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Difraction et diffusion de la lumiere : modelisation tridimensionnelle et application a la metrologie de la microelectronique et aux techniques d'imagerie selective en milieu diffusant

Abstract : We study diffraction and light scattering, both theoreticaly and experimentaly. We use the differential method that we have implemented for 2D structures in classical and conical incidence and for biperiodic 3D structures. Beyond the classical improvement of the S-matrix algorithm and the Fourier series factorisation rules, we propose a new matricial integration algorithm for the equations of the field. This new and faster method allows us to adress the case of diffraction by 3D objects of arbitrary shape, while respecting the factorisation rules. We then use this tool to study the inverse problem applied to the metrology of microelectronics components with submicrometric dimensions, we show that the differential method is superior to the traditionally used RCWA in the case of components with non-lamellar shapes. We also apply this tool to the study of the extension of the selective imaging method in random media to the case of surfaces with strong roughness and moderated slopes.
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https://tel.archives-ouvertes.fr/tel-00385414
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Submitted on : Tuesday, May 19, 2009 - 11:18:59 AM
Last modification on : Friday, October 23, 2020 - 4:36:28 PM
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Laurent Arnaud. Difraction et diffusion de la lumiere : modelisation tridimensionnelle et application a la metrologie de la microelectronique et aux techniques d'imagerie selective en milieu diffusant. Physique Atomique [physics.atom-ph]. Université Paul Cézanne - Aix-Marseille III, 2008. Français. ⟨tel-00385414⟩

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