H. C. Nathanson, W. E. Newell, R. A. Wickstrom, and J. R. Davis, The resonant gate transistor, IEEE Transactions on Electron Devices, vol.14, issue.3, pp.117-133, 1967.
DOI : 10.1109/T-ED.1967.15912

R. T. Howe and R. S. Muller, Resonant-microbridge vapor sensor, IEEE Transactions on Electron Devices, vol.33, issue.4, pp.499-506, 1986.
DOI : 10.1109/T-ED.1986.22519

M. De and . Labachelerie, Techniques de fabrication des microsystèmes 1", traité EGEM

J. K. Bhardwaj and H. Ashraf, Advanced silicon etching using high?density plasmas, Proc. SPIE, pp.224-233, 1995.
DOI : 10.1117/12.221279

J. Li, Q. X. Zhang, and A. Q. Liu, Advanced fiber optical switches using deep RIE (DRIE) fabrication, Sensors and Actuators A: Physical, vol.102, issue.3, pp.286-295, 2003.
DOI : 10.1016/S0924-4247(02)00401-6

G. Perregaux, S. Gonseth, P. Debergh, J. P. Thiebaud, and H. Vuilliomenet, Arrays of addressable high-speed optical microshutters, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090), pp.232-235, 2001.
DOI : 10.1109/MEMSYS.2001.906521

H. Andersson, W. Van-der-wijngaart, P. Griss, F. Niklaus, and G. Stemme, Hydrophobic valves of plasma deposited octafluorocyclobutane in DRIE channels, Sensors and Actuators B: Chemical, vol.75, issue.1-2, pp.136-141, 2001.
DOI : 10.1016/S0925-4005(00)00675-4

J. Aebersold, K. Walsh, M. Crain, M. Voor, M. Martin et al., Design, modeling, fabrication and testing of a MEMS capacitive bending strain sensor, Journal of Physics: Conference Series, vol.34, pp.124-129, 2006.
DOI : 10.1088/1742-6596/34/1/021

J. Jang and S. T. Wereley, Gaseous slip flow analysis of a micromachined flow sensor for ultra small flow applications, Journal of Micromechanics and Microengineering, vol.17, issue.2, pp.229-237, 2007.
DOI : 10.1088/0960-1317/17/2/007

C. Keller and M. Ferrari, Milli?scale polysilicon structures", Solid?State Sensor and Actuator Workshop Technical Digest, pp.132-137, 1994.

S. , W. Mcculley, and G. T. Kovacs, Silicon fusion bonding and deep reactive ion etching; a new technology for microstructures, Proc. Int. Solid?State Sensors and Actuators Conf, pp.556-559, 1995.

C. G. Keller, Microfabricated silicon high aspect ratio flexures for in?plane motion, 1998.

C. G. Keller and R. T. Howe, Hexsil tweezers for teleoperated micro-assembly, Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots, pp.72-77, 1997.
DOI : 10.1109/MEMSYS.1997.581771

P. Bley, W. Bacher, W. Menz, and J. Mohr, Description of microstructures in LIGA-technology, Microelectronic Engineering, vol.13, issue.1-4, pp.509-512, 1991.
DOI : 10.1016/0167-9317(91)90143-2

W. Bernède and . Daniau, Microgrippers fabricated by the LIGA technique, Sensors and Actuators A : Physical, vol.58, issue.3, pp.265-272, 1997.

W. Qu, C. Wenzel, and G. Gerlach, Fabrication of a 3D differential-capacitive acceleration sensor by UV-LIGA, Sensors and Actuators A: Physical, vol.77, issue.1, pp.14-20, 1999.
DOI : 10.1016/S0924-4247(98)00377-X

H. Bauer, W. Ehrfeld, M. Harder, T. Paatzsch, M. Popp et al., Polymer waveguide devices with passive pigtailing: an application of LIGA technology, Synthetic Metals, vol.115, issue.1-3, pp.13-20, 2000.
DOI : 10.1016/S0379-6779(00)00293-9

H. Guckel, K. J. Skrobis, T. R. Christenson, J. Klein, S. Han et al., Fabrication and testing of the planar magnetic micromotor, Journal of Micromechanics and Microengineering, vol.1, issue.3, pp.135-138, 1991.
DOI : 10.1088/0960-1317/1/3/001

