and experimental validation, Journal of Applied Physics, vol.101, issue.4, 2007.
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@. E. Descamps, T. Leïchlé, B. Corso, S. Laurent, P. Mailley et al., Fabrication of Oligonucleotide Chips by Using Parallel Cantilever-Based Electrochemical Deposition in Picoliter Volumes, Advanced Materials, vol.22, issue.14, 2007.
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@. T. Conference-papers, D. Leïchlé, P. Saya, J. Belaubre, F. Pourciel et al., Liquid loading of silicon-based cantilevers using electrowetting actuation for microspotting applications, Proceedings of the 13 th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers'05)

@. P. Belaubre, J. Pourciel, D. Saya, T. Leïchlé, F. Mathieu et al., First step towards a fully automated trim control for liquid deposition device at the microscale using piezoresistive cantilevers row, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., pp.5-9, 2005.
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@. T. Leïchlé, D. Saya, J. Pourciel, F. Mathieu, C. Bergaud et al., A closedloop MEMS-based spotter integrating position sensors with nanometric precision for the control of droplet uniformity, Proceedings of the 1 st IEEE International Conference on Nano/Micro Engineering and Molecular Systems, pp.18-21, 2006.

@. V. Bardinal, E. Daran, C. Vergnenègre, T. Leïchlé, Y. Segui et al., Design and fabrication of polymer microlenses arrays for VCSELs using a cantilever based microsystem, Micro-Optics, VCSELs, and Photonic Interconnects II: Fabrication, Packaging, and Integration, p.618510, 2006.
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@. L. Tanguy, T. Leïchlé, and L. Nicu, Theoretical considerations for continuous electrowetting in U-shaped channels, th International Meeting on Electrowetting, 2006.

@. D. Saya, T. Leïchlé, J. Pourciel, C. Bergaud, and L. Nicu, Collective fabrication of an in-plane silicon nanotip for parallel femtoliter droplet deposition, Proceedings of the 32 nd International Conference on Micro-and Nano-Engineering (MNE'06), p.47, 2006.
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@. T. Leïchlé, E. Descamps, B. Corso, S. Laurent, P. Mailley et al., MEMS-based picoliter electrochemical cell array for the fabrication of oligonucleotide chips, Proceedings of the 10 th International conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS), pp.5-9, 2006.

@. N. Berthet, T. Leïchlé, E. Trévisiol, J. Pourciel, D. Saya et al., Spot-in-spot" hybridization of oligonucleotides deposited on a glass slide by a microcantilever-based device, Proceedings of the 10 th International conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS), pp.5-9