C. Vieu, F. Carcenac, A. Pépin, Y. Chen, and H. , Electron beam lithography: resolution limits and applications, Applied Surface Science, vol.164, issue.1-4, p.111, 2000.
DOI : 10.1016/S0169-4332(00)00352-4

Y. Xia, J. A. Rogers, K. E. Paul, and G. M. , Unconventional Methods for Fabricating and Patterning Nanostructures, Chemical Reviews, vol.99, issue.7, p.1823, 1999.
DOI : 10.1021/cr980002q

Y. Xia and G. M. , Soft Lithography, Angewandte Chemie International Edition, vol.37, issue.5, p.550, 1998.
DOI : 10.1002/(SICI)1521-3773(19980316)37:5<550::AID-ANIE550>3.0.CO;2-G

Y. Xia and G. M. , SOFT LITHOGRAPHY, Annual Review of Materials Science, vol.28, issue.1, p.153, 1998.
DOI : 10.1146/annurev.matsci.28.1.153

B. D. Gates, G. Xu, M. Steawart, and G. M. , New Approaches to Nanofabrication:?? Molding, Printing, and Other Techniques, Chemical Reviews, vol.105, issue.4, pp.1171-1196, 2005.
DOI : 10.1021/cr030076o

A. Kumar, H. A. Biebuyck, and G. M. , Patterning Self-Assembled Monolayers: Applications in Materials Science, Langmuir, vol.10, issue.5, p.1498, 1994.
DOI : 10.1021/la00017a030

Y. Xia and G. M. , Extending Microcontact Printing as a Microlithographic Technique, Langmuir, vol.13, issue.7, p.2059, 1997.
DOI : 10.1021/la960936e

R. S. Kane, S. Takayama, E. Ostuni, D. E. Ingber, and G. M. , Patterning proteins and cells using soft lithography, Biomaterials, vol.20, issue.23-24, p.2363, 1999.
DOI : 10.1016/S0142-9612(99)00165-9

C. Thibault and C. , Microtransfer molding of hydrophobic dendrimer, Microelectronic Engineering, vol.83, issue.4-9, p.1513, 2006.
DOI : 10.1016/j.mee.2006.01.213

N. Tomczak and G. J. , Microcontact printed poly(amidoamine) dendrimer monolayers on silicon oxide surface, European Polymer Journal, vol.43, issue.5, p.1595, 2007.
DOI : 10.1016/j.eurpolymj.2007.02.027

Y. Xia, M. Mrksich, E. Kim, and G. M. Whitesides, Microcontact Printing of Octadecylsiloxane on the Surface of Silicon Dioxide and Its Application in Microfabrication, Journal of the American Chemical Society, vol.117, issue.37, p.9576, 1995.
DOI : 10.1021/ja00142a031

B. D. Gates and G. M. Whitesides, Replication of Vertical Features Smaller than 2 nm by Soft Lithography, Journal of the American Chemical Society, vol.125, issue.49, p.14986, 2003.
DOI : 10.1021/ja0367647

J. P. Renault, A. Bernard, A. Bietsch, and B. Michel, Fabricating Arrays of Single Protein Molecules on Glass Using Microcontact Printing, The Journal of Physical Chemistry B, vol.107, issue.3, p.703, 2003.
DOI : 10.1021/jp0263424

J. L. Wilbur, A. Kumar, E. Kim, and G. M. , Microfabrication by microcontact printing of self-assembled monolayers, Advanced Materials, vol.264, issue.2, p.600, 1994.
DOI : 10.1002/adma.19940060719

D. Burdinski and M. , Saalmink angewandte chemie Int, pp.4355-4358, 2006.

E. L. Kyser, L. F. Collins, N. Herbert, and J. Appl, Photographic Engi, pp.73-79, 1981.

J. M. Jaklevic, H. R. Garner, and G. A. , Instrumentation for the Genome Project, Annual Review of Biomedical Engineering, vol.1, issue.1, p.649, 1999.
DOI : 10.1146/annurev.bioeng.1.1.649

P. Belaubre, M. Guirardel, V. Leberre, and J. Pourciel, Cantilever-based microsystem for contact and non-contact deposition of picoliter biological samples, Sensors and Actuators A: Physical, vol.110, issue.1-3, p.130, 2004.
DOI : 10.1016/j.sna.2003.09.024

