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CONCEPTION, MODELISATION ET FABRICATION D'UN MICRO-ACTIONNEUR BISTABLE, HORS PLAN ET MAGNETIQUE

Abstract : Magnets are gradually appearing in the world of micro-actuators and power MEMS, particularly for applications such as micro-switches. This PhD is devoted to the design, simulation and prototyping of a fully integrated micro-actuator with high vertical displacement, based on CoPt permanent magnets. Its main characteristics are: high displacement (in excess of 100 µm), low switching time (300 µs for 100 µm) and bistability. The commutation pulsed current is optimized for the lowest possible energy per pulse (minimum of 15 µJ). The main innovation of this design is that the moving part has no mechanical connection and is guided by magnetic levitation. The PhD adresses about the problems involved in the design (bistability, static and dynamic study), the thermal study (model and experiments) of the conductors supplied with high current densities (up to 90000 A/mm²), and the prototyping of our actuator in the LETI-CEA clean rooms (development and validation of the technological steps). The final steps and assembly are currently being finalised in CEA-LETI.
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Submitted on : Thursday, July 30, 2009 - 12:09:16 PM
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Hervé Rostaing. CONCEPTION, MODELISATION ET FABRICATION D'UN MICRO-ACTIONNEUR BISTABLE, HORS PLAN ET MAGNETIQUE. Sciences de l'ingénieur [physics]. Institut National Polytechnique de Grenoble - INPG, 2004. Français. ⟨tel-00408339⟩

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