De la couche sensible au système :dépôt par plasma froid et capteurs de gaz

Abstract : My research activities are grouped into three main parts from the sensitive layer to the system. The first part focuses on the cold plasma. The plasma environment as physically and chemically very reactive, was mainly used for thin film deposition, but also served as a tool for characterization of surface or gas processing. The second part deals with the development of a gas sensor from the deposition of the sensitive layer to the device. It comes from the assumptions until sensor characteristics. The third part concerns the multisensor systems. In this part, the system consists of several sensors, the feature extraction of the signals and the data processing. Finally, my work in recent issues are quickly exposed in the fourth section of the paper.
Document type :
Habilitation à diriger des recherches
Micro and nanotechnologies/Microelectronics. Université Paul Cézanne - Aix-Marseille III, 2009


https://tel.archives-ouvertes.fr/tel-00428567
Contributor : Pascal Lauque <>
Submitted on : Thursday, October 29, 2009 - 10:50:48 AM
Last modification on : Friday, June 12, 2015 - 1:01:02 AM

Identifiers

  • HAL Id : tel-00428567, version 1

Collections

Citation

Pascal Lauque. De la couche sensible au système :dépôt par plasma froid et capteurs de gaz. Micro and nanotechnologies/Microelectronics. Université Paul Cézanne - Aix-Marseille III, 2009. <tel-00428567>

Export

Share

Metrics

Consultation de
la notice

126

Téléchargement du document

432