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Contribution à l'étude de l'injection électrique dans les VCSEL de grandes dimensions

Abstract : This work deals with the simulation, the fabrication and the characterization of broad-area Vertical-Cavity Surface-Emitting Laser (VCSEL) for the control of cavity solitons in view of application to optical data processing. For this application, the use of large-area devices (~100µm) is mandatory, thus leading to stringent requirements on the emission uniformity at a large scale. Besides, for an easier electrical control of these stationary waves, top-emitting devices could be advantageous. However these devices are known to exhibit an annular emission due to their ring-shaped electrodes. Consequently, new devices with an optimized electrical injection scheme have to be developed. This study aims to propose and to evaluate novel technological approaches for this purpose. First, we present a state-of-the-art of solutions published on electrical confinement in VCSEL. Secondly we describe the simulation results we have obtained on the generic solutions that we propose to implement: the addition of a spreading layer at the top of the device (using a Transparent Conductive Electrode: ITO), the combination of a spreading layer with a horizontal potential barrier (Zener junction), and finally a multipoint injection approach (localized injection). The technological optimization of ITO electrodes, the evaluation of the Zener diode benefit and the measurement of the injection contrast obtained by localized etching of the cap layer are then presented. Following these preliminary studies, the implementation of the solutions retained (localized etching and ITO) to broad-area VCSEL fabrication is described. Finally, the electro-optical characterizations are presented: band-shaped devices emitting 50mW in a continuous-wave operation at room temperature have been obtained. These promising preliminary results have however pointed out the needs for further improvement the ITO/GaAs interface properties. They nevertheless demonstrate that these solutions could be exploited for the ai med application as well as for power generation or external cavity laser (VECSEL) realization.
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Submitted on : Thursday, January 15, 2009 - 9:58:25 AM
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  • HAL Id : tel-00353238, version 1

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Eric Havard. Contribution à l'étude de l'injection électrique dans les VCSEL de grandes dimensions. Micro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 2008. Français. ⟨tel-00353238⟩

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