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Etude de structures NiCoCrAlY / Al2O3 / TiOx / Pt / AlN déposées par pulvérisation cathodique sur superalliage base Ni pour capteurs de pression haute température

Abstract : NiCoCrAlY / Al2O3 / TiOx / Pt / AlN multilayers deposited by cathodic sputtering on nickelbased superalloy, aimed to manufacture pressure sensors on turbomachinery parts, were studied and characterised. The principle objectives of the study are to solve the adhesion problem of platinum (Pt) films on aluminium oxide (Al2O3) and to improve the {0001} crystallographic texture of the aluminum nitride (AlN) layers, favourable to the wanted piezoelectric effect. The influence of a TiOx adhesion layer on the adherence of Pt films and the effect of the substrate bias voltage on the physical and chemical properties of the AlN layers were particularly studied. The detailed study (XRD, SEM, EDS, XPS, pull-off tests) of the physical and chemical properties of the layers was conducted. The results show the strong influence of TiOx on the nature and surface properties of alumina layers. The TiOx film presence can improve or deteriorate the Pt adhesion according to the type of alumina elaborated. A strong effect of the substrate bias voltage on the texture, morphology, chemical composition of the AlN layers and on the residual stress was proved and explained. The results about the AlN {0001} texture quality and the mechanical behaviour of the multilayers (800°C) allowed to elaborate Pt / AlN / Pt transducers on nickel-based superalloy plane substrates. The pressure sensitivity of these first prototypes has to be evaluated prior to elaborating sensors on turbomachinery parts.
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  • HAL Id : tel-00444578, version 1

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Eric Derniaux. Etude de structures NiCoCrAlY / Al2O3 / TiOx / Pt / AlN déposées par pulvérisation cathodique sur superalliage base Ni pour capteurs de pression haute température. Matériaux. Université de Caen Basse-Normandie, 2007. Français. ⟨tel-00444578⟩

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