Fang, A novel single-layer Bidirectional out of plane electrothermal microactuator, Publications/journal/volume10/no2/tanhall_maboudian .htm 5th annual review of LETI, Overview of RF MEMS at LETI Silicon Bulk Micromachined RF MEMS Switches with 3,5 Volts operation by using Piezoelectric Actuator, IEEE MTT-S Digest, pp.69-96, 1889. ,
A three-dimensional shape memory alloy microelectrode with clipping structure for insect neural recording, Luo, Current Status of global NdFeB magnet industry Electromagnetic microrelays: concepts an fundamental characteristics, Sensors and Actuators A, pp.24-31, 1994. ,
DOI : 10.1109/84.825773
Silicon micro optical switching device with an electromagnetically operated cantilever, sensor and actuator 83, pp.220-224, 2000. ,
Fabrication and Experiments on Electromagnetic Micromirror Array with Bulk Silicon Mirror Plate and Aluminum Spring, The 11th International Conference on Solid-State Sensors and Actuators, 2001. ,
bistable optical fiber switch combinig LIGA technology with micromachined permanent magnets, TRANSDUCERS '01 EUROSENSORS XV, The 11th International Conference on Solid-State Sensors and Actuators, 2001. ,
Micro-Miniature Electromagnetic Switches Fabricated Using MEMS Technology, Proceedings: 46th Annual International Relay Conference: NARM '98, pp.13-14, 1998. ,
Micro-actionneur bistable utilisant le guidage magnétique et des aimants, 2001. ,
Magnetically-driven bi-directional optical microscanner, J. Micromech. Microeng, vol.13, pp.383-389, 2003. ,
Magnetic Actuation for MEMS Scanners for Retinal Scanning Displays, SPIE proceedings 4985, MOEMS Display and Imaging Systems ,
Electromagnetic mini-actuator for positioning stage, 6 th Japan-France & 4 th Asia-Europe Mechatronics Congress, pp.44-48, 2003. ,
3-phase coil for planar brushlessmicromotor, pp.181-184, 2000. ,
Cugat 2003 Characterization of planar brushless µ-motors / µ-generators, Proc. MECHATRONICS 03, pp.179-183, 2003. ,
Magnetically bistable actuator Part 1. Ultra-low switching energy and modelling, Received 26 Sensors and Actuators A xxx, Magnetically bistable actuator Part 2. Fabrication and performance Received 26 Sensors and Actuators A xxx, 2004. ,
Electromagnetically Actuated Mirror Arrays for Use in 3-D Optical Switching Applications, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, vol.13, issue.3, 2004. ,
A Bidirectional Magnetic Microactuator Using Electroplated Permanent Magnet Arrays, Journal of MicroelectroMechanical Systems, vol.11, issue.1, 2002. ,
Elaboration par voie électrochimique, caractérisation et intégration pour applications industrielles, d'aimant permanent à base de CoPt, 2003. ,
Microactionneur magnétique à déplacement vertical, Déposé le 02, p.882, 2002. ,
Asservissement d'un microsystème magnétique, 2005. ,
3D calculation of forces and torques affecting permanent magnets ? application to micrsystems, submitted to sensors and actuators A (Physical), 2003. ,
3D calculation of permanent magnet interactions, IMACS'l Canada, pp.289-292, 1993. ,
3D analytical calculation of the forces exerted between two cuboidal magnets, IEEE Transactions on Magnetics, vol.20, issue.5, 1984. ,
DOI : 10.1109/TMAG.1984.1063554
Modélisation des structures par éléments finis, volume1, solides élastiques, pp.196-200 ,
DOI : 10.1002/nme.1620372312
Capitalizing on computation tools to improve design and knowledge sharing of magnets based devices, HPMA proceedings, 2004. ,
50 T pulsed magnetic fields in microcoils, Journal of Applied Physics, vol.87, issue.4, 2000. ,
DOI : 10.1063/1.372126
Experiments and simulations of MEMS thermal sensors for wall shear-stress measurements in aerodynamic control applications, Journal of Micromechanics and Microengineering, vol.14, issue.12 ,
DOI : 10.1088/0960-1317/14/12/007
High current density measurements of giant magnetoresistive spin-valves for magneto recording and sensor applications ,