M. O. Reese, R. M. Van-dam, A. Scherer, and S. R. Quake-genome-res, I-2: Présentation biopuce, p.827, 2000.

J. D. Watson and F. H. , Genetical Implications of the Structure of Deoxyribonucleic Acid, Nature, vol.9, issue.4361, pp.964-61, 1953.
DOI : 10.1016/0006-3002(53)90232-7

C. Xiang and Y. , cDNA microarray technology and its applications, Biotechnology Advances, vol.18, issue.1, p.35, 2000.
DOI : 10.1016/S0734-9750(99)00035-X

E. F. Nuwaysir, M. Bittner, J. Trent, and J. C. Barrett, Microarrays and toxicology: The advent of toxicogenomics, Molecular Carcinogenesis, vol.85, issue.3, p.153, 1999.
DOI : 10.1002/(SICI)1098-2744(199903)24:3<153::AID-MC1>3.0.CO;2-P

H. Zhu and M. Snyder, Protein arrays and microarrays, Current Opinion in Chemical Biology, vol.5, issue.1, p.40, 2001.
DOI : 10.1016/S1367-5931(00)00170-8

P. E. Buckle, R. J. Davies, T. Kinning, and D. , The resonant mirror: a novel optical sensor for direct sensing of biomolecular interactions part II: applications, Biosensors and Bioelectronics, vol.8, issue.7-8, p.355, 1993.
DOI : 10.1016/0956-5663(93)80074-Y

K. L. Prime and G. M. Whitesides, Adsorption of proteins onto surfaces containing end-attached oligo(ethylene oxide): a model system using self-assembled monolayers, Journal of the American Chemical Society, vol.115, issue.23, p.10714, 1993.
DOI : 10.1021/ja00076a032

R. A. Vijayendran and D. E. Leckband, A Quantitative Assessment of Heterogeneity for Surface-Immobilized Proteins, Analytical Chemistry, vol.73, issue.3, p.471, 2001.
DOI : 10.1021/ac000523p

M. Campas and I. , DNA biochip arraying, detection and amplification strategies, TrAC Trends in Analytical Chemistry, vol.23, issue.1, p.49, 2004.
DOI : 10.1016/S0165-9936(04)00104-9

K. C. Chan, T. Kim, J. K. Shoer, and R. M. Crooks, Polymeric Self-Assembled Monolayers. 3. Pattern Transfer by Use of Photolithography, Electrochemical Methods, and an Ultrathin, Self-Assembled Diacetylenic Resist, Journal of the American Chemical Society, vol.117, issue.21, p.5875, 1995.
DOI : 10.1021/ja00126a037

S. A. Sundberg, R. W. Barrett, M. Pirrung, and A. L. Lu, Spatially-Addressable Immobilization of Macromolecules on Solid Supports, Journal of the American Chemical Society, vol.117, issue.49, p.12050, 1995.
DOI : 10.1021/ja00154a003

K. Takahashii, K. Seio, M. Sekine, and O. , A photochemical/chemical direct method of synthesizing high-performance deoxyribonucleic acid chips for rapid and parallel gene analysis, Sensors and Actuators B: Chemical, vol.83, issue.1-3, p.67, 2002.
DOI : 10.1016/S0925-4005(01)01030-9

J. B. Fan, X. Chen, M. K. Halushka, and A. , Parallel Genotyping of Human SNPs Using Generic High-density Oligonucleotide Tag Arrays, Genome Research, vol.10, issue.6, p.853, 2000.
DOI : 10.1101/gr.10.6.853

W. Fisher and M. , Zhang Automation Sci. and Eng. IEEE trans, 2007.

V. G. Cheung, M. Morley, F. Aguilar, and A. M. Nat, Making and reading microarrays, Nature Genetics, vol.21, p.15, 1999.
DOI : 10.1038/4439

J. Kimura, Y. Kawana, and T. K. Biosensors, 109: http://biopuces.genotoul.fr/spotter, P. O. Brown Science, vol.4, issue.63, pp.41-467, 1989.

