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APPORT DES NOUVEAUX MATÉRIAUX PIÉZOÉLECTRIQUES DANS LE DOMAINE DES MICRO-GYROMÈTRES VIBRANTS

Abstract : The steady development of Microsystems has made possible the birth of a new type of angular rate sensors: the Coriolis vibrating micro-gyroscopes. Those sensors are on the one hand of incomparable minimal size and cost but on the other hand they are of really low performance compared to conventional gyroscopes (i.e. wheel gyrometer, ring laser gyroscope, fibre optic gyroscope?). They are dedicated to new applications such as microdrone guidance, camera image stabilization, car dynamic stability control, etc. The focus of this research is the specific study of the piezoelectric material used in Coriolis vibrating microgyroscope. Up to know low piezoelectric quartz is chosen in regards to its great thermo-mechanical parameters and mastered fabrication process (due to its widespread use in the clock industry). My research, which consists in the study of the benefits of new piezoelectric materials for vibrating micro gyroscope, took place in this context of emerging of new and stronger piezoelectric synthesis materials. In order to answer to this problematic, the following approach was used. First, an analytical vibrating Coriolis gyroscope model was developed in order to study the gyroscope performances (resolution and scale factor). This enabled us to identify the key material parameters and to theoretically compare different piezoelectric materials. Then, the many steps that led to the fabrication of three gyroscope prototypes made of PZT, GaPO4 and langasite are described. Finally the results obtained for the GaPO4 and the PZT prototypes and the comparison in order to validate the model are presented.
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https://tel.archives-ouvertes.fr/tel-00334781
Contributor : Arnaud Parent <>
Submitted on : Monday, October 27, 2008 - 9:45:41 PM
Last modification on : Friday, June 26, 2020 - 2:00:02 PM
Long-term archiving on: : Tuesday, September 18, 2012 - 12:21:09 PM

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  • HAL Id : tel-00334781, version 1

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Arnaud Parent. APPORT DES NOUVEAUX MATÉRIAUX PIÉZOÉLECTRIQUES DANS LE DOMAINE DES MICRO-GYROMÈTRES VIBRANTS. Physique [physics]. Université Paris Sud - Paris XI, 2008. Français. ⟨tel-00334781⟩

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