S. and C. Theurigen, Microactuators as driving units for microrobotic systems, SPIE Proc, vol.2906, pp.202-210, 1996.

T. R. Ohnstein, J. D. Zook, and J. B. Starr, Micromechanical stepper motor, p.542, 1999.

E. Tabat and H. Guckel, Single coil bistable, bidirectional micromechanical actuator, p.385, 1998.

C. G. Khan and . Malek, SU8 resist for low-cost X-ray patterning of high-resolution, high-aspect-ratio MEMS, Microelectronics Journal, vol.33, issue.1-2, pp.101-105, 2002.
DOI : 10.1016/S0026-2692(01)00109-4

V. Seidemann, J. Edler, S. Buttgenbach, and H. Stolting, Linear variable reluctance (VR) micro motor with horizontal flux guidance: concept, simulation, fabrication and test, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), pp.1415-1418, 2003.
DOI : 10.1109/SENSOR.2003.1217040

S. Tuomikoski and S. Franssila, Free-standing SU-8 microfluidic chips by adhesive bonding and release etching, Sensors and Actuators A: Physical, vol.120, issue.2, pp.408-415, 2005.
DOI : 10.1016/j.sna.2005.01.012

J. C. Ribeiro, G. Minas, P. Turmezei, R. F. Wolffenbuttel, and J. H. Correia, A SU-8 fluidic microsystem for biological fluids analysis, Sensors and Actuators A: Physical, vol.123, issue.124, pp.77-81, 2005.
DOI : 10.1016/j.sna.2005.03.032

G. C. Hill, R. Melamud, F. E. Declercq, A. A. Davenport, I. H. Chan et al., SU-8 MEMS Fabry-Perot pressure sensor, Sensors and Actuators A: Physical, vol.138, issue.1, pp.52-62, 2007.
DOI : 10.1016/j.sna.2007.04.047

R. C. Birch, J. D. Young, and . Richardson, A novel high?accuracy microstereolithography method employing an adaptive electro?optic mask, Journal of Materials Processing Technology, vol.107, issue.1?3, pp.167-172, 2000.

T. Nakamoto, K. Yamaguchi, P. A. Abraha, and K. Mishima, Manufacturing of three-dimensional micro-parts by UV laser induced polymerization, Journal of Micromechanics and Microengineering, vol.6, issue.2, pp.240-253, 1996.
DOI : 10.1088/0960-1317/6/2/006

V. Loubere, S. Monneret-et-s, and . Corbel, Microstéréolithographie utilisant un écran générateur de masques, Revue Internationale de CFAO et d'Informatique Graphique, pp.31-43, 1998.

S. L. Jacesko, T. Ji, J. K. Abraham, V. K. Varadan, and J. W. Gardner, Design of a microfluidic cell using microstereolithography for electronic tongue applications, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, pp.147-153, 2003.
DOI : 10.1117/12.497446

M. Lahti and V. Lantto, Passive RF band-pass filters in an LTCC module made by fine-line thick-film pastes, Journal of the European Ceramic Society, vol.21, issue.10-11, 1997.
DOI : 10.1016/S0955-2219(01)00159-5

S. , R. Mauczok, S. Gruhlke, and C. Martiny, Material properties and RF applications of high k and ferrite LTCC ceramics, Microelectronics and Reliability, vol.46, issue.1, pp.134-143, 2006.

M. Gongora?rubio, L. M. Solá?laguna, P. J. Moffett, and J. J. Santiago?avilés, The utilization of low temperature co-fired ceramics (LTCC-ML) technology for meso-scale EMS, a simple thermistor based flow sensor, Sensors and Actuators A: Physical, vol.73, issue.3, pp.215-221, 1999.
DOI : 10.1016/S0924-4247(98)00238-6

G. Stecher, Free supporting structures in thick film technology : a substrate integrated sensor, Proc. 8th European Microelectronics Conf, pp.421-427, 1987.

