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Développement de bolomètre refroidi à 0,1 K pour une détection X dans la gamme 100 eV – 10 keV

Abstract : Astronomy missions of the next generation (IXO for instance) are under study. These missions will be equipped with X ray mirrors of large surface, with a bandwidth extended to high energies and high angular resolution. This requires the use of imaging-spectrometers in the focal plane with performances improved in terms of counting rate, energy bandwidth and spectral resolution, compared with CCDs, which form the basis of existing instruments. The work undertaken in this PhD thesis has been the extrapolation, to the X-ray detection, of IR (Infra Red) bolometer arrays already developed at CEA/LETI for the space mission HERSCHEL. We have adapted the electrical impedance of the silicon sensor to measure pulse signals caused by X-ray interactions with the detector. We have bound absorber arrays made of tantalum (which has been processed and provided by laboratories in collaboration with the LETI) to silicon thermistor arrays in a single automatic step. We have validated the indium bump hybridization of absorber arrays on sensor arrays and improved the thermo-mechanical link, provided by this hybridization in terms of thermal capacitance. We succeeded in realizing 8x8 pixels array prototypes using collective technological processes only. These processes are readily usable to realize larger arrays (32 x 32 pixels).
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Contributor : Abdelkader Aliane <>
Submitted on : Monday, May 25, 2009 - 4:31:41 PM
Last modification on : Friday, October 23, 2020 - 4:41:10 PM
Long-term archiving on: : Thursday, June 10, 2010 - 11:48:50 PM


  • HAL Id : tel-00387573, version 1



Abdelkader Aliane. Développement de bolomètre refroidi à 0,1 K pour une détection X dans la gamme 100 eV – 10 keV. Micro et nanotechnologies/Microélectronique. Institut National Polytechnique de Grenoble - INPG, 2009. Français. ⟨tel-00387573⟩



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