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Conception et élaboration de microstructures en technologie hybride couche épaisse pour des applications MEMS

Abstract : partially released from the substrate where they are deposited. A new process, combining screenprinting technology and sacrificial layer principle, has been developed in our laboratory for the fabrication of free-standing thick-films. In order to fulfil the mechanical requirements of the structural layers during the deposition and the firing of released gold layers, an epoxy/strontium carbonate composition has been chosen as a sacrificial layer. The latter is then dissolved in an acidic solution at the end of the process. For the first time, this new process has been used for the fabrication of copper and silver electrothermal actuators. Screen-printed on an alumina substrate, these Microsystems consist of two linked beams of different widths partially suspended above the substrate where they are anchored. SEM and Castaing microprobe analyses have demonstrated the harmlessness of the process with regard to the metallic layer. The deflection and the temperature profile of the actuators have been measured respectively by optical microscopy and infrared thermography. The good correlations between these results and those obtained with analytical and finite element simulations demonstrate the feasibility of actuators with this new process. Other developments of the thick sacrificial layer process include the fabrication of silver-platinum heating resistors, glass and metallic microchannels and free-standing piezoelectric components. These preliminary results demonstrate the efficiency of this simple, collective and low cost process for implementation of devices of 1µm < thickness < 500µm, surface > 100µm×100µm. Complementary to silicon, LTCC or Ink jet technologies, it is clear that this original method opens new routes of investigations for MEMS.
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  • HAL Id : tel-00399523, version 1

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Patrick Ginet. Conception et élaboration de microstructures en technologie hybride couche épaisse pour des applications MEMS. Micro et nanotechnologies/Microélectronique. Université Sciences et Technologies - Bordeaux I, 2007. Français. ⟨tel-00399523⟩

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