C. B. Sippola and C. H. Ahn, A thick film screen-printed ceramic capacitive pressure microsensor for high temperature applications, Journal of Micromechanics and Microengineering, vol.16, issue.5, pp.1086-1091, 2006.
DOI : 10.1088/0960-1317/16/5/030

H. Birol, T. Maeder, and P. Ryser, Processing of graphite-based sacrificial layer for microfabrication of low temperature co-fired ceramics (LTCC), Sensors and Actuators A: Physical, vol.130, issue.131, pp.560-567, 2006.
DOI : 10.1016/j.sna.2005.12.009

F. Menil, H. Debeda, and C. Lucat, Screen-printed thick-films: From materials to functional devices, Journal of the European Ceramic Society, vol.25, issue.12, pp.2105-2113, 2005.
DOI : 10.1016/j.jeurceramsoc.2005.03.017
URL : https://hal.archives-ouvertes.fr/hal-00203787

M. Prudenziati, Thick film sensors", Handbook of sensors and actuators 1

S. Gouverneur, C. Lucat, F. Menil, and J. L. Aucouturier, New densification process of thick films, IEEE Transactions on Components, Hybrids, and Manufacturing Technology, vol.16, issue.5, pp.505-510, 1993.
DOI : 10.1109/33.239879
URL : https://hal.archives-ouvertes.fr/hal-00196231

J. Rocks, G. A. George, and F. Vohwinkel, Curing kinetics and thermomechanical behaviour of co-anhydride cured aminoglycidyl epoxy resins, Polymer International, vol.22, issue.11, pp.1758-1766, 2003.
DOI : 10.1002/pi.1286

G. Wulfsberg, Chimie inorganique : théories et applications, Dunod, 2002.

M. I. Zaki, G. A. Hussien, and R. B. Fahim, A thermogravimetric study of the solid-state reaction between alumina and strontium carbonate, Journal of Thermal Analysis, vol.19, issue.1, pp.129-134, 1985.
DOI : 10.1007/BF02128122

B. V. Vov, Mechanism of thermal decomposition of alkaline-earth carbonates, Thermochimica Acta, vol.303, issue.2, pp.161-170, 1997.
DOI : 10.1016/S0040-6031(97)00261-X

E. P. Hyatt, I. B. Cutler, and M. E. Wardsworth, Calcium Carbonate Decomposition in Carbon Dioxide Atmosphere, Journal of the American Ceramic Society, vol.384, issue.5, pp.70-74, 1958.
DOI : 10.1039/tf9383400951

A. Michel and J. Benard, Chimie minérale, 1964.

M. Hoffmann, P. Kopka, and E. Voges, Bistable micromechanical fiber-optic switches on silicon with thermal actuators, Sensors and Actuators A: Physical, vol.78, issue.1, pp.28-35, 1999.
DOI : 10.1016/S0924-4247(99)00200-9

W. Benecke and W. Riethmuller, Applications of silicon microactuators based on bimorph structures, IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots', p.116, 1989.
DOI : 10.1109/MEMSYS.1989.77974

M. Ataka, A. Omodaka, N. Takeshima, and H. Fujita, Fabrication and operation of polyimide bimorph actuators for a ciliary motion system, Journal of Microelectromechanical Systems, vol.2, issue.4, pp.146-150, 1993.
DOI : 10.1109/84.273089

W. ?. Chu and M. Mehregany, Microfabricated tweezers with a large griping force and a large range of motion, Proceedings of the Solid?State Sensors and Actuators Workshop, pp.100-107, 1994.

X. Sun, X. Gu, and W. N. Carr, Lateral in?plane displacement microactuators with combined thermal and electrostatic drive, Proceedings of the Solid?State Sensors and Actuators Workshop, pp.152-155, 1996.

J. Abadie, N. Chaillet, and C. Lexcellent, An integrated shape memory alloy micro-actuator controlled by thermoelectric effect, Sensors and Actuators A: Physical, vol.99, issue.3, pp.297-303, 2002.
DOI : 10.1016/S0924-4247(01)00832-9
URL : https://hal.archives-ouvertes.fr/hal-00014167

H. Takao, K. Miyamura, H. Ebi, M. Ashiki, K. Sawada et al., A MEMS microvalve with PDMS diaphragm and two-chamber configuration of thermo-pneumatic actuator for integrated blood test system on silicon, Sensors and Actuators A : Physical
DOI : 10.1016/j.sna.2004.10.023

H. Guckel, J. Klein, T. Christenson, K. Skrobis, M. Laudon et al., Thermo-magnetic metal flexure actuators, Technical Digest IEEE Solid-State Sensor and Actuator Workshop, pp.73-75, 1992.
DOI : 10.1109/SOLSEN.1992.228273

J. Comtois and V. Bright, Applications for surface-micromachined polysilicon thermal actuators and arrays, Sensors and Actuators A: Physical, vol.58, issue.1, pp.19-25, 1997.
DOI : 10.1016/S0924-4247(97)80220-8

D. Ruff and R. J. Wilks, In?plane tip deflection and force achieved with asymmetrical polysilicon electrothermal microactuators, Thin Solid Films, vol.377, issue.378, pp.719-726, 2000.