C. Heise and F. , Bier Topics in Current Chemistry 261 springer, p.1, 2005.

A. V. Lemmo, J. T. Fisher, H. M. Geysen, and D. , Characterization of an Inkjet Chemical Microdispenser for Combinatorial Library Synthesis, Analytical Chemistry, vol.69, issue.4, p.543, 1997.
DOI : 10.1021/ac960808v

B. Schweitzer, S. Wiltshire, J. Lambert, and S. O. Malley, Immunoassays with rolling circle DNA amplification: A versatile platform for ultrasensitive antigen detection, Proceedings of the National Academy of Sciences, vol.97, issue.18, p.10113, 2000.
DOI : 10.1073/pnas.170237197

U. Maskos and E. M. , Southern Nucleic Acids Res, p.1679, 1992.

K. R. Khrapko, Y. P. Lysov, A. A. Khorlin, and I. B. , A method for DNA sequencing by hybridization with oligonucleotide matrix, DNA Sequence, vol.6, issue.3, p.375, 1991.
DOI : 10.1080/07391102.1989.10507773

P. Arenkov, A. Kukhtin, and A. Gemmell, Protein Microchips: Use for Immunoassay and Enzymatic Reactions, Analytical Biochemistry, vol.278, issue.2, p.123, 2000.
DOI : 10.1006/abio.1999.4363

R. J. Jackman, D. C. Duffy, E. Ostuni, N. D. Wilmore, and G. M. , Fabricating Large Arrays of Microwells with Arbitrary Dimensions and Filling Them Using Discontinuous Dewetting, Analytical Chemistry, vol.70, issue.11, p.2280, 1998.
DOI : 10.1021/ac971295a

K. M. Aung, X. Ho, and X. , DNA assembly on streptavidin modified surface: A study using quartz crystal microbalance with dissipation or resistance measurements, Sensors and Actuators B: Chemical, vol.131, issue.2, p.371, 2008.
DOI : 10.1016/j.snb.2007.11.058

H. Su and M. Thompson, Kinetics of interfacial nucleic acid hybridization studied by acoustic network analysis, Biosensors and Bioelectronics, vol.10, issue.3-4, p.329, 1995.
DOI : 10.1016/0956-5663(95)96851-O

R. Bashir, Advanced Drug Delivery Reviews, p.1565, 2004.

M. Pumera, S. Snahchez, and I. , Electrochemical nanobiosensors, Sensors and Actuators B: Chemical, vol.123, issue.2, pp.1195-144, 2007.
DOI : 10.1016/j.snb.2006.11.016

I. Mascini, G. Palchetti, and . Marrazza, DNA electrochemical biosensors, Fresenius' Journal of Analytical Chemistry, vol.369, issue.1, p.15, 2001.
DOI : 10.1007/s002160000629

G. Demirel, M. O. Caglayan, and B. Garpican, A novel DNA biosensor based on ellipsometry, Surface Science, vol.602, issue.4, p.952, 2008.
DOI : 10.1016/j.susc.2007.12.037

C. Picard and L. , Davoust 18ieme congrès français de mécanique, 2007.

F. Höök, M. Rodahl, P. Brzezinski, and B. Kasemo, Energy Dissipation Kinetics for Protein and Antibody???Antigen Adsorption under Shear Oscillation on a Quartz Crystal Microbalance, Langmuir, vol.14, issue.4, p.729, 1998.
DOI : 10.1021/la970815u

P. Kavanagh and D. , Redox Polymer and Probe DNA Tethered to Gold Electrodes for Enzyme-Amplified Amperometric Detection of DNA Hybridization, Analytical Chemistry, vol.78, issue.8, p.2710, 2006.
DOI : 10.1021/ac0521100

Y. T. Cheng, C. C. Pun, C. Y. Tsai, and . Sens, An array-based CMOS biochip for electrical detection of DNA with multilayer self-assembly gold nanoparticles, Sensors and Actuators B: Chemical, vol.109, issue.2, p.249, 2005.
DOI : 10.1016/j.snb.2004.12.072

G. Siegel, F. Rodríguez, and . Sauer, The effect of an HMG-CoA reductase inhibitor on arteriosclerotic nanoplaque formation and size in a biosensor model, Biosensors and Bioelectronics, vol.18, issue.5-6, p.635, 2008.
DOI : 10.1016/S0956-5663(03)00034-4

V. N. Konopsky and E. V. , Photonic Crystal Surface Waves for Optical Biosensors, Analytical Chemistry, vol.79, issue.12, pp.4729-4735, 2007.
DOI : 10.1021/ac070275y

R. A. Tripp, Novel nanostructures for SERS biosensing, Nano Today, vol.3, issue.3-4, pp.31-37, 2008.
DOI : 10.1016/S1748-0132(08)70042-2

E. M. Southern, Detection of specific sequences among DNA fragments separated by gel electrophoresis, Journal of Molecular Biology, vol.98, issue.3, p.503, 1975.
DOI : 10.1016/S0022-2836(75)80083-0

X. Yao, X. Li, F. Toledo, and C. Zurita-lopez, 171: A. Otto Physics, Anal. Biochem, vol.354, issue.216, p.398, 1968.

. St, John anal chem, p.1108, 1998.