59±62, Thermal effect on electromigration performance for Al/SiO2, Cu/SiO2 and Cu/low-K interconnect systems, Solid-State Electronics, vol.45, issue.2, 2001. ,
Elaboration par voie électrochimique, caractérisation et intégration pour applications industrielles, d'aimant permanent à base de CoPt, 2003. ,
High resolution magneto-optic field mapping of miniature magnets with indicator films- Application to magnetic microsystems, HPMA proceedings, Pascual, Flip-Chip Bonder for MEMS Assembly SÜSS MicroTec 228 Suss Drive, 2004. ,
Fabrication of hard magnetic microarrays by electroless codeposition for MEMS actuators, Sensors and Actuators A, vol.118, pp.307-312, 2005. ,
Magnetic properties and microstructural analysis of sputter???deposited and annealed Co???Pt alloys, Journal of Applied Physics, vol.77, issue.6, pp.6-2641, 1995. ,
DOI : 10.1063/1.358730
Magnetic properties and structure of cobalt-platinum thin films, IEEE Transactions on Magnetics, vol.19, issue.4, pp.1514-1515, 1983. ,
DOI : 10.1109/TMAG.1983.1062575
Effects of Annealing on the Magnetic Properties and Structures of Sputtered Co???Pt Alloy Thin Films, Japanese Journal of Applied Physics, vol.37, issue.Part 1, No. 11, pp.5980-5983, 1998. ,
DOI : 10.1143/JJAP.37.5980
Microstructure and magnetic properties of electrodeposited Co-Pt and Co-Pt-P alloys thin films, ECS Proceedings, pp.18-169, 1995. ,
Electrodeposited Co-Pt thin films for magnetic hard disks, Journal of Magnetism and Magnetic Materials, vol.120, issue.1-3, pp.300-304, 1993. ,
DOI : 10.1016/0304-8853(93)91347-A
Electrodeposition of Co-Pt thin films for magnetic recording Magnetic materials, processes and devices, ECS Inc, vol.92, pp.69-85, 1992. ,
Effects of hypophosphite contents and surface treatment on electroplated Co???Ni???P thin films, Journal of Applied Physics, vol.73, issue.10, pp.10-5575, 1993. ,
DOI : 10.1063/1.353655
Coercivity and microstructure in Co-Pt and Co-Pd thin films, Journal of Magnetism and Magnetic Materials, vol.133, issue.1-3, pp.511-515, 1994. ,
DOI : 10.1016/0304-8853(94)90610-6
Elaboration d'aimants permanents en CoPt par dépôt électrolytique, rapport de stage du laboratoire CMI, 1999. ,
Elaboration électrochimique et caractérisation d'aimants permanents en cobaltplatine, 2000. ,
Dépôt électrolytique et caractérisation d'aimants permanents en CoPt, 2000. ,
Elaboration par voie électrochimique, caractérisation et intégration pour applications industrielles, d'aimants permanents à base de Co-Pt, 2003. ,
Microstructure and magnetic properties of CoCrPt/Cr films on ultrasmooth NiP/AIMg substrates, J. Appl. Phys, vol.79, pp.6-5348, 1996. ,
Influence of Cu(100) Substrate on Growth, Morphology, Structural and Magnetic Properties of High Coercivity Electrodeposited Co-Pt-P Thin Films, Journal of The Electrochemical Society, vol.151, issue.10, p.10 ,
DOI : 10.1149/1.1793911
Locatelli Actionneur magnétique à lévitation Déposé le 02, p.882, 2002. ,
Cugat Fast dynamic modeling of a magnetic micro-actuator, J. Mag. Mag. Mat, vol.272, pp.669-671 ,
Cugat High Current Densities for Magnetic Micro-Actuators Soumis, en cours de révision pour Cugat Conception, modélisation et prototypage d'un micro-relais bistable magnétique Soumis, révisé, accepté, p.pour la RIGE ,
MAGnetic Micro-Actuators & Systems MAGMAS À paraître dans Sensors & Actuators (Contribution orale invitée à European Magnetic Sensors & Actuators EMSA 04, 2004. ,
Cugat Magnetic Out-of-Plane Bi-Stable Magnetic-Actuator HPMA Conference, p.929, 2004. ,
Delamare Magnetic, out of plane, totally integrated magnetic micro-actuator Transducers-Carus Ultra-fast levitating magnetic bistable micro-actuator with integrated permanent magnets HPMA, p.408, 2004. ,
Rostaing Magnetic down-scaling laws, micro-magnets and applications of magnetic micro-actuators (MAGMAS) HPMA '04, p.767, 2004. ,