T. Moulton and G. K. Ananthasuresh, Micromechanical devices with embedded electro-thermal-compliant actuation, Sensors and Actuators A: Physical, vol.90, issue.1-2, pp.38-48, 2001.
DOI : 10.1016/S0924-4247(00)00563-X

R. W. Johnstone and M. Parameswaran, Deflection response of electro-thermal actuators to voltage and power, Canadian Conference on Electrical and Computer Engineering, 2005., pp.478-481, 2005.
DOI : 10.1109/CCECE.2005.1556974

D. M. Burns and V. M. Bright, Design and performance of a double hot arm polysilicon thermal actuator, Micromachined Devices and Components III, pp.296-306, 1997.
DOI : 10.1117/12.284528

D. Yan, A. Khajepour, and R. Mansour, Modeling of two-hot-arm horizontal thermal actuator, Journal of Micromechanics and Microengineering, vol.13, issue.2, pp.312-322, 2003.
DOI : 10.1088/0960-1317/13/2/321

J. C. Chiou and W. T. Lin, Variable optical attenuator using a thermal actuator array with dual shutters, Optics Communications, vol.237, issue.4-6, pp.341-350, 2004.
DOI : 10.1016/j.optcom.2004.04.014

H. Cai, X. M. Zhang, C. Lu, A. Q. Liu, and E. H. Khoo, Linear MEMS variable optical attenuator using reflective elliptical mirror, IEEE Photonics Technology Letters, vol.17, issue.2, pp.402-404, 2005.
DOI : 10.1109/LPT.2004.840056

L. A. Field, D. L. Burriesci, P. R. Robrisch, and R. C. Ruby, Micromachined 1 ?? 2 optical-fiber switch, Sensors and Actuators A: Physical, vol.53, issue.1-3, pp.311-315, 1996.
DOI : 10.1016/0924-4247(96)80154-3

E. T. Enikov and K. Lazarov, PCB-integrated metallic thermal micro-actuators, Sensors and Actuators A: Physical, vol.105, issue.1, pp.76-82, 2003.
DOI : 10.1016/S0924-4247(03)00065-7

J. K. Luo, J. H. He, A. J. Flewitt, D. F. Moore, S. M. Spearing et al., Development of all metal electro?thermal actuator and its applications, Proc. SPIE, pp.201-210, 2004.

Q. ?. Huang and N. K. Lee, Analysis and design of polysilicon thermal flexure actuator, Journal of Micromechanics and Microengineering, vol.9, issue.1, pp.64-70, 1999.
DOI : 10.1088/0960-1317/9/1/308

L. Lin and M. Chiao, Electrothermal responses of lineshape microstructures, Sensors and Actuators A: Physical, vol.55, issue.1, pp.35-41, 1996.
DOI : 10.1016/S0924-4247(96)01247-2

G. Fournet, Physique électronique des solides, 1962.

S. Muratet, Conception, caractérisation et modélisation : Fiabilité prédictive de MEMS à actionnement électrothermique, Thèse de doctorat de l'INSA Toulouse, 2005.

M. Ashauer, J. Ende, H. Glosh, H. Haffner, and K. Hiltmann, Thermal characterization of microsystems by means of high-resolution thermography, Microelectronics Journal, vol.28, issue.3, pp.327-335, 1997.
DOI : 10.1016/S0026-2692(96)00036-5

F. P. Incropera and D. P. Dewitt, Fundamentals of heat and mass transfer, 1981.

J. R. Reid, V. M. Bright, and J. H. Comtois, Force measurements of polysilicon thermal microactuators, Proc. SPIE, pp.296-306, 1996.