J. Homola, Present and future of surface plasmon resonance biosensors, Analytical and Bioanalytical Chemistry, vol.377, issue.3, p.528, 2003.
DOI : 10.1007/s00216-003-2101-0

X. D. Hoa, A. G. Kirk, and M. Tabrizian, Towards integrated and sensitive surface plasmon resonance biosensors: A review of recent progress, Biosensors and Bioelectronics, vol.23, issue.2, p.151, 2007.
DOI : 10.1016/j.bios.2007.07.001

J. Homola, Surface Plasmon Resonance Sensors for Detection of Chemical and Biological Species, Chemical Reviews, vol.108, issue.2, p.462, 2008.
DOI : 10.1021/cr068107d

J. B. Laas-cnrs, Goh et al sensors and actuators B, Habilitation à Diriger Recherches, 2005.

S. Weiss, Fluorescence Spectroscopy of Single Biomolecules, Science, vol.283, issue.5408, p.1676, 1999.
DOI : 10.1126/science.283.5408.1676

S. K. Sia and G. M. , Microfluidic devices fabricated in Poly(dimethylsiloxane) for biological studies, ELECTROPHORESIS, vol.24, issue.21, pp.3563-3576, 2003.
DOI : 10.1002/elps.200305584

J. Stein, L. N. Lewis, Y. Gao, and R. A. Scott, In Situ Determination of the Active Catalyst in Hydrosilylation Reactions Using Highly Reactive Pt(0) Catalyst Precursors, Journal of the American Chemical Society, vol.121, issue.15, p.3693, 1999.
DOI : 10.1021/ja9825377

J. E. Mark and H. , Allok Inorganic Polymers, p.141, 1992.

M. Garbassi and E. Morra, Occhiello Polymer Surfaces: From Physics to Technology, p.427, 1994.

J. Holly and M. J. , Owen Physicochemical Aspects of Polymer Surfaces, p.625, 1981.

Q. He, Z. Liu, P. Xiao, R. Liang, and N. He, Preparation of Hydrophilic Poly(dimethylsiloxane) Stamps by Plasma-Induced Grafting, Langmuir, vol.19, issue.17, p.6982, 2003.
DOI : 10.1021/la020785h

H. Hillborg and U. W. , Hydrophobicity changes in silicone rubbers, IEEE Transactions on Dielectrics and Electrical Insulation, vol.6, issue.5, p.703, 1999.
DOI : 10.1109/94.798127

M. Morra, E. Occhiello, R. Marola, F. Garbassi, and D. Johnson, On the aging of oxygen plasma-treated polydimethylsiloxane surfaces, Journal of Colloid and Interface Science, vol.137, issue.1, pp.11-24, 1990.
DOI : 10.1016/0021-9797(90)90038-P

I. Bôhm, A. Lampert, M. Buck, F. Eisert, and M. Grunze, A spectroscopic study of thiol layers prepared by contact printing, Applied Surface Science, vol.141, issue.3-4, pp.237-243, 1999.
DOI : 10.1016/S0169-4332(98)00510-8

C. Thibault, C. Séverac, A. F. Mingotaud, C. Vieu, and M. , Poly(dimethylsiloxane) Contamination in Microcontact Printing and Its Influence on Patterning Oligonucleotides, Langmuir, vol.23, issue.21, p.10706, 2007.
DOI : 10.1021/la701841j

H. Hillborg, J. F. Ankner, U. W. Gedde, G. D. Smith, H. K. Yasuda et al., Crosslinked polydimethylsiloxane exposed to oxygen plasma studied by neutron reflectometry and other surface specific techniques, Polymer, vol.41, issue.18, pp.6851-6863, 2000.
DOI : 10.1016/S0032-3861(00)00039-2

S. Bhattacharya, A. Datta, J. M. Berg, and S. Gangopadhyay, Studies on surface wettability of poly(dimethyl) siloxane (PDMS) and glass under oxygen-plasma treatment and correlation with bond strength, Journal of Microelectromechanical Systems, vol.14, issue.3, pp.590-597, 2005.
DOI : 10.1109/JMEMS.2005.844746

