Skip to Main content Skip to Navigation
Theses

Composants optoélectroniques à microcavités verticales sur GaAs : Technologies avancées pour de nouvelles fonctions

Abstract : To face up the increase in their application fields, laser emitters, including VCSELs, are moving rapidly towards greater integration capabilities, as well as diversified functionalities. Sophisticated structures and geometries for these devices are then mandatory, which implies overcoming first some technological limits. This thesis focuses, on the one hand, on the implementation of a methodology for optimizing molecular beam epitaxial growth from a rapid diagnostic method (uniformity, optical properties control) that can be applied to novel VCSEL structures with stacks of non-periodic layer. On the other hand, the wet GaAlAs oxidation technology is studied. This process, known as AlOx, opens the way for obtaining high-performance single-mode VCSELs through the resulting electro-optical lateral confinement. With the aim of an ultimate control and fine engineering for this confinement, the kinetics of oxidation is thoroughly investigated, an novel oven with a real-time in situ control of the oxidation front is presented, and a derived oxidation technique from the surface of a GaAlAs buried layer is demonstrated. This work contributes to the development of technologies for vertical and lateral structurations into vertical microcavity devices, opening up for VCSELs improved performances and new functionalities.
Complete list of metadatas

Cited literature [122 references]  Display  Hide  Download

https://tel.archives-ouvertes.fr/tel-00357498
Contributor : Arlette Evrard <>
Submitted on : Friday, January 30, 2009 - 3:04:49 PM
Last modification on : Friday, October 16, 2020 - 1:47:03 PM
Long-term archiving on: : Tuesday, June 8, 2010 - 7:02:54 PM

Identifiers

  • HAL Id : tel-00357498, version 1

Citation

Moustapha Conde. Composants optoélectroniques à microcavités verticales sur GaAs : Technologies avancées pour de nouvelles fonctions. Micro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 2008. Français. ⟨tel-00357498⟩

Share

Metrics

Record views

285

Files downloads

1173