E. S. Kolesar, P. B. Allen, J. T. Howard, J. M. Wilken, and N. Boydston, Thermally-actuated cantilever beam for achieving large in-plane mechanical deflections, Thin Solid Films, vol.355, issue.356, pp.295-302, 1999.
DOI : 10.1016/S0040-6090(99)00493-9

Q. Huang and N. K. Lee, A simple approach to characterizing the driving force of polysilicon laterally driven thermal microactuators, Sensors and Actuators A: Physical, vol.80, issue.3, pp.48-58, 2003.
DOI : 10.1016/S0924-4247(99)00252-6

M. Chiao and L. Lin, Self-buckling of micromachined beams under resistive heating, Journal of Microelectromechanical Systems, vol.9, issue.1, pp.146-151, 2000.
DOI : 10.1109/84.825789

L. Lin and S. Lin, Vertically driven microactuators by electrothermal buckling effects, Sensors and Actuators A: Physical, vol.71, issue.1-2, pp.35-39, 1998.
DOI : 10.1016/S0924-4247(98)00167-8

M. Mccarthy, N. Tiliakos, V. Modia, and L. G. Fréchette, Thermal buckling of eccentric microfabricated nickel beams as temperature regulated nonlinear actuators for flow control, Sensors and Actuators A: Physical, vol.134, issue.1, pp.37-46, 2007.
DOI : 10.1016/j.sna.2006.05.027

W. Chen, C. Chu, J. Hsieh, and W. Fang, A reliable single-layer out-of-plane micromachined thermal actuator, Sensors and actuators A : Physical, pp.48-58, 2003.
DOI : 10.1016/S0924-4247(02)00315-1

M. A. Gajda and H. Ahmed, Applications of thermal silicon sensors on membranes, Sensors and Actuators A: Physical, vol.49, issue.1-2, pp.1-9, 1995.
DOI : 10.1016/0924-4247(96)80025-2

D. Briand, P. Q. Pham, and N. F. De-rooij, Reliability of freestanding polysilicon microheaters to be used as igniters in solid propellant microthrusters, Sensors and Actuators A 135, pp.329-336, 2007.
DOI : 10.1016/j.sna.2006.07.023

O. Grudin, R. Marinescu, L. M. Landsberger, M. Kahrizi, G. Frolov et al., High-temperature gas sensor using perovskite thin films on a suspended microheater, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol.20, issue.3, pp.1100-1104, 2002.
DOI : 10.1116/1.1463072

N. T. Nguyen and R. Kiehnscherf, Low-cost silicon sensors for mass flow measurement of liquids and gases, Sensors and Actuators A: Physical, vol.49, issue.1-2, pp.17-20, 1995.
DOI : 10.1016/0924-4247(95)01016-T

C. Rossi, P. Temple?boyer, and D. Esteve, Realization and performance of thin SiO2/SiNx membrane for microheater applications, Sensors and Actuators A: Physical, vol.64, issue.3, pp.241-245, 1998.
DOI : 10.1016/S0924-4247(97)01627-0

F. Mailly, A. Giani, A. Martinez, R. Bonnot, P. Temple?boyer et al., Micromachined thermal accelerometer, Sensors and Actuators A: Physical, vol.103, issue.3, pp.359-363, 2003.
DOI : 10.1016/S0924-4247(02)00428-4
URL : https://hal.archives-ouvertes.fr/hal-00327192

G. Wiche, A. Berns, H. Steffes, and E. Obermeier, Thermal analysis of silicon carbide based micro hotplates for metal oxide gas sensors, Sensors and Actuators A: Physical, vol.123, issue.124, pp.123-12412, 2005.
DOI : 10.1016/j.sna.2005.03.028

F. Dimeo-jr, . I?s, P. Chen, J. Chen, A. Neuner et al., MEMS-based hydrogen gas sensors, Sensors and Actuators B: Chemical, vol.117, issue.1, pp.10-16, 2006.
DOI : 10.1016/j.snb.2005.05.007

C. Tsamis, A. G. Nassiopoulou, and A. Tserepi, Thermal properties of suspended porous silicon micro-hotplates for sensor applications, Sensors and Actuators B: Chemical, vol.95, issue.1-3, pp.78-82, 2003.
DOI : 10.1016/S0925-4005(03)00409-X

M. Kimuraa, F. Sakuraib, H. Ohtab, and T. Teradab, Proposal of a new structural thermal vacuum sensor with diode-thermistors combined with a micro-air-bridge heater, Microelectronics Journal, vol.38, issue.2, pp.171-176, 2007.
DOI : 10.1016/j.mejo.2006.09.018

M. , V. Guarnieri, S. Brida, B. Margesin, F. Giacomozzi et al., Low?power thick?film gas sensor obtained by a combination of screen printing and micromachining techniques, Thin Solid Films, vol.391, pp.288-292, 2001.