E. Delamarche, H. Schmid, and B. Michel, Stability of molded polydimethylsiloxane microstructures, Advanced Materials, vol.383, issue.9, p.741, 1997.
DOI : 10.1002/adma.19970090914

A. Bietsch and B. Michel, Conformal contact and pattern stability of stamps used for soft lithography, Journal of Applied Physics, vol.88, issue.7, p.4310, 2000.
DOI : 10.1063/1.1289816

J. A. Rogers, K. E. Paul, and G. M. , Quantifying distortions in soft lithography, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol.16, issue.1, p.88, 1998.
DOI : 10.1116/1.589841

H. Lalo, J. C. Cau, C. Thibault, N. Marsaud-microelec, and . Eng, Special issue MNE, Chem. Mater, vol.40, issue.13, p.1674, 2001.

D. C. Tully, K. Wilder, and J. M. , Dendrimer-Based Self-Assembled Monolayers as Resists for Scanning Probe Lithography, Advanced Materials, vol.11, issue.4, p.314, 1999.
DOI : 10.1002/(SICI)1521-4095(199903)11:4<314::AID-ADMA314>3.0.CO;2-E

J. Meunier, François Nucleic Acids Research, 2003.

G. Boiteux, P. Dublineau, M. Feve, C. Mathieu, G. Seytre et al., Dielectric and viscoelastic studies of curing epoxy-amine model systems, Polymer Bulletin, vol.30, issue.4, p.441, 1993.
DOI : 10.1007/BF00338478

M. F. Grenier-loustalot and P. Grenier, Reaction epoxy-amine: Suivi du mecanisme reactionnel et de la cinetique par RMN 13C, 15N et HPLC, Journal of Polymer Science: Polymer Chemistry Edition, vol.22, issue.12, pp.4011-4033, 1984.
DOI : 10.1002/pol.1984.170221236

D. A. Tomalia and H. , Dendritic macromolecules: synthesis of starburst dendrimers, Macromolecules, vol.19, issue.9, p.2466, 1986.
DOI : 10.1021/ma00163a029

W. T. Huck, N. Bowden, P. Onck, T. Pardoen, J. Hutchinson et al., Ordering of Spontaneously Formed Buckles on Planar Surfaces, Langmuir, vol.16, issue.7, p.3497, 2000.
DOI : 10.1021/la991302l

S. M. Gubanski and A. E. Vlastós, Wettability of naturally aged silicon and EPDM composite insulators, IEEE Transactions on Power Delivery, vol.5, issue.3, p.1527, 1990.
DOI : 10.1109/61.57997

A. Tóth, I. Bertóti, M. Blazsó, G. Bánhegyi, A. Bognar et al., Oxidative damage and recovery of silicone rubber surfaces. I. X-ray photoelectron spectroscopic study, Journal of Applied Polymer Science, vol.52, issue.9, p.1293, 1994.
DOI : 10.1002/app.1994.070520914

H. Hillborg, J. F. Ankner, U. W. Gedde, G. D. Smith, and H. K. , Crosslinked polydimethylsiloxane exposed to oxygen plasma studied by neutron reflectometry and other surface specific techniques, Polymer, vol.41, issue.18, pp.6851-6863, 2000.
DOI : 10.1016/S0032-3861(00)00039-2

D. A. Tomalia and H. , Dendritic macromolecules: synthesis of starburst dendrimers, Macromolecules, vol.19, issue.9, p.2466, 1986.
DOI : 10.1021/ma00163a029

G. Boiteux, P. Dublineau, M. Feve, C. Mathieu, G. Seytre et al., Dielectric and viscoelastic studies of curing epoxy-amine model systems, Polymer Bulletin, vol.30, issue.4, p.441, 1993.
DOI : 10.1007/BF00338478

D. C. Duffy, C. Mcdonald, O. J. Schueller, and G. M. , Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane), Analytical Chemistry, vol.70, issue.23, p.4974, 1998.
DOI : 10.1021/ac980656z

D. Kriz and K. , Competitive amperometric morphine sensor based on an agarose immobilised molecularly imprinted polymer, Analytica Chimica Acta, vol.300, issue.1-3, p.71, 1995.
DOI : 10.1016/0003-2670(94)00368-V

M. Yan and A. Kapua, Fabrication of molecularly imprinted polymer microstructures, Analytica Chimica Acta, vol.435, issue.1, p.163, 2001.
DOI : 10.1016/S0003-2670(00)01355-6