Skip to Main content Skip to Navigation

Modélisationdu contact métal-métal: application aux micro-commutateurs MEMS RF

Fabienne Pennec 1
1 LAAS-MINC - Équipe MIcro et Nanosystèmes pour les Communications sans fil
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : The insertion of RF MEMS micro-switches into real architecture necessitates reduced actuation voltage and dimensions that gives more importance to surface effects. Therefore most of the limitations are related to the quality of the contact and the reliability. In this context, a tool for calculating the electrical contact resistance of DC contact micro-switches has been developed. The tool will be very efficient for investigating the impact of materials, roughness and topology on the quality and the contact performances. Firstly an overview of the different available methods (analytical, numerical, experimental) to analyze the mechanical and electrical contact of rough surfaces has been performed. Then we have designed and fabricated two architectures of test structures, one with mechanical actuation and the other with electrostatic actuation in order to validate the contact modeling methodology that we implement. The originality of this work relies on a novel approach by using a reverse engineering method to generate the real shape of the surface. The mechanical contact analysis is then performed through finite element multi-physic simulation using ANSYS 11 platform. The mechanical analysis is completed with an electrical analysis, using analytical formulations derived from electrical contact theories and referring to the previous mechanical results. We use the AFM to capture 3D data points of contact surfaces on test structures to test the calculation tool. The obtained results with the novel methodology are not in very good agreement with the experimental measurement of contact resistance. These discrepancies were expectable and are related to the difficulties to take into account all parameters that affect the contact resistance value (thermal conduction, contaminant layers on the contact surfaces, creep effects) in the model. Moreover it is often delicate to evaluate precisely the contact material properties.
Complete list of metadata

Cited literature [88 references]  Display  Hide  Download
Contributor : Arlette Evrard <>
Submitted on : Tuesday, September 29, 2009 - 11:10:57 AM
Last modification on : Thursday, June 10, 2021 - 3:01:24 AM
Long-term archiving on: : Saturday, November 26, 2016 - 12:38:50 PM


  • HAL Id : tel-00420496, version 1


Fabienne Pennec. Modélisationdu contact métal-métal: application aux micro-commutateurs MEMS RF. Micro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 2009. Français. ⟨tel-00420496⟩



Record views


Files downloads