C. Huh, J. Kim, and M. H. Kim, Flow pattern transition instability during flow boiling in a single microchannel, International Journal of Heat and Mass Transfer, vol.50, issue.5-6, pp.1049-1060, 2007.
DOI : 10.1016/j.ijheatmasstransfer.2006.07.027

R. Zhu, H. Ding, Y. Sub, and Z. Zhou, Micromachined gas inertial sensor based on convection heat transfer, Sensors and Actuators A: Physical, vol.130, issue.131, pp.130-131, 2006.
DOI : 10.1016/j.sna.2005.11.022

P. Tardy, J. R. Coulon, C. Lucat, and F. Ménil, Dynamic thermal conductivity sensor for gas detection, Sensors and Actuators B: Chemical, vol.98, issue.1, pp.63-68, 2004.
DOI : 10.1016/j.snb.2003.09.019

H. Debeda, Dispositifs multi?capteurs sélectifs au méthane, réalisés en technologie microélectronique hybride couches épaisses, Thèse de l'université Bordeaux 1, 1996.

F. Menil, C. Lucat, and H. Debeda, The thick-film route to selective gas sensors, Sensors and Actuators B: Chemical, vol.25, issue.1-3, pp.415-420, 1995.
DOI : 10.1016/0925-4005(95)85094-5
URL : https://hal.archives-ouvertes.fr/hal-00203789

J. Lii, W. Hsu, S. P. Lee, and S. K. Sia, Kirk?Othmer Encyclopedia of Chemical Technology, pp.959-980, 2006.

A. Manz, J. Miyahara, J. Miura, Y. Watanabe, H. Miyagi et al., Design of an open-tubular column liquid chromatograph using silicon chip technology, Sensors and Actuators B: Chemical, vol.1, issue.1-6, p.249, 1990.
DOI : 10.1016/0925-4005(90)80210-Q

K. B. Lee and L. Lin, Surface micromachined glass and polysilicon microchannels using MUMPs for BioMEMS applications, Sensors and Actuators A: Physical, vol.111, issue.1, pp.44-50, 2004.
DOI : 10.1016/j.sna.2003.10.027

W. Qu, G. M. Mala, and D. Li, Heat transfer for water flow in trapezoidal silicon microchannels, International Journal of Heat and Mass Transfer, vol.43, issue.21, pp.3925-3936, 2000.
DOI : 10.1016/S0017-9310(00)00045-4

M. Kadowaki, H. Yoshizawa, S. Mori, and M. Suzuki, Plasma CVD on the inner surface of a microchannel, Thin Solid Films, vol.506, issue.507, pp.123-127, 2006.
DOI : 10.1016/j.tsf.2005.08.131

J. Li and G. P. Peterson, Boiling nucleation and two-phase flow patterns in forced liquid flow in microchannels, International Journal of Heat and Mass Transfer, vol.48, issue.23-24, pp.4797-4810, 2005.
DOI : 10.1016/j.ijheatmasstransfer.2005.05.029

J. Y. Kim, J. Y. Baek, K. A. Lee, and S. H. Lee, Automatic aligning and bonding system of PDMS layer for the fabrication of 3D microfluidic channels, Sensors and Actuators A: Physical, vol.119, issue.2, pp.593-598, 2005.
DOI : 10.1016/j.sna.2004.09.023

T. Fujii, PDMS-based microfluidic devices for biomedical applications, Microelectronic Engineering, vol.61, issue.62, pp.61-62907, 2002.
DOI : 10.1016/S0167-9317(02)00494-X

Z. Yang, H. Goto, M. Matsumoto, and R. Maeda, Active micromixer for microfluidic systems using lead-zirconate-titanate(PZT)-generated ultrasonic vibration, Electrophoresis, vol.6, issue.1, pp.116-119, 2000.
DOI : 10.1002/(SICI)1522-2683(20000101)21:1<116::AID-ELPS116>3.0.CO;2-Y

L. Jang, S. Chao, M. R. Holl, and D. R. Meldrum, Microfluidic circulatory flows induced by resonant vibration of diaphragms, Sensors and Actuators A: Physical, vol.122, issue.1, pp.141-148, 2005.
DOI : 10.1016/j.sna.2005.03.070

B. Jaffe, W. R. Cook-jr, H. Et, and . Jaffe, Piezoelectric Ceramics, Journal of the American Ceramic Society, vol.36, issue.11, 1971.
DOI : 10.1143/JPSJ.7.333

C. ?. Jeon, J. Park, S. Lee, and C. Moon, Fabrication and characteristics of out-of-plane piezoelectric micro grippers using MEMS processes, Thin Solid Films, vol.515, issue.12, pp.4901-4904, 2007.
DOI : 10.1016/j.tsf.2006.10.062

S. Kim, C. Kang, J. Choi, D. Kim, M. Sung et al., Properties of piezoelectric actuator on silicon membrane, prepared by screen printing method, Materials Chemistry and Physics, vol.90, issue.2-3, pp.401-404, 2005.
DOI : 10.1016/j.matchemphys.2004.09.038

M. Deshpande and L. Saggere, PZT thin films for low voltage actuation: Fabrication and characterization of the transverse piezoelectric coefficient, Sensors and Actuators A: Physical, vol.135, issue.2, pp.690-699, 2007.
DOI : 10.1016/j.sna.2006.07.022

R. J. Wood, E. Steltz, and R. S. Fearing, Optimal energy density piezoelectric bending actuators, Sensors and Actuators A: Physical, vol.119, issue.2, pp.476-488, 2005.
DOI : 10.1016/j.sna.2004.10.024

L. Jang, S. Chao, M. R. Holl-et-d, and . Meldrum, Microfluidic circulatory flows induced by resonant vibration of diaphragms, Sensors and Actuators A: Physical, vol.122, issue.1, pp.141-148, 2005.
DOI : 10.1016/j.sna.2005.03.070

M. Koch, N. Harris, R. Maas, A. G. Evan, N. M. White et al., A novel micropump design with thick-film piezoelectric actuation, Measurement Science and Technology, vol.8, issue.1, pp.49-57, 1997.
DOI : 10.1088/0957-0233/8/1/008

A. Cranny, P. H. Chappell, S. P. Beeby, and N. M. White, Improving the functionality of a prosthetic hand through the use of thick film force sensors, Proceedings of EuroSensors University of Minho, pp.795-798, 2003.

S. P. Beeby, N. Ross, and N. M. White, Thick film PZT/micromachined silicon accelerometer, Electronic letters, pp.2060-2062, 1999.
DOI : 10.1049/el:19991398

S. P. Beeby, N. J. Grabham, and N. M. White, Microprocessor implemented self-validation of thick-film PZT/silicon accelerometer, Sensors and Actuators A: Physical, vol.92, issue.1-3, pp.168-174, 2001.
DOI : 10.1016/S0924-4247(01)00559-3

V. Ferrari, D. Marioli, A. Taroni, and E. Ranucci, Multisensor array of mass microbalances for chemical detection based on resonant piezo-layers of screen-printed PZT, Sensors and Actuators B: Chemical, vol.68, issue.1-3, pp.81-87, 2000.
DOI : 10.1016/S0925-4005(00)00465-2

G. Meng, A. J. Jaworski, and N. M. White, Composition measurements of crude oil and process water emulsions using thick-film ultrasonic transducers, Chemical Engineering and Processing: Process Intensification, vol.45, issue.5, pp.383-391, 2006.
DOI : 10.1016/j.cep.2005.10.004

Z. Wang, W. Zhu, J. Miao, H. Zhu, C. Chao et al., Micromachined thick film piezoelectric ultrasonic transducer array, Sensors and Actuators A: Physical, vol.130, issue.131, pp.485-490, 2006.
DOI : 10.1016/j.sna.2005.10.054

J. Yang and L. Jianbin, Processing and thickness effects on the microstructure and electrical properties of sol???gel deposited Pb(Zr, Ti)O3 films, Sensors and Actuators A: Physical, vol.121, issue.1, pp.103-112, 2005.
DOI : 10.1016/j.sna.2004.12.009

S. Gebhardt, L. Seffner, F. Schlenkrich, and A. Schönecker, PZT thick films for sensor and actuator applications, Journal of the European Ceramic Society, vol.27, issue.13-15, pp.4177-4180, 2007.
DOI : 10.1016/j.jeurceramsoc.2007.02.122

Z. Wang, J. Miao, and W. Zhu, Piezoelectric thick films and their application in MEMS, Journal of the European Ceramic Society, vol.27, issue.13-15, pp.3759-3764, 2007.
DOI : 10.1016/j.jeurceramsoc.2007.02.067

J. Xie, M. Hu, S. Ling, and H. Du, Fabrication and characterization of piezoelectric cantilever for micro transducers, Sensors and Actuators A: Physical, vol.126, issue.1, pp.182-186, 2006.
DOI : 10.1016/j.sna.2005.09.019

S. P. Beeby, N. Ross, and N. M. White, Thick film PZT/micromachined silicon accelerometer, Electronics Letters, vol.35, issue.23, pp.2060-2062, 1999.
DOI : 10.1049/el:19991398

T. Yan, B. E. Jones, R. T. Rakowski, M. J. Tudor, S. P. Beeby et al., Thick-film PZT-metallic triple beam resonator, Electronics Letters, vol.39, issue.13, pp.982-983, 2003.
DOI : 10.1049/el:20030611

A. Cranny, D. P. Cotton, P. H. Chappell, S. P. Beeby, and N. M. White, Thick-film force and slip sensors for a prosthetic hand, Sensors and Actuators A: Physical, vol.123, issue.124, pp.162-171, 2005.
DOI : 10.1016/j.sna.2005.02.015

N. R. Harris, M. Hill, R. Torah, R. Townsend, S. Beeby et al., A multilayer thick-film PZT actuator for MEMs applications, Sensors and Actuators A: Physical, vol.132, issue.1, pp.311-316, 2006.
DOI : 10.1016/j.sna.2006.06.006

P. Beeby, A. Blackburn, and N. M. White, Silicon micromachining processes combined with thick-film printed lead zirconate titanate actuators for microelectromechanical systems, Materials Letters, vol.40, issue.4, pp.187-191, 1999.
DOI : 10.1016/S0167-577X(99)00073-7

L. Simon, Elaboration et caractérisation de films épais piézoélectriques sérigraphiés sur alumine, silicium, aciers inoxydables et vitrocéramiques, Thèse de l'INSA Lyon, 2002.

P. Ginet, C. Lucat, M. Budinger, and F. , New screen?printing thermal microactuator Ménil, article à paraître dans la revue IEEE Review on Advances in Micro, Nano, and Molecular Systems "Modelling and characterization of screen?printed metallic electrothermal microactuators

C. Ginet and F. Lucat, Modelling and Characterizing a Screen-Printed Metallic Electrothermal Microactuator, International Journal of Applied Ceramic Technology, vol.28, issue.5, pp.423-427, 2007.
DOI : 10.1111/j.1744-7402.2007.02162.x

C. Lucat, P. Ginet, and F. , New Sacrificial Layer-Based Screen-Printing Process for Free-Standing Thick-Films Applied to MEMS, Journal of Microelectronics and Electronic Packaging, vol.4, issue.3, pp.86-92, 2007.
DOI : 10.4071/1551-4897-4.3.86
URL : https://hal.archives-ouvertes.fr/hal-00164393

C. Lucat, P. Ginet, and F. , Vers de nouveaux microsystèmes utilisant des couches épaisses libérées, Conférences invitées 16 ème forum de l'Interconnexion et du Packaging Microélectronique, 2006.

C. Lucat and P. Ginet, New thick?film process for free?standing layers applied to Microsystems, Journées IBERNAMCMC2, 2006.
URL : https://hal.archives-ouvertes.fr/hal-00164399

P. Ginet, C. Lucat, M. Budinger, and F. , New screen?printing thermal microactuator, Proc. 2 nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2007.
DOI : 10.1109/nems.2007.352206

C. Ginet and F. Lucat, 17 ème forum de l'Interconnexion et du Packaging Microélectronique, IMAPS/Interconex, 2007.

C. Brevets, P. Lucat, F. Ginet, . Ménil, and F. Debéda, Préparation de microcomposants multicouches par la méthode de la couche épaisse sacrificielle Brevet WO07077397 CNRS Patent, en cours d'internationalisation "Procédé de mesure d'une épaisseur seuil de couche de matériau purement résistif, dispositif de mise en oeuvre, et